• 한국세라믹학회지
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• 제54권3호
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• pp.243-248
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• 2017

Pd-doped $SnO_2$ thick film with a pure tetragonal phase was prepared on patterned Pt electrodes by an ink dropping method. Nanostructured $SnO_2$ powder with a diameter of 10 nm was obtained by a modified hydrazine method. Then the ink solution was fabricated by mixing water, glycerol, bicine and the Pd-doped $SnO_2$ powder. When the Pd doping concentration was increased, the grain size of the Pd-doped $SnO_2$ thick film became smaller. However, an agglomerated and extruded surface morphology was observed for the films with Pd addition over 4 wt%. The orthorhombic phase disappeared even at a low Pd doping concentration and a PdO peak was obtained for a high Pd doping concentration. The crack-free Pd-doped $SnO_2$ thick films were able to successfully fill the $30{\mu}m$ gap of the patterned Pt electrodes by the optimized ink dropping method. The prepared 3 wt% Pd-doped $SnO_2$ thick films showed monoxide gas responses ($R_{air}/R_{CO}$) of 4.0 and 35.6 for 100 and 5000 ppm, respectively.

• 한국세라믹학회지
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• 제40권7호
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• pp.657-661
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• 2003

잉크젯 프린터 헤드용 기능성 막으로 많이 활용하고 있는 다층박막(SiO$_2$/poly-Si/SiN/SiO$_2$, 두께, 2.77 $\mu\textrm{m}$)과 다이아몬드 박막(두께, 1.6 $\mu\textrm{m}$)을 미소 외팔보($\mu$-CLB) 형태로 가공한 후 nanoindenter를 이용한 굽힘 시험 방법으로 탄성계수와 굽힘 강도를 측정하였으며 다층막을 이루는 박막 중 SiO$_2$ 박막(두께, 1 $\mu\textrm{m}$)과 SiN 박막(두께, 0.43 $\mu\textrm{m}$)의 탄성계수를 미소 외 팔보 굽힘 시험 방법과 nanoindentation 방법으로 측정한 후 그 결과를 비교하였다. 미소 외팔보 굽힘 시험방법으로 측정한 다층막의 탄성계수와 파괴강도는 외팔보의 폭이 18.5 $\mu\textrm{m}$에서 58.5 $\mu\textrm{m}$로 증가함에 따라 각각 68.08 ㎬과 2.495 ㎬에서 56.53 ㎬과 1.834 ㎬로 감소하였다. SiO$_2$ 박막의 탄성계수 측정값은 외팔보의 폭이 29.6$\mu\textrm{m}$ 와 59.5 $\mu\textrm{m}$ 범위에서 변하여도 영향을 받지 않고 68.16$\pm$0.942 ㎬이었으며, SiN 박막의 탄성계수는 215.45 ㎬이었다. Nanoindentation 방법으로 측정한 SiO$_2$ 박막과 SiN 박막의 탄성계수는 각각 98.78 ㎬, 219.38 ㎬이었다. 이 결과로부터 미소 외팔보 굽힘 시험방법으로 측정한 박막의 탄성계수가 nanoindentation 방법으로 측정한 탄성계수와 2% 미만의 차이를 보이며 일치함을 알 수 있었다.

• 한국전기전자재료학회논문지
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• 제27권11호
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• pp.712-717
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• 2014

Glass ceramic has a high mechanical strength and low sintering temperature. So, it can be used as a thick film substrate or a high strength insulator. A series of glass ceramic samples based on MgO-$Al_2O_3-SiO_2-ZrO_2$ (MASZ) were prepared by melting at $1,600^{\circ}C$, roll-quenching and heat treatment at various temperatures from $900^{\circ}C$ to $1,400^{\circ}C$. Dependent on the heat treatment temperature used, glass ceramics with different crystal phases were obtained. Their nucleation behavior, microstructure and mechanical properties were investigated with differential thermal analysis (DTA), X-ray diffraction (XRD), scanning electron microscopy (SEM), and Vicker's hardness testing machine. With increasing the heat treatment temperature of MASZ samples, their hardness and toughness initially increase and then reach the maximum points at $1,300^{\circ}C$, and begin to decrease at above this temperature, which is likely to be due to the softening of glass ceramics. As the content of $ZrO_2$ in MAS glass ceramics increases from 7.0 wt.% to 13 wt.%, Vicker's hardness and fracture toughness increase from $853Kg/mm^2$ to $878Kg/mm^2$ and $1.6MPa{\cdot}m^{1/2}$ to $2.4MPa{\cdot}m^{1/2}$ respectively, which seems to be related with the nucleation of elongated phases like fiber.

• 한국전기전자재료학회논문지
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• 제25권8호
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• pp.584-592
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• 2012

Room temperature powder spray in vacuum process, so called Aerosol deposition (AD) is a room temperature (RT) process to fabricate thick and dense ceramic films, based on collision of solid ceramic particles. This technique can provide crack-free dense thin and thick films with thicknesses ranging from sub micrometer to several hundred micrometers with very fast deposition rates at RT. In addition, this technique is using solid particles to form the ceramic films at RT, thus there is few limitation of the substrate and easy to control the compositions of the films. In this article, we review the progress made in synthesis of piezoelectric thin/thick films, multi-layer structures, NTC thermistor thin/thick films, oxide electrode thin films for actuators or sensor applications by AD at Korea Institute of Materials Science (KIMS) during the last 4 years.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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• pp.548-551
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• 2002

The crystallization of amorphous silicon (a-Si) was achieved using a field aided lateral crystallization (FALC) process at 350 $^{\circ}C$. Under the influence of an electric field, Cu is found to drastically enhance the lateral crystallization velocity of a-Si. When an electric field was applied to the selectively Cu-deposited a-Si film during the heat treatment at temperature as low as 350 $^{\circ}C$, dendrite-shaped crystallization of a-Si progressed toward Cu-free region and the crystallization from negative electrode side toward positive electrode side was accelerated. We identified that 1000${\AA}$ thick a-Si film was completely crystallized by Cu-FALC process at 350 $^{\circ}C$ by TEM analysis.

• 한국세라믹학회지
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• 제39권10호
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• pp.912-918
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• 2002

스크린 인쇄법을 이용하여 알루미나 기판위에 Ni-Mn-Co-Fe 산화물 후막을 코팅하였다. 후막의 조성과 소성온도를 변화시키며 미세구조와 전기적 특성을 연구하였다. 1150${\circ}C$에서 소성한 시편의 경우 모든 구성 원소가 후막에 균일하게 분포되어 있었다. 그러나, 1200${\circ}C$와 1225${\circ}C$에서 소성한 시편의 경우 Co 원소는 후막에 균일하게 분포되어 있으나 Mn, Ni 및 Fe 원소는 불균일하게 분포되어 있어 Mn 원소의 농도가 큰 영역과 Ni과 Fe 원소의 농도가 큰 영역이 존재하였다. 제조한 모든 후막 NTC 서미스터는 NTC 서미스터의 특성인 로그 저항(log R)과 온도의 역수(1/T) 사이에서 직선적인 관계를 보였다. $(Ni_{1.0}Mn_{1.0}Co_{1-x}Fe_x)O_4$ (0.25${\le}$x${\le}$1.0)와 $(Ni_{0.75}Mn_{1.25}Co_{1-x}Fe_x)O_4$ (0.25${\le}$x${\le}$0.75) 서미스터의 저항, B 정수 및 활성화 에너지는 Fe2O3 함량이 증가함에 따라 증가하였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 추계학술대회 논문집 전기물성,응용부문
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• pp.15-17
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• 2005

In this study, tunable dielectric materials are important for resonator, variable capacitor, phased array antenna and other devices application. In this paper, Dielectric constant increased and tuning range increased with the increased of $BaSrTiO_3/Li_{2}CO_{3}$ content, which probably can be explained by the substitution of Ba3+, Li1+ on BaTiO3 lattice. The tunability and dielectric loss of the $BaSrTiO_2/Li_{2}CO_{3}$ thick film, sintered at $1150^{\circ}C$, were about 43 % and 0.234 at 10$\sim$15 MHz, respectively. In case of BaSrTi/MgO, Dielectric constant decreased and tenability increased with the added of $BaSrTiO_3/MgO$. The ferroelectrics properties were distinct when adding Li to BST ceramic thick film, and paraelectrics pattern was distinct when adding Mg.

• 한국세라믹학회:학술대회논문집
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• 한국세라믹학회 2004년도 추계총회 및 연구발표회 초록집
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• pp.99.1-99.1
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• 2004

• 한국세라믹학회:학술대회논문집
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• 한국세라믹학회 2004년도 춘계총회 및 연구발표회 초록집
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• pp.32.4-32.4
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• 2004

• 한국세라믹학회:학술대회논문집
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• 한국세라믹학회 2003년도 춘계총회 및 연구발표회 초록집
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• pp.72.2-72
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• 2003