• 제목/요약/키워드: Ceramic substrate

검색결과 950건 처리시간 0.026초

세라믹 분말재료의 EPD 후막형성 기술 (EPD Thick Film Formation of Ceramic Powder Materials)

  • 소대화;전용우
    • 동굴
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    • 제75호
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    • pp.49-54
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    • 2006
  • Electrophoretic Deposition (EPD) is the most convenient technology to deposit natural or oxide powders of nonconductive materials in alcoholic suspension solution with adding electrolyte of iodine to form ceramic thick film on metal substrate under applied electric field with double electric layer between electrode and metal substrate. In this research work, the important parameters and technical ways were studied to form EPD thick films of typical oxide ceramics of Al2O3, YBCO and tourmaline powders.

Al2O3 첨가에 따른 potashborosilicate glass ceramic 기판의 특성변화에 관한연구 (Properties of Potashborosilicate Glass-ceramic Substrate by adding Al2O3)

  • 김용철
    • 마이크로전자및패키징학회지
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    • 제5권2호
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    • pp.53-58
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    • 1998
  • Sintering and dielectric characteristics of substrates were estimated by mixing rate of alumina and potashborosilicate glass(PBSG) powders. PBSG powders were used 7761(corning code)and alumina powders were used in extra pure rate(99.9%) and had 0.1 ${\mu}$m mean size. After ball milling with organic additives green sheets which were casted by doctor blade machine were sintered at 800$^{\circ}C$ for 1∼3hrs. Microstructure, linear shrinkage and dielectric constant of substrates were surveyed in order to fabricate low-dielectric and low tem-perature sintering substrate.

Competitive Growth of Carbon Nanotubes versus Carbon Nanofibers

  • Kim, Sung-Hoon
    • 한국세라믹학회지
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    • 제40권12호
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    • pp.1150-1153
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    • 2003
  • Carbon nanofilaments were formed on silicon substrate using microwave plasma-enhanced chemical vapor deposition method. The structures of carbon nanofilaments were identified as carbon nanotubes or carbon nanofibers. The formation of bamboo-like carbon nanotubes was initiated by the application of the bias voltage during the plasma reaction. The growth kinetics of bamboo-like carbon nanotubes increased with increasing the bias voltage. The growth direction of bamboo-like carbon nanotubes was vertical to the substrate.

잉크젯 프린팅 공정을 이용한 3D Integration 집적 기술의 무소결 고충진 유전체막 제조 (Inkjet Printing Process to Fabricate Non-sintered Low Loss Density for 3D Integration Technology)

  • Jang, Hun-Woo;Kim, Ji-Hoon;Koo, Eun-Hae;Kim, Hyo-Tae;Yoon, Young-Joon;Hwang, Hae-Jin;Kim, Jong-Hee
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.192-192
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    • 2009
  • We have successfully demonstrated the inkjet printing process to fabricate $Al_2O_3$ thick films without a high temperature sintering process. A single solvent system had a coffee ring pattern after printing of $Al_2O_3$ dot, line and area. In order to fabricate the smooth surface of $Al_2O_3$ thick film, we have introduced a co-solvent system which has nano-sized $Al_2O_3$ powders in the mixture of Ethylene glycol monomethyl ester and Di propylene glycol methyl ether. This co-solvent system approached a uniform and dense deposition of $Al_2O_3$ powders on the substrate. The packing density of inkjet-printed $Al_2O_3$ films is more than 70% which is very high compared to the value obtained from the films synthesized by other conventional methods such as casting processes. The characterization of the inkjet-printed $Al_2O_3$ films has been implemented to investigate its thickness and roughness. Also the dielectric loss of the films has been measured to understand the feasibility of its application to 3D integration package substrate.

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화학증착 탄화규소 휘스커에 의한 다공성 코디어라이트의 기공구조 개질 및 특성평가 (Pore Structure Modification and Characterization of Porous Cordierite with Chemical Vapor Infiltration (CVI) SiC Whisker)

  • 김익환;김준규;이환섭;최두진
    • 한국세라믹학회지
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    • 제45권2호
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    • pp.132-137
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    • 2008
  • The main purpose of this study is enhancing the filtering efficiency, performance and durability of filter by growing SiC whiskers on cordierite honeycomb substrate. The experiment was performed by Chemical Vapor Infiltration (CVI) in order to control pore morphology of substrate. Increasing the mechanical strength of porous substrate is one of important issues. The formation of "networking structure" in the pore of porous substrate increased mechanical strength. The high pressure gas injection to the specimen showed that a little of whiskers were separated from substrate but additional film coating enhanced the stability of whisker at high pressure gas injection. Particle trap test was performed. More nano-particle was trapped by whisker growth at the pore of substrate. Therefore it is expected that the porous cordierite which deposited the SiC whisker will be the promising material for the application as filter trapping the nano-particles.

Effect of Porous Substrate on the Strength of Asymmetric Structure

  • Kim, Chul;Park, Sang Hyun;Kim, Taewoo;Lee, Kee Sung
    • 한국세라믹학회지
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    • 제52권6호
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    • pp.417-422
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    • 2015
  • In this study, we investigate the effect of porous $Al_2O_3$ substrate on the strengths of asymmetric structures after we prepare such a structure consisting of a dense $Li_2ZrO_3$ top layer and porous $Al_2O_3$ substrate layer. The porosity and elastic modulus of the substrate layer are controlled by sintering temperature, which has three values of 1150, 1250 and $1350^{\circ}C$. The porosity is controlled in the range of ~ 30-50 vol%, elastic modulus is ~80-120 GPa and elastic mismatch $E_s/E_c$ is ~ 0.6-1.0. Indentation stress-strain curves are obtained and analyzed to evaluate the yield stress of the asymmetric structure by concentrated local loading of WC balls. Conventional flexural strengths are also obtained to evaluate the strength of the asymmetric structure. The results indicate that the local yield strength of the asymmetric structure has mid-values between the top and the substrate layer; however, the flexural strength of the asymmetric structure are mainly influenced by elastic modulus and strength of the substrate.

화학증착법에 의한 $PbTiO_3$ 박막의 재료 (Fabrication of $PbTiO_3$ Thin Film by Chemical Vapor Deposition Technique)

  • 윤순길;김호기
    • 한국세라믹학회지
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    • 제23권6호
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    • pp.33-36
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    • 1986
  • The $PbTiO_3$is well known materials having remarkable ferroelectric piezoelectric and pyro-electric properties. Thin films of the lead titanite has been successfully fabricated by Chemical Vapor Deposition on the borosilicate glass and titanium substrate. The $PbTiO_3$ thin film deposited on the borosilicate glass using the $PbCl_2$, $TiCl_4$ dry oxygen and wet oxygen at different temperatures (50$0^{\circ}C$-$700^{\circ}C$) grows along the (001) preferred orientation. On the other hand the $PbTiO_3$ thin film deposited on the titanium substrate using the PbO grows along the (101) preferred orientation. Growth orientation of deposited $PbTiO_3$ depends on the reaction species irrespective of substrate materials. Maximum dielectic constant and loss tangent of the $PbTiO_3$ thin film deposited on the titanium substrate are about 90 and 0.02 respectively, . Deposition rates of $PbTiO_3$ deposited on the borosilicate glass and titanium substrate are 10-15 ${\mu}{\textrm}{m}$/hr. Titanium dioxide interlayer formed be-tween $PbTiO_3$ film and titanium substrate material, It improved the adhesion of the film.

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Preparation of LaGaO3 Based Oxide Thin Film on Porous Ni-Fe Metal Substrate and its SOFC Application

  • Ju, Young-Wan;Matsumoto, Hiroshige;Ishihara, Tatsumi;Inagaki, Toru;Eto, Hiroyuki
    • 한국세라믹학회지
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    • 제45권12호
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    • pp.796-801
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    • 2008
  • $LaGaO_3$ thin film was prepared on Ni-Fe metal porous substrate by Pulsed Laser Deposition method. By the thermal reduction, the dense $NiO-{Fe_3}{O_4}$ substrate is changed to a porous Ni-Fe metal substrate. The volumetric shrinkage and porosity of the substrate are controlled by the reduction temperature. It was found that a thermal expansion property of the Ni-Fe porous metal substrate is almost the same with that of $LaGaO_3$ based oxide. $LaGaO_3$ based electrolyte films are prepared by the pulsed laser deposition (PLD) method. The film composition is sensitively affected by the deposition temperature. The obtained film is amorphous state after deposition. After post annealing at 1073K in air, the single phase of $LaGaO_3$ perovskite was obtained. Since the thermal expansion coefficient of the film is almost the same with that of LSGM film, the obtained metal support LSGM film cell shows the high tolerance against a thermal shock and after 6 min startup from room temperature, the cell shows the almost theoretical open circuit potential.

LTCC 기판재료 응용을 위한 다양한 충전제 함유 CaO-Al2O3-SiO2 유리복합체 연구 (Various Filler Added CaO-Al2O3-SiO2 Glass Composites for LTCC Substrate Applications)

  • 김관수;장호순;신현호;김인태;김신;한용현;윤상옥
    • 한국세라믹학회지
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    • 제46권3호
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    • pp.323-329
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    • 2009
  • Influences of ceramic filler types and dose on the sintering, phase evolution, and dielectric properties of ceramic/CaO-$Al_2O_3-SiO_2$ glass composites were investigated. All of the specimens were sintered at $900^{\circ}C$ for 2 h, which conditions are required by the lowtemperature co-firing ceramic (LTCC) technology. Ceramic fillers of $Al_2O_3,\;SiO_2$, kaolin, and wollastonite were used. The addition of $Al_2O_3$ filler yielded the crystalline phases of alumina and wollastonite, and the densification over 95% of the relative density was achieved up to 50 wt% addition of the filler. For the cases of the fillers of $SiO_2$, kaolin, and wollastonite, crystalline phases of quartz, mullite, and wollastonite formed, while the densification decreased monotonically with the filler addition. In overall, all the investigated fillers with 10 wt% addition resulted in a reasonable sintering (over 95 %) and low dielectric constants (less than 6), demonstrating the feasibility of the investigated composites for application to a LTCC substrate material with a low dielectric constant.