• 반도체디스플레이기술학회지
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• 제15권2호
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• pp.26-31
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• 2016

The Townsend to glow discharge mode transition was investigated in the dielectric barrier discharge (DBD) helium plasma source which was powered by 20 kHz / $4.5 kV_{rms}$ high voltage at atmospheric pressure. The spatial profile of the electric field strength at each modes was measured by using the intensity ratio method of two helium emission lines (667.8 nm ($3^1D{\rightarrow}2^1P$) and 728.1 nm ($3^1S{\rightarrow}2^1P$)) and the Stark effect. ICCD images were analyzed with consideration for the electric field property. The Townsend discharge (TD) mode at the initial stage of breakdown has the light emission region located in the vicinity of the anode. The electric field of the light emitting region is close to the applied field in the system. Immediately, the light emitting region moves to the cathode and the discharge transits to the glow discharge (GD) mode. This mode transition can be understood with the ionization wave propagation. The electric field of the emitting region of GD near cathode is higher than that of TD near anode because of the cathode fall formation. This observation may apply to designing a DBD process system and to analysis of the process treatment results.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 하계학술대회 논문집 C
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• pp.1609-1611
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• 2001

A large cross-section pulsed electron beam generator of cold cathode type has been developed for industrial applications, for example, waste water cleaning, flue gas cleaning, and pasteurization etc. The operational principle is based on the emission of secondary electrons from cold cathode when ions in the plasma hit the cathode, which are accelerated toward exit window by the gradient of an electric potential. The conventional electron beam generators need an electron scanning beam because the small cross section thermal electron emitter is used. The electron beam of large cross-section pulsed electron beam generator do not need to be scanned over target material because the beam cross section is large by 300$cm^2$. We have fabricated the large cross-sectional pulsed electron beam generator with the peak energy of 200keV and beam diameter of 200mm and obtained the large area electron beam in the air. The electron beam current has been investigated as a function of accelerating voltage, glow discharge current, helium pressure, distance from the exit window and radial distribution in front of the exit window.

• 한국표면공학회지
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• 제49권6호
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• pp.498-506
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• 2016

Electrochemical measurement using a LSCF6428 electrode was performed to estimate the oxygen potential gradient in the electrode layer and a long time stability test was performed by applied potential to learn the overpotential effect on the LSCF6428 electrode. By fitting the observed impedance spectra, it was obtained that the amount of faradic current decreased with distance from cathode/electrolyte interface. Oxygen potential gradient was estimated to occur within 1 um region from the cathode/electrolyte interface at an oxygen partial pressure of 10-1 bar. The segregation of cation rich phases in the LSCF6428 electrode suggests that kinetic decomposition took place. However, impedance response after applying the potential showed no changes in the electrode compared with before applying potential. The obtained results suggest that segregation of a secondary phase in a LSCF6428 cathode is not related to performance degradation for solid oxide fuel cells (SOFCs).

• 한국세라믹학회지
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• 제43권12호
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• pp.798-804
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• 2006

Co-planar type single chamber solid oxide fuel cell with patterned electrode on a surface of electrolyte has been fabricated by robo-dispensing method and microfluidic lithography. The cells were composed of NiO-GDC-Pd or NiO-SDC cermet anode, $(La_{0.7}Sr_{0.3})_{0.95}MnO_3$ cathode, and yttria stablized zirconia electrolyte. The cell performance at $900^{\circ}C$ was investigated as a function of electrode geometries, such as anode-to-cathode distance, numbers of electrode pairs. Relationship between OCV and I-V characteristics at the optimized operation condition was also studied by DC source meter under the mixed gas condition of methane, air, and nitrogen. An increase of anode-facing-cathode area leads to lower OCV due to intermixing between product gases of anode and cathode, which in turn decreases the oxygen partial pressure difference.

• Journal of Information Display
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• 제2권4호
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• pp.1-7
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• 2001

This paper investigates the characteristics of a newly developed high density hollow cathode plasma(HCP) system and its application for the etching of silicon wafers. We used $SF_6$ and $O_2$ gases in the HCP dry etch process. This paper demonstrates very high plasma density of $2{\times}10^{12}cm^{-3}$ at a discharge current of 20 rna, Silicon etch rate of 1.3 ${\mu}m$/min was achieved with $SF_6/O_2$ plasma conditions of total gas pressure of 50 mTorr, gas flow rate of 40 seem, and RF power of200W. This paper presents surface etching characteristics on a crystalline silicon wafer and large area cast type multicrystlline silicon wafer. We obtained field emitter tips size of less than 0.1 ${\mu}m$ without any photomask step as well as with a conventional photolithography. Our experimental results can be applied to various display systems such as thin film growth and etching for TFT-LCDs, emitter tip formations for FEDs, and bright plasma discharge for PDP applications. In this research, we studied silicon etching properties by using the hollow cathode plasma system.

• 한국염색가공학회지
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• 제4권1호
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• pp.1-9
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• 1992

In order to study on the surface modification of the poly(ethylene Terephthalate)(PET) fabrics, low temperature plasma$(O_2)$ has been irradiated on the PET fabrics in various conditions. Experiments were carried out at pressure ranging from 0.5 tort to 3 tort. The properties of PET fabrics treated with low temperature plasma($(O_2)$, such as bathochromic, wettability, antistatic property were measured. Etching ratio was increased as the pressure and the output of discharge increased. When its were put on the cathode, the most efficient effect of etching according to the position of sample between anode and cathode was obtained. The bathochromic effect has more or less improved as pressure was getting higth in case of dyed fabrics treated with only low temperature plasma$(O_2)$ . And when it was treated with the low refractive index resin, the bathochromic of dyed fabrics treated with low temperature plasma$(O_2)$ was better than that of the dyed fabrics untreated.

• 한국수소및신에너지학회논문집
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• 제20권2호
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• pp.125-132
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• 2009

Cylinder shaped air-breathing PEMFC has been developed to have small volume, low contact resistance and better air accessibility to the open cathode. This cylinder shaped design consists of an anode cylinder with helical flow channel and a cathode current collector with slits. The pressure distribution measurement according to the shapes was performed. The test result indicated that cylinder shaped fuel cell has better pressure distribution compared with the planar shaped fuel cell. The better pressure distribution was connected to the higher performance. The maximum power density of cylinder shaped fuel cell was about 20% higher than the planar shaped fuel cell. The maximum power density of the developed cylinder shaped air-breathing PEMFC with dry hydrogen was $220\;mW/cm^2$ and with humidified hydrogen was $293\;mW/cm^2$.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 하계학술대회 논문집 C
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• pp.1628-1630
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• 2002

In this paper, we measured 3-dimensional temporal behavior of the light emitted from discharge cell of plasma display panel(PDP) as a function of the pressure using the scanned point detecting system. The detected light signal through the PM tube is sent on the oscilloscope and oscilloscope which is connected to PC with GPIB. The whole system is controlled by a PC. From the temporal behavior results, we could analyze the discharge behavior of panel with Ne-Xe(4%) mixing gas and 300torr, 400torr, 500torr pressure. The top view of panel shows that the discharge moves from inner edge of cathode electrode to outer cathode electrode forming arc type. At the 300torr, initial emission time is very fast. The side view of panel shows that the light is detected up to $150{\mu}m$ height of barrier rib. In the panel of 300torr, emission distribution is wider than the others.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제52권10호
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• pp.476-480
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• 2003

In this paper, we have performed 3-dimensional time-resolving measurement of the Ne light emitted from the cell of plasma display panel(PDP) as a function of the pressure using the scanned point detecting system. From the temporal behavior results, we could analyze the discharge behavior of panel with Ne-Xe(4%) mixing gas and 300 torr, 400 torr and 500 torr pressure. At the top view of panel, the discharge of 300 torr panel starts at the 634 ns and ends at the 722 ns. The emission duration time is about 90 ns. The discharge of 400 torr panel starts at the 682 ns and ends at the 786 ns. the emission duration time is about 100 ns. Also, the discharge of 500 torr panel starts at the 770 ns and ends at the 826 ns. the emission duration time is about 56 ns. The discharge moves from inner edge of cathode electrode to outer cathode electrode forming arc type. In the side view of 300 torr, 400 torr and 500 torr an emission shows that the light is detected up to 180${\mu}{\textrm}{m}$, 150${\mu}{\textrm}{m}$ and 70${\mu}{\textrm}{m}$ height of barrier rib and the emission distribution of the 300 torr is wider than 400 torr, 500 torr.

• 방사성폐기물학회지
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• 제12권1호
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• pp.7-17
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• 2014

용융염 전해정련공정은 사용후핵연료로부터 전기화학적인 방법을 통해 음극에서 우라늄을 회수 하는 공정이다. 이 때 우라늄은 약 30wt%의 염을 포함하고 있어 순수한 우라늄을 얻기 위해서는 염을 제거하는 Cathode Process (CP)가 필수적이다. CP는 대량의 우라늄을 처리해야 하므로 파이로공정의 난관중의 하나로 인식되고 있으며, 우라늄의 순도가 최종적으로 결정되는 단계이므로 매우 중요한 공정이다. 현재, 이에 대한 연구는 주로 실험적 방법에 근거 하고 있어 염 제거 공정 중 온도, 압력, 염 가스의 거동을 관찰하기 어렵다. 따라서 본 연구에서는, 공정의 운전 조건에 대해 적합한 수학적 모델을 이용하여 전산모사 해석을 진행하였다. 본 연구는 증류부에서 염 가스의 증류 량, 확산계수에 의해 계산된 장치 내 염 가스의 이동 그리고 응축부에서의 응결속도를 중점적으로 연구하였다. 장치내의 각각의 염 가스 거동을 정의하기 위해 Hertz-Langmuir 관계식, Chapman-Enskog Theory, ANSYS-CFX의 상용 코드를 사용하였다. 그리고 HSC Chemistry에서 염의 물성 값을 이용하여 모델을 구성하였다. 본 연구의 전산모사 해석을 통해 얻은 연구 결과를 이용하여 염 가스의 거동과 장치의 최적 운전조건을 예측하였다. 따라서 본 해석 결과는 CP의 물리적 현상을 깊게 이해하는데 쓰일 뿐 아니라, 공학규모의 CP 장치를 상용규모로 확장하는데 이용 할 수 있다.