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New Approaches for Overcoming Current Issues of Plasma Sputtering Process During Organic-electronics Device Fabrication: Plasma Damage Free and Room Temperature Process for High Quality Metal Oxide Thin Film

  • Hong, Mun-Pyo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.100-101
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    • 2012
  • The plasma damage free and room temperature processedthin film deposition technology is essential for realization of various next generation organic microelectronic devices such as flexible AMOLED display, flexible OLED lighting, and organic photovoltaic cells because characteristics of fragile organic materials in the plasma process and low glass transition temperatures (Tg) of polymer substrate. In case of directly deposition of metal oxide thin films (including transparent conductive oxide (TCO) and amorphous oxide semiconductor (AOS)) on the organic layers, plasma damages against to the organic materials is fatal. This damage is believed to be originated mainly from high energy energetic particles during the sputtering process such as negative oxygen ions, reflected neutrals by reflection of plasma background gas at the target surface, sputtered atoms, bulk plasma ions, and secondary electrons. To solve this problem, we developed the NBAS (Neutral Beam Assisted Sputtering) process as a plasma damage free and room temperature processed sputtering technology. As a result, electro-optical properties of NBAS processed ITO thin film showed resistivity of $4.0{\times}10^{-4}{\Omega}{\cdot}m$ and high transmittance (>90% at 550 nm) with nano- crystalline structure at room temperature process. Furthermore, in the experiment result of directly deposition of TCO top anode on the inverted structure OLED cell, it is verified that NBAS TCO deposition process does not damages to the underlying organic layers. In case of deposition of transparent conductive oxide (TCO) thin film on the plastic polymer substrate, the room temperature processed sputtering coating of high quality TCO thin film is required. During the sputtering process with higher density plasma, the energetic particles contribute self supplying of activation & crystallization energy without any additional heating and post-annealing and forminga high quality TCO thin film. However, negative oxygen ions which generated from sputteringtarget surface by electron attachment are accelerated to high energy by induced cathode self-bias. Thus the high energy negative oxygen ions can lead to critical physical bombardment damages to forming oxide thin film and this effect does not recover in room temperature process without post thermal annealing. To salve the inherent limitation of plasma sputtering, we have been developed the Magnetic Field Shielded Sputtering (MFSS) process as the high quality oxide thin film deposition process at room temperature. The MFSS process is effectively eliminate or suppress the negative oxygen ions bombardment damage by the plasma limiter which composed permanent magnet array. As a result, electro-optical properties of MFSS processed ITO thin film (resistivity $3.9{\times}10^{-4}{\Omega}{\cdot}cm$, transmittance 95% at 550 nm) have approachedthose of a high temperature DC magnetron sputtering (DMS) ITO thin film were. Also, AOS (a-IGZO) TFTs fabricated by MFSS process without higher temperature post annealing showed very comparable electrical performance with those by DMS process with $400^{\circ}C$ post annealing. They are important to note that the bombardment of a negative oxygen ion which is accelerated by dc self-bias during rf sputtering could degrade the electrical performance of ITO electrodes and a-IGZO TFTs. Finally, we found that reduction of damage from the high energy negative oxygen ions bombardment drives improvement of crystalline structure in the ITO thin film and suppression of the sub-gab states in a-IGZO semiconductor thin film. For realization of organic flexible electronic devices based on plastic substrates, gas barrier coatings are required to prevent the permeation of water and oxygen because organic materials are highly susceptible to water and oxygen. In particular, high efficiency flexible AMOLEDs needs an extremely low water vapor transition rate (WVTR) of $1{\times}10^{-6}gm^{-2}day^{-1}$. The key factor in high quality inorganic gas barrier formation for achieving the very low WVTR required (under ${\sim}10^{-6}gm^{-2}day^{-1}$) is the suppression of nano-sized defect sites and gas diffusion pathways among the grain boundaries. For formation of high quality single inorganic gas barrier layer, we developed high density nano-structured Al2O3 single gas barrier layer usinga NBAS process. The NBAS process can continuously change crystalline structures from an amorphous phase to a nano- crystalline phase with various grain sizes in a single inorganic thin film. As a result, the water vapor transmission rates (WVTR) of the NBAS processed $Al_2O_3$ gas barrier film have improved order of magnitude compared with that of conventional $Al_2O_3$ layers made by the RF magnetron sputteringprocess under the same sputtering conditions; the WVTR of the NBAS processed $Al_2O_3$ gas barrier film was about $5{\times}10^{-6}g/m^2/day$ by just single layer.

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Effect of Coolant on PEMFC Performance in Low Humidification Condition (저가습 조건에서 냉각 유체의 고분자전해질 연료전지에 대한 영향)

  • Lee, Hung-Joo;Song, Hyun-Do;Kwon, Jun-Taek;Kim, Jun-Bom
    • Journal of the Korean Electrochemical Society
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    • v.10 no.1
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    • pp.25-30
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    • 2007
  • Proton exchange membrane fuel cell(PEMFC) performance could be affected by various factors such as cell temperature, total pressure, partial pressure of reactants and relative humidity. Hydrogen ion is combined with water to form hydronium ion [$H_3O^+$] and pass through membrane resulting electricity generation. Cooling system is needed to remove heat and other uses on large scale fuel cell. In case that collant conductivity is increased, fuel cell performance could be decreased because produced electricity could be leaked through coolant. In this study, triple distilled water(TDW) and antifreeze solution containing ethylene glycol was used to observe resistance change. Resistance of TDW was taken 28 days to reach preset value, and effect on fuel cell operation was not observed. Resistance of antifreeze solution was not reached to preset value up to 48 days, but performance failure occurred presumably caused by bipolar plate junction resulting stoppage resistance experiment. Generally PEMFC humidification is performed near-saturated operating conditions at various temperatures and pressures, but non-humidifying condition could be applied in small scale fuel cell to improve efficiency and reduce system cost. However, it was difficult to operate large scale fuel cell without humidifying, especially higher than $50{\sim}60^{\circ}C$. In case of small flux such as 0.78 L/min, temperature difference between inlet and outlet was occurred larger than other cases resulting performance decrease. Non-humidifying performance experiments were done at various cell temperature. When both of anode and cathode humidification were removed, cell performance was strongly depended on cell operating temperature.

Studies on Artificial Polyploid Forest Trees XIII -Some Morphological and Physiological Characteristics of Colchitetraploid Hibiscus syriacus L.- (인위배수성(人爲倍數性) 임목(林木)에 관(關)한 연구(硏究) XIII -Colchitetraploid인 자주무궁화와 단심무궁화의 몇 형태학적(形態學的) 및 생리학적(生理學的) 특성(特性)-)

  • Lee, Suk Koo;Kim, Chung Suk
    • Journal of Korean Society of Forest Science
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    • v.32 no.1
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    • pp.73-86
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    • 1976
  • Two individuals ($sp_1$, $sp_2$) of purple and one individual ($sd_1$) of red hearted flower were selected from 18 years old Hibiscus syriacus trees obtained from the seeds treated with colchicine, and their morphological and physiological characteristics were investigated and following results were obtained. 1. The somatic chromosome number of the selected individuals, $sp_1$, $sp_2$, and $sd_1$ were 2n=160, while that of the check tree was 2n=80, indicating that the selected individuals, $sp_1$, $sp_2$ and $sd_1$ were tetraploid. 2. Peroxidase isoenzyme bands of high activity in selected individuals, $sp_1$, $sd_1$ and check tree were mostly in cathode, fixed band was f and v bands, and frequency of each band and their activity were not different between selected individuals, $sp_1$ and $sd_1$ and check tree. 3. The flowers of $sp_1$ individual were large in size and more dark purple than check tree's. The flowers of $sp_2$ individual were not increased in size, but they were dark purple and red heart at the base of the petal was expanded to 2/3 of the petal length. The flower of $sd_1$ individual was also large and some of the red lines from the petal base were extended to 2/3 of the petal length, which was much longer than those of the check tree. 4. Thickess of leaves, length of guard cells, diameter of pollens, wood fiber lengths and woody fiber widths were all increased in $sp_1$, $sp_2$ and $sd_1$ as compared to those of the check tree. 5. Survival percentage of cuttings was 80% with $sp_1$ and 36% with $sd_1$, and their growth performance were inferior to control in their second growing season.

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Electrochemical Generation of Chlorine Dioxide from Sodium Chlorite Using Un-Divided Electrochemical Cell: Effect of Anode Materials (아염소산나트륨의 무격막 전기분해에 의한 이산화염소 생성: 양전극 재질에 따른 영향)

  • Kwon, Tae Ok;Park, Bo Bae;Roh, Hyun Cheul;Moon, Il Shik
    • Korean Chemical Engineering Research
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    • v.48 no.2
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    • pp.275-282
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    • 2010
  • A characteristic study of aqueous chlorine dioxide generation from sodium chlorite($NaClO_2$) by an undivided electrochemical cell with different anode materials were performed. $IrO_2$-coated Ti, $RuO_2$-coated Ti and DSA were used as anode materials and Pt-coated Ti electrode was used as cathode. Various electrochemical cell operating parameters such as cell residence time($t_R$), initial feed solution pH, sodium chlorite and sodium chloride(NaCl) concentration and applied current for the generation of chlorine dioxide in an un-divided cell were investigated and optimized. Estimated optimal cell residence times in $IrO_2$-coated Ti, $RuO_2$-coated Ti and DSA anode material systems were around 2.27, 1.52 and 1.52 sec, respectively. Observed optimum initial feed solution pH was around 2.3 in all anode material systems. Optimum sodium chlorite concentrations in $IrO_2$-coated Ti, $RuO_2$-coated Ti and DSA anode systems were around 0.43, 0.43 and 0.32 g/L, respectively. Optimum electrolyte concentration and applied current were around 5.85 g/L and 0.6 A in all anode systems. Current efficiencies of $IrO_2$-coated Ti, $RuO_2$-coated Ti and DSA anode systems under optimum conditions were 79.80, 114.70 and 70.99%, respectively. Obtained energy consumptions for the optimum generation of chlorine dioxide were 1.38, 1.03 and $1.61W{\cdot}hr/g-ClO_2$, respectively.

Development of in-situ Sintered Ni-Al Alloy Anode for Molten Carbonate Fuel Cell (용융탄산염 연료전지용 in-situ 소결된 Ni-Al 합금 연료극 개발)

  • Chun, H.A.;Yoon, S.P.;Han, J.;Nam, S.W.;Lim, T.H.
    • Journal of the Korean Electrochemical Society
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    • v.9 no.3
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    • pp.124-131
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    • 2006
  • For commercialization of molten carbonate fuel cell (MCFC), it has some problems to be overcome such as decrease of porosity and thickness of the anode under the operating condition (at $650^{\circ}C$ and working pressure of more than 2 $kg_f/cm^2$). Recently, Ni-Al alloy anode has been proposed to replace the conventional Ni-Cr anode as an alternative material to resist a creep and inhibit the sintering. The objective of this research is to sinter the green sheet of Ni-Al alloy anode during single cell pre-treatment process, which has several advantages like cost down and simplification of manufacturing process. However, the Ni-Al alloy anode prepared with a conventional pre-treatment process showed the phase separation of Ni-Al alloy and formation of micropore(${\leqq}0.4{\mu}m$), resulting in low creep resistance and high electrolyte re-distribution. In order to prevent the Ni-Al alloy anode from phase-separating, nitrogen gas was used in the process of pre-treatment. Introducing the nitrogen, the phase separation from Ni-Al alloy into nickel and alumina was minimized and increased creep resistance. However, there was some micropore formation on the surface of Ni-Al alloy anode during the cell operation due to creation of lithium aluminate. Addition of more amount of electrolyte into a cell, especially at cathode, made the cell performance stable for 2,000 hrs. Consequently, it was possible to make the Ni-Al alloy anode with good creep resistance by the modified in-situ sintering technique.

PREPARATION OF AMORPHOUS CARBON NITRIDE FILMS AND DLC FILMS BY SHIELDED ARC ION PLATING AND THEIR TRIBOLOGICAL PROPERTIES

  • Takai, Osamu
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2000.11a
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    • pp.3-4
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    • 2000
  • Many researchers are interested in the synthesis and characterization of carbon nitride and diamond-like carbon (DLq because they show excellent mechanical properties such as low friction and high wear resistance and excellent electrical properties such as controllable electical resistivity and good field electron emission. We have deposited amorphous carbon nitride (a-C:N) thin films and DLC thin films by shielded arc ion plating (SAIP) and evaluated the structural and tribological properties. The application of appropriate negative bias on substrates is effective to increase the film hardness and wear resistance. This paper reports on the deposition and tribological OLC films in relation to the substrate bias voltage (Vs). films are compared with those of the OLC films. A high purity sintered graphite target was mounted on a cathode as a carbon source. Nitrogen or argon was introduced into a deposition chamber through each mass flow controller. After the initiation of an arc plasma at 60 A and 1 Pa, the target surface was heated and evaporated by the plasma. Carbon atoms and clusters evaporated from the target were ionized partially and reacted with activated nitrogen species, and a carbon nitride film was deposited onto a Si (100) substrate when we used nitrogen as a reactant gas. The surface of the growing film also reacted with activated nitrogen species. Carbon macropartic1es (0.1 -100 maicro-m) evaporated from the target at the same time were not ionized and did not react fully with nitrogen species. These macroparticles interfered with the formation of the carbon nitride film. Therefore we set a shielding plate made of stainless steel between the target and the substrate to trap the macropartic1es. This shielding method is very effective to prepare smooth a-CN films. We, therefore, call this method "shielded arc ion plating (SAIP)". For the deposition of DLC films we used argon instead of nitrogen. Films of about 150 nm in thickness were deposited onto Si substrates. Their structures, chemical compositions and chemical bonding states were analyzed by using X-ray diffraction, Raman spectroscopy, X-ray photoelectron spectroscopy and infrared spectroscopy. Hardness of the films was measured with a nanointender interfaced with an atomic force microscope (AFM). A Berkovich-type diamond tip whose radius was less than 100 nm was used for the measurement. A force-displacement curve of each film was measured at a peak load force of 250 maicro-N. Load, hold and unload times for each indentation were 2.5, 0 and 2.5 s, respectively. Hardness of each film was determined from five force-displacement curves. Wear resistance of the films was analyzed as follows. First, each film surface was scanned with the diamond tip at a constant load force of 20 maicro-N. The tip scanning was repeated 30 times in a 1 urn-square region with 512 lines at a scanning rate of 2 um/ s. After this tip-scanning, the film surface was observed in the AFM mode at a constant force of 5 maicro-N with the same Berkovich-type tip. The hardness of a-CN films was less dependent on Vs. The hardness of the film deposited at Vs=O V in a nitrogen plasma was about 10 GPa and almost similar to that of Si. It slightly increased to 12 - 15 GPa when a bias voltage of -100 - -500 V was applied to the substrate with showing its maximum at Vs=-300 V. The film deposited at Vs=O V was least wear resistant which was consistent with its lowest hardness. The biased films became more wear resistant. Particularly the film deposited at Vs=-300 V showed remarkable wear resistance. Its wear depth was too shallow to be measured with AFM. On the other hand, the DLC film, deposited at Vs=-l00 V in an argon plasma, whose hardness was 35 GPa was obviously worn under the same wear test conditions. The a-C:N films show higher wear resistance than DLC films and are useful for wear resistant coatings on various mechanical and electronic parts.nic parts.

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Performance of Upflow Anaerobic Bioelectrochemical Reactor Compared to the Sludge Blanket Reactor for Acidic Distillery Wastewater Treatment (상향류식 혐기성 슬러지 블랭킷 반응조에 비교한 생물전기화학 반응조의 산성 주정폐수처리성능)

  • Feng, Qing;Song, Young-Chae;Yoo, Kyuseon;Lal, Banwari;Kuppanan, Nanthakumar;Subudhi, Sanjukta
    • Journal of Korean Society of Environmental Engineers
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    • v.38 no.6
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    • pp.279-290
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    • 2016
  • The performance of upflow anaerobic bioelectrochemical reactor (UABE), equipped with electrodes (anode and cathode) inside the upflow anaerobic reactor, was compared to that of upflow anaerobic sludge blanket (UASB) reactor for the treatment of acidic distillery wastewater. The UASB was stable in pH, alkalinity and VFAs until the organic loading rate (OLR) of 4.0 g COD/L.d, but it became unstable over 4.0 g COD/L.d. As a response to the abrupt doubling in OLR, the perturbation in the state variables for the UABE was smaller, compared to the UASB, and quickly recovered. The UABE stability was better than the UASB at higher OLR of 4.0-8.0 g COD/L.d, and the UABE showed better performance in specific methane production rate (2,076mL $CH_4/L.d$), methane content in biogas (66.8%), and COD removal efficiency (82.3%) at 8.0 g COD/L.d than the UASB. The maximum methane yield in UABE was about 407mL/g $COD_r$ at 4.0 g COD/L.d, which was considerably higher than about $282mL/g\;COD_r$ in UASB. The rate limiting step for the bioelectrochemical reaction in UABE was the oxidation of organic matter on the anode surface, and the electrode reactions were considerably affected by the pH at 8.0 g COD/L.d of high OLR. The maximum energy efficiency of UABE was 99.5%, at 4.0 g COD/L.d of OLR. The UABE can be an advanced high rate anaerobic process for the treatment of acidic distillery wastewater.

Study on Preparation of High Purity Lithium Hydroxide Powder with 2-step Precipitation Process Using Lithium Carbonate Recovered from Waste LIB Battery (폐리튬이차전지에서 회수한 탄산리튬으로부터 2-step 침전공정을 이용한 고순도 수산화리튬 분말 제조 연구)

  • Joo, Soyeong;Kang, Yubin;Shim, Hyun-Woo;Byun, Suk-Hyun;Kim, Yong Hwan;Lee, Chan-Gi;Kim, Dae-Guen
    • Resources Recycling
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    • v.28 no.5
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    • pp.60-67
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    • 2019
  • A valuable metal recovery from waste resources such as spent rechargeable secondary batteries is of critical issues because of a sharp increase in the amount of waste resources. In this context, it is necessary to research not only recycling waste lithium-ion batteries (LIBs), but also reusing valuable metals (e.g., Li, Co, Ni, Mn etc.) recovered from waste LIBs. In particular, the lithium hydroxide ($LiOH{\cdot}xH_2O$), which is of precursors that can be prepared by the recovery of Li in waste LIBs, can be reused as a catalyst, a carbon dioxide absorbent, and again as a precursor for cathode materials of LIB. However, most studies of recycling the waste LIBs have been focused on the preparation of lithium carbonate with a recovery of Li. Herein, we show the preparation of high purity lithium hydroxide powder along with the precipitation process, and the systematic study to find an optimum condition is also carried out. The lithium carbonate, which is recovered from waste LIBs, was used as starting materials for synthesis of lithium hydroxide. The optimum precipitation conditions for the preparation of LiOH were found as follows: based on stirring, reaction temperature $90^{\circ}C$, reaction time 3 hr, precursor ratio 1:1. To synthesize uniform and high purity lithium hydroxide, 2-step precipitation process was additionally performed, and consequently, high purity $LiOH{\cdot}xH_2O$ powder was obtained.

Improvement of Energy Density in Supercapacitor by Ion Doping Control for Energy Storage System (에너지 저장장치용 슈퍼커패시터 이온 도핑 제어를 통한 에너지 밀도 향상 연구)

  • Park, Byung-jun;Yoo, SeonMi;Yang, SeongEun;Han, SangChul;No, TaeMoo;Lee, Young Hee;Han, YoungHee
    • KEPCO Journal on Electric Power and Energy
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    • v.5 no.3
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    • pp.209-213
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    • 2019
  • Recently, demand for high energy density and long cycling stability of energy storage system has increased for application using with frequency regulation (F/R) in power grid. Supercapacitor have long lifetime and high charge and discharge rate, it is very adaptable to apply a frequency regulation in power grid. Supercapacitor can complement batteries to reduce the size and installation of batteries. Because their utilization in a system can potentially eliminate the need for short-term frequent replacement as required by batteries, hence, saving the resources invested in the upkeep of the whole system or extension of lifecycle of batteries in the long run of power grid. However, low energy density in supercapacitor is critical weakness to utilization for huge energy storage system of power grid. So, it is still far from being able to replace batteries and struggle in meeting the demand for a high energy density. But, today, LIC (Lithium Ion Capacitor) considered as an attractive structure to improve energy density much more than EDLC (Electric double layer capacitor) because LIC has high voltage range up to 3.8 V. But, many aspects of the electrochemical performance of LIC still need to be examined closely in order to apply for commercial use. In this study, in order to improve the capacitance of LIC related with energy density, we designed new method of pre-doping in anode electrode. The electrode in cathode were fabricated in dry room which has a relative humidity under 0.1% and constant electrode thickness over $100{\mu}m$ was manufactured for stable mechanical strength and anode doping. To minimize of contact resistance, fabricated electrode was conducted hot compression process from room temperature to $65^{\circ}C$. We designed various pre-doping method for LIC structure and analyzing the doping mechanism issues. Finally, we suggest new pre-doping method to improve the capacitance and electrochemical stability for LIC.

Effect of Terephthalaldehyde to Facilitate Electron Transfer in Heme-mimic Catalyst and Its Use in Membraneless Hydrogen Peroxide Fuel Cell (테레프탈알데하이드의 전자전달 강화효과에 따른 헴 단백질 모방 촉매의 성능 향상 및 이를 이용한 비분리막형 과산화수소 연료전지)

  • Jeon, Sieun;An, Heeyeon;Chung, Yongjin
    • Korean Chemical Engineering Research
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    • v.60 no.4
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    • pp.588-593
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    • 2022
  • Terephthalaldehyde (TPA) is introduced as a cross liker to enhance electron transfer of hemin-based cathodic catalyst consisting of polyethyleneimine (PEI), carbon nanotube (CNT) for hydrogen peroxide reduction reaction (HPRR). In the cyclic voltammetry (CV) test with 10 mM H2O2 in phosphate buffer solution (pH 7.4), the current density for HPRR of the suggested catalyst (CNT/PEI/hemin/PEI/TPA) shows 0.2813 mA cm-2 (at 0.2 V vs. Ag/AgCl), which is 2.43 and 1.87 times of non-cross-linked (CNT/PEI/hemin/PEI) and conventional cross liker (glutaraldehyde, GA) used catalyst (CNT/PEI/hemin/PEI/GA), respectively. In the case of onset potential for HPRR, that of CNT/PEI/hemin/PEI/TPA is observed at 0.544 V, while those of CNT/PEI/hemin/PEI and CNT/PEI/hemin/PEI/GA are 0.511 and 0.471 V, respectively. These results indicate that TPA plays a role in facilitating electron transfer between the electrodes and substrates due to the π-conjugated cross-linking bonds, whereas conventional GA cross-linker increases the overpotential by interrupting electron and mass transfer. Electrochemical impedance spectroscopy (EIS) results also display the same tendency. The charge transfer resistance (Rct) of CNT/PEI/hemin/PEI/TPA decreases about 6.2% from that of CNT/PEI/hemin/PEI, while CNT/PEI/hemin/PEI/GA shows the highest Rct. The polarization curve using each catalyst also supports the superiority of TPA cross liker. The maximum power density of CNT/PEI/hemin/PEI/TPA (36.34±1.41 μWcm-2) is significantly higher than those of CNT/PEI/hemin/PEI (27.87±0.95 μWcm-2) and CNT/PEI/hemin/PEI/GA (25.57±1.32 μWcm-2), demonstrating again that the cathode using TPA has the best performance in HPRR.