• 한국진공학회:학술대회논문집
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.216-216
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• 1999

The usage of a stationary plasma thruster (SPT) ion source, invented previously for space application in Russia, in experiments with surface modifications and film deposition systems is reported here. Plasma in the SPT is formed and accelerated in electric discharge taking place in the crossed axial electric and radial magnetic fields. Brief description of the construction of specific model of SPT used in the experiments is presented. With gas flow rate 39ml/min, ion current distributions at several distances from the source are obtained. These was equal to 1~3 mA/$\textrm{cm}^2$ within an ion beam ejection angle of $\pm$20$^{\circ}$with discharge voltage 160V for Ar as a working gas. Such an extremely high ion current density allows us to obtain the Ti metal films with deposition rate of $\AA$/sec by sputtering of Ti target. It is shown a possibility of using of reactive gases in SPT (O2 and N2) along with high purity inert gases used for cathode to prevent the latter contamination. It is shown the SPT can be operated at the discharge and accelerating boltages up to 600V. The results of presented experiments show high promises of the SPT in sputtering and surface modification systems for deposition of oxide thin films on Si or polymer substrates for semiconductor devices, optical coatings and metal corrosion barrier layers. Also, we have been tried to establish in application of the modeling expertise gained in electric and ionic propulsion to permit numerical simulation of additional processing systems. In this mechanism, it will be compared with conventional DC sputtering for film microstructure, chemical composition and crystallographic considerations.

• The Korean Journal of Ceramics
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• 제4권3호
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• pp.249-253
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• 1998

The influence of PbO additive on dielectric properties and sintering behavior of $(Pb_{0.46}Ca_{0.55})$ {$(Fe__1/2}Nb_{1/2}){0.9}Sn_{{0.1}$}$O_3$ ceramics has been investigated. The incorporation of a limited excess PbO ($\leq$2.0 wt. %) in the starting materials is quite beneficial for densification in the temperature range of 1150~$1175^{\circ}C$ in air. At a small doping level (0.8 wt. %) the ceramics prepared from powders calcined at $900^{\circ}C$ showed the best dielectric properties. The dielectric constants ($\varepsilon_r$) and Q.f were found to be 85.8~85.6 and 8530~8600 GHz, respectively. The temperature coefficient of resonant frequency ($\tau_f$) varied in the range of -2~4 $ppm/^{\circ}C$. Examination of the microstructure as well as analysis of the second phases in these materials revealed the presence of the pyrochlore-type phase which is detrimental to the dielectrics.

• 대한치과보철학회지
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• 제27권2호
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• pp.219-248
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• 1989

The purposes of this study were to analyze the microstructural and compositional changes of metal surfaces following different conditions of preoxidizing heat treatment, to investigate the composition of metal oxides, and to evaluate the effect of preoxidation and removal of surface oxides on microstructure and diffusion profiles. The techniques of EDAX (energy-dispersive analysis of x-ray), ESCA (electron spectroscopy for chemical analysis), and EPMA (electron probe micro analysis) were used, along with SEM (scanning electron microscopy). The obtained results were as follows : 1. A surface of the specimen became rough and the amount of the metal oxides increased with increasing the heat treatment time and temperature and the partial pressure of oxygen. 2. At an air pressure of 28' vacuum, the higher the temperature and the longer the time of preoxidation, the higher Ni concentration was detected. 3. Cr concentration in the specimen heat treated with air was higher than that of with vacuum. 4. The oxides in the specimens were mainly composed of Ni and Cr oxides. On the globular growth particles, significant rises in Al concentration of Rexillium III and Ti concentration of Verabond were noted. 5. Atomic diffusion occurred at the ceramic-metal interface, furthermore the amount of the flux was increased with preoxidation heat treatment.

• 한국전기전자재료학회논문지
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• 제14권3호
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• pp.190-196
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• 2001

The microwave dielectric properties and a sintering behavior of MgTiO$_3$-CaTiO$_3$ ceramics doped with Li were investigated. The main composition was fixed as 0.94MMgTiO$_3$-0.06CaTiO$_3$ and Li$_2$CO$_3$was added excessively in the range of 0~10 mol% (with reference to Li atoms) and the specimens were sintered at 1200~140$0^{\circ}C$ for 4 hours. When the amount of Li was small the quality factor and dielectric constant were reduced, while those tow properties increased if the Li amount was above 1 mol%. But if Li was overly added those dielectric properties decreased again. Li, if added in the composition range of 1.0~3.0 mol%, can increase the quality factor of MgTiO$_3$-CaTiO$_3$ ceramics. The optimum amount of Li was 1.5mol% and sinterign condition was 1275$^{\circ}C$/4hr, at which we cudl obtain following results ; dielectric constant ($\varepsilon$$_{r}$) of f20.0, quality factor(Qxf$_{0}$) of 78,000 GHz and temperature coefficient of resonant frequency($\tau$$_{f}$) of -1.6 ppm/$^{\circ}C$.>.>.>.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 1999년도 제30회 추계학술대회
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• pp.154-159
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• 1999

Silicon nitride ceramic has been verified as an excellent rolling bearing material because of its high strength and outstanding rolling fatigue life properties. However under some corrosive circumstances it showed drawbacks such as hardness reduction and severe wear caused by corrosion. In this work, the variations of the rolling wear and hardness of three kinds of ceramics were studied for the specimen aged 15 days in alkali water (90$\pm$2$^{\circ}C$, 25 wt% NaOH). All of the specimens, \circled1Si$_3$N$_4$, \circled23Y-TZP and \circled33Y-TZP alloyed with 5 wt% CeO$_2$, were sintered and post-Hipped, and then polished up to 0.02 ${\mu}{\textrm}{m}$Ra of surface roughness. Rolling wear tests were conducted by MJ type rolling fatigue life tester under the initial theoretical maximum contact stress or 3.76 Gra and the spindle speed of 1,000 rpm. Spindle oil was used as a lubricant. The specimens were not worn before aging. For the specimen aged in alkali water, Si$_3$N$_4$and 3Y-TZP were worn by rolling wear tests, and hardness was decreased. While aging the specimens, the phase was transformed from tetragonal to monoclinic in 3Y-TZP and the microstructure change occurred in Si$_3$N$_4$. 3Y-TZP alloyed with 5 wt% CeO$_2$specimens were not worn after aging and no phase transformation occurred while aging.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.193-193
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• 2011

To obtain ceramic films, the sol-gel coating technique has been broadly used with heat treatment, but crack formation tend to occur during heat treatment in thick sol-gel films. We prepared PZT thin films by sol-gel method with single-step spin coating process. The PZT solution have been synthesized using lead acetate ($Pb(CH_3COO)_2$), zirconium acetylacetonate ($Zr(OC_3H_7^n)_4$), and titanium diisopropoxide bis(acetylacetonate) 75wt% in isopropanol ($Ti(OC_3H_7^i)_2(OC_3H_7^n)_2$) as starting materials and n-propanol was selected as a solvent. The poly(vynilpyrrolidone) (PVP) was added with 0, 0.25, 0.5, 0.75, and 1 molar ratios to control viscosity of solution. We investigated influence of the viscosity on thickness, microstructure, and electrical properties of final PZT films. Thermo-gravimetric analysis and differential scanning calorimeter (TGA/DSC) was carried out from room temperature to $800^{\circ}C$ in order to measure pyrolysis temperature. Structural characteristics were analyzed by X-ray diffraction (XRD) and scanning electron microscopy (SEM). Ferroelectric and dielectric properties were measured by RT66A (Radiant) and impedance analyzer (Agilent), respectively. The thicknesses of PZT films depended on incorporation of an excess amount of PVP. Finally, we obtained PZT films of good quality without crack formation via single-step spin coating.

• 한국재료학회지
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• 제10권6호
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• pp.430-436
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• 2000

본 연구에서는 hexagonal-ferrite에서 NiO, CuO의 몰비와 B-Bi-Zn 첨가제에 따른 미세구조, 밀도 흡수율, 수축율, 주파수에 따른 투자율 등의 특성을 관찰하여 수 GHz대역의 고주파 침 인덕터용 재료로서의 가능성을 확인하고자 하였다. 투자율의 측정은 impedance analyzer 와 network analyzer를 이용하여 100kHz∼3GHz 대역까지 실시하였다. 특성의변화를 살펴본 결과 사용된 B-Bi-Zn 유리분말은 전극돠의 동시소결이 가능하게 보였으며, 복수투자율의 결과에 의하며, 1.8GHz까지는 그 값이 변화를 보이지 않고 일정하였고, 복소투자율의 허수값이 최고값에서 나타나는 공진주파수는 2 GHz 부근에서 관찰되었다.

• 한국재료학회지
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• 제12권4호
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• pp.269-273
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• 2002

The NASICON solid electrolyte films, $Na_{1+x}Zr_2Si_xP_{3-x}O_{12}$(1.5< x < 2.3), was prepared from ceramic slurry by modified doctor-blade process. The NASICON solid electrolyte and fabricated sensors, Pt-electrode/NASICON/Carbonate$(Na_2CO_3-K_2CO_3CaCO_3\; system)$ electrode, were investigated to measure phase, microstructure and e.m.f variation for sensing $CO_2$ concentration. The uniform grain size of $2-4{\mu}m$ and major phase of sodium zirconium silicon phosphate phase, $Na_{1+x}Zr_2Si_xP_{3-x}O_{12}$was identified with X-ray diffraction patterns and scanning electron microscopy, respectively. The Nernst's slope of 84 mV/decade for $CO_2$ concentration from 500 to 8000 ppm was obtained at operating temperature of $400^{\circ}C$.

• 한국재료학회지
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• 제25권5호
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• pp.215-220
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• 2015

The effect of Al content on the processing of reaction-bonded $Al_2O_3$ (RBAO) ceramics using 40v/o ~ 80v/o Al-Zn-Mg alloy powder was studied in order to improve traditional RBAO ceramic processes that use ~ 40v/o pure Al powder. The influence of high Al content in starting $Al_2O_3$-Al alloy powder mixtures on its particulate characteristics, reaction-bonding, microstructure, physical and mechanical properties was revealed. Starting $Al_2O_3$-Al alloy powder mixtures with 40v/o ~ 80v/o Al alloy powder were milled, reaction-bonded, post-sintered, and characterized. With an increasing Al alloy content, the milling efficiency of Al alloy powder was lowered, resulting in a larger particle size after milling. However, in spite of the larger particle size of Al alloy powder, the oxidation, i.e., reaction-bonding, of the Al alloy was successfully completed via solid and liquid state oxidation, in which the activation energy of the oxidation was nearly the same regardless of Al alloy content. After reaction-bonding and post-sintering at $1600^{\circ}C$, RBAO ceramics from 80v/o Al alloy content showed a relative density of ~97% and a flexural strength of 251 MPa compared to ~ 96% and 353 MPa for RBAO ceramics from 40v/o Al alloy content, respectively. The lower flexural strength at 80v/o Al alloy content was due to the weak spinel phase that formed from Zn, Mg alloying elements in Al.

• 한국재료학회지
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• 제22권8호
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• pp.409-415
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• 2012

$TiO_2$ thin films for high energy density capacitors were prepared by r.f. magnetron sputtering at room temperature. Flexible PET (Polyethylene terephtalate) substrate was used to maintain the structure of the commercial film capacitors. The effects of deposition pressure on the crystallization and electrical properties of $TiO_2$ films were investigated. The crystal structure of $TiO_2$ films deposited on PET substrate at room temperature was unrelated to deposition pressure and showed an amorphous structure unlike that of films on Si substrate. The grain size and surface roughness of films decreased with increasing deposition pressure due to the difference of mean free path. X-ray photoelectron spectroscopy (XPS) analysis revealed the formation of chemically stable $TiO_2$ films. The dielectric constant of $TiO_2$ films was significantly changed with deposition pressure. $TiO_2$ films deposited at low pressure showed high dissipation factor due to the surface microstructure. The dielectric constant and dissipation factor of films deposited at 70 mTorr were found to be 100~120 and 0.83 at 1 kHz, respectively. The temperature dependence of the capacitance of $TiO_2$ films showed the properties of class I ceramic capacitors. $TiO_2$ films deposited at 10~30 mTorr showed dielectric breakdown at applied voltage of 7 V. However, the films of 500~300 nm thickness deposited at 50 and 70 mTorr showed a leakage current of ${\sim}10^{-8}{\sim}10^{-9}$ A at 100 V.