• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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• pp.249-249
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• 2000

This paper introduces a clean mobile robot fur 4th generation LCD cassette, which is guided by optical sensor and position compensation using vision module. The mobile robot for LCD cassette transfer might be controlled by AGV controller which has powerful algorithms. It offers optimum routes to the destination of clean mobile robot by using dynamic dispatch algorithm and MAP data. This clean mobile robot is equipped with 4 axes fork type manipulator providing repeatability accuracy of $\pm$ 0.05mm.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.313-314
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• 2011

• 한국정밀공학회지
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• 제31권8호
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• pp.697-703
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• 2014

This paper is study of solving vibration problem occurred in moving hand of wafer transfer robot in semiconductor manufacturing line. Long settling time for decreasing vibration makes low production rate, and moreover the excessive vibration of hand sometimes breaks the wafer in a cassette. The ways of reducing the moving speed and changing the type of motion profile did not help for lessening vibration. Therefore, we analyzed the mechanical property of the hand such as natural frequency, and frequency component of the motion profile currently used in the manufacturing line. In several conditions of motion profile, we found the best condition of which the frequency component in near of natural frequency of the hand is minimal and this induced small vibration in moving hand. The results were verified theoretically and experimentally using frequency analysis.