To improve the performance of MEMS devices, fabricating single-crystalline silicon HARS (high aspect ratio structure) with thicknesses of up to several tens of micrometers has been an active research topic in recent years. However, achieving electrical isolation, which is required for actuating a structure or sensing an electrical signal, has been one of the main problems in single-crystalline silicon HARS fabrication technologies. In this paper, new isolation technologies using high aspect ratio oxide beams and sidewalls are developed to achieve electrical isolation between electrodes of single-crystalline silicon HARS. The developed isolation technologies use insulating oxide structural supports from either the structural sides or from the bottom. In this case because the trench oxide supports have a depth of several tens of ${\mu}m$, the effects of residual stress must be considered. In this paper, insulating supports are fabricated using PECVD TEOS films, the residual stress of the insulating supports is measured, and the effect of the residual stress on the structure is analyzed. It is shown using microresonators, that the developed isolation technologies can be effectively used for HARS using single-crystalline silicon.
Growth response and evapotranspiration of tobacco as to each soil moisture condition treated with different height of ground water table such as 30cm, 100cm, 170cm, and 230cm were investigated. The results obtained were as follows; 1. Soil water potential in the rhizosphere (25cm depth from surface) treated with ground water table (G.W.T) of 230 cm was less than -6.5 bar at 60 days after transplanting. 2. Dry weight of leaves per plant was the highest in the pot treated with 100 cm G.W.T and was the lowest in the pot treated with 230 cm G.W.T.. Leaves/Stem ratio of dry weight was the lowest in the pot treated with 230 cm G.W.T. This would show that extension of leaves as compared with elongation of stem was suppressed. .3. In the roster stress condition of 230 cm G.W.T., extension of leaves was continued until the latter growth stage, Relative growth rate of leaf area per plant of the pot with 30 cm G.W.T. was the highest through all growth period after fixation of G.W.7., but owing to lower density of leaf, the dry weight of leaves per plant was less rather than that of the pot with 170 cm G.W.T. at 64 days after transplanting. 4. The highest evapotranspiration per plant per day was shown at the 45th day after transplanting in the pots with 30cm and 100cm G.W.T. and at 60 days in the pots with 170cm and 230cm G.W.T respectively. 5. In the soil moisture conditions with 30cm and 100cm G.W.T., evapotranspiration per plant per hour was much higher in the daytime that at night as well as in clear day than in rain-cloudy day owing to loner relative humidity , but in the water stress condition with 230 cm G.W.T., that was much lower. 6. Total evapotranspiration per plant during the whole growing period of 64 days was in order of 30cm > 100 cm > 170 cm > 230 cm G.W.T.. Total evapotranspiration for 34 days after fixation of G.W.T was much higher at night than in the daytime in case of water stress conditions i.e 170cm and 230cm G.W.T. but in normal condition of the pots with 30cm and 100cm G.W.T. that was much higher in the daytime than at night. 7. Leaf water potential of the 3rd and 6th leaf from top at 64 days after transplanting was in order of 100cm > 30 cm > 170cm > 230cm G.W.T. The reason why leaf water potential in the pot with 30cm was less than that in the pot with 100cm G.W.T. would be the abnormal turgidity with low density of cell substrates by the excess water absorption in the pot with 30cm G.W.T..
Kim, Chang-Yup;Kim, Yoon;Kwon, Young-Dae;Kim, Yong-Ik;Shin, Young-Soo;Ahn, Hyeong-Sik
Journal of Preventive Medicine and Public Health
/
v.26
no.3
s.43
/
pp.400-411
/
1993
The aim of this study is to analyze the variations among hospitals and hospital groups in resource use and procedures of diagnostic and therapeutic process, such as laboratory tests, radiologic examinations, tissue diagnosis, timing of surgery after admission, the time required for operation. The study was performed for five procedures including cesarean section (C/S), appendectomy, cholecystectomy, cataract extraction, and pediatric pneumonia. The 2,316 subjects were selected from medical insurance claims list, and from this list 413 cases were sampled for medical record review. The patterns of resource utilization and process of treatment were described according to hospitals and characteristics of hospital groups. The major results were as follows : 1. The numbers of laboratory and radiologic tests showed significant difference among hospitals and hospital groups. In case of hospital groups, we could find tendencies of more tests with increasing hospital bed size. 2. In general, the proportion of operative cases evaluated by tissue diagnosis postoperatively among all operations ranged from 28.3% to 100%. The proportion varied among hospital groups, of which general hospital A group(more than 15 specialty) showed the highest proportion. 3. Post-admission delay until operation and the time required for operative procedure were not invariable among hospitals and hospital groups. The duration of operation in tertiary hospitals was slightly shorter than general hospitals, with varying statistical significance. We could find that probably there were differences of quality among hospitals in some components of procedures, which suggested that the implementation of quality assurance activities would be mandatory. In this study, we simply described the patterns of resource utilization and some features of clinical process, with institution of the need for advanced studies with in-depth analyses for each component of diagnosis and treatment procedures.
The plant height, shoot numbers and dry matter weight in both bulrush and rice were increased by high level of nitrogen fertilizer and especially the dry matter weights in both species were sharply increased by high level of nitrogen fertilizer. The plant height, dry matter weight in rice, and shoot, and dry matter weight in bulrush were increased by high level of phosphorus fertilizer. The deficient symptom disappeared with change of low level into high level phosphorus in rice. The plant height, dry matter weight and shoot numbers in rice and bulrush were increased by high level of potassium fertilizer. In the inter-specific competition in bulrush according to various water levels, the plant heights in both species elongated longer with deep water levels, and the plant height and dry matter weight in bulrush were more sharply decreased than in rice by deep water levels. The shoot numbers and dry matter weight were critically dropped above 6-8 cm water level. In case of the shoot numbers for light source, in both species were more decreased in mixed culture than each monoculture. The exserted shoot length and weight in bulrush were larger than those in rice. The shaded shoot dry weight was more decreased in mixed culture than in each monoculture, and the decrement was larger in bulrush than in rice.
The purpose of this study is to investigate the effects of cognitive activity on cognitive activities that students imagine and cope with continuously changing quantitative changes in functional tasks represented by linguistic expressions, table of value, and geometric patterns, We identified covariational reasoning levels and investigated the characteristics of students' reasoning process according to the levels of covariational reasoning in the elementary quantitative problem situations. Participants were seven 4th grade elementary students using the questionnaires. The selected students were given study materials. We observed the students' activity sheets and conducted in-depth interviews. As a result of the study, the students' covariational reasoning level for two quantities that are continuously covaried was found to be five, and different reasoning process was shown in quantitative problem situations according to students' covariational reasoning levels. In particular, students with low covariational level had difficulty in grasping the two variables and solved the problem mainly by using the table of value, while the students with the level of chunky and smooth continuous covariation were different from those who considered the flow of time variables. Based on the results of the study, we suggested that various problems related with continuous covariation should be provided and the meanings of the tasks should be analyzed by the teachers.
An experimental investigation was conducted to study the behavior of RC wide beam-column joints with slab subjected to reversed cyclic loads under constant axial load. Six half scale interior wide beam-column assemblies representing a portion of a frame subjected to simulated seismic loading were tested, including three specimens without slab and three specimens with slab. The primary variables were the ratio of column-to-beam flexural capacity ($M_r={\Sigma}M_c/{\Sigma}M_b$ ; 0.77~2.26), ratio of the column-to-beam width (b/H ; 1.54, 1.67). Test results are shown that (1) the current design code and practice for interior joints(type 2) are apply to the wide beam-high strength concrete column. (2) the presence of a slab have an effect on the performance of the wide beam-high strength concrete column interior joints(type 2). therefore in the design of the wide beam-high strength concrete column interior joints(type 2), the width of slab effective as a T beam flange should be considered. It was show that the case of the ratio of column-to-beam flexural capacity is more than 2.0, the effective width of slab are 2 times of an effective depth of wide beam, however if the ratio of column-to-beam flexural capacity is 1.4~2.0, the effective width of slab are not able to be considered.
The guano formed from the bat excrement in a cave contains various sulfate and phosphate minerals formed from the reaction of bat excrement with surrounding rocks and clastic minerals. Therefore, the mineral compositions in the guano provide basic informations on the geochemical environments affecting mineral formation in a cave. This study was conducted to study the mineral compositions of guano and the factors affecting those compositions by comparing mineralogical and chemical compositions in three different limestone caves in Korea. The guano samples in Gossi Cave contain detrital minerals such as illite, quartz and feldspar and relatively large amount of gypsum. The contents of gypsum increase with increasing depth, which is different from the samples collected in other caves. The samples collected from Baekryong Cave have the similar mineral compositions to those in Gossi Cave, but they also contain additional kaolinite and very small amount of gypsum. The samples in Sungryu Cave have similar mineralogical compositions to those in Gossi Cave, but contian bassanite instead of gypsum. The mineralogical compositions are well correlated with the chemical compositions of guano. The mineral compositions indicate that, in Gossi Cave, the minerals were formed by the reaction of large amount of bat excrement with surrounding rocks in high humidity condition or in the condition of frequent floods. In the case of Sungryu Cave, bassanite which can be formed in a dry condition indicates that minerals were formed in a relatively low humidity condition.
In this study MeV Si self ion implantations were done to reveal the intrinsic behavior of defect formation by excluding the possibility of chemical interactions between substrate atoms and dopant ones. Self implantations were conducted using Tandem Accelerator with energy ranges from 1 to 3 MeV. Defect formation by high energy ion implantation has a significant characteristics in that the lattice damage is concentrated near Rp and isolated from the surface. In order to investigate the energy dependence on defect formation, implantation energies were varied from 1 to 3 MeV under a constant dose of $1{\times}10^{15}/cm^2$. RBS channe!ed spectra showed that the depth at which as-implanted damaged layer formed increases as energy increases and that near surface region maintains better crystallinity as energy increases. Cross sectional TEM results agree well with RBS ones. In a TEM image as-implanted damaged layer appears as a dark band, where secondary defects are formed upon annealing. In the case of 2 MeV $Si^+$ self implantation a critical dose for the secondary defect formation was found to be between $3{\times}10^{14}/cm^24$ and $5{\times}10^{14}/cm^2$. Upon annealing the upper layer of the dark band was removed while the bottom part of the dark band did not move. The observed defect behavior by TEM was interpreted by Monte Carlo computer simulations using TRIM-code. SIMS analyses indicated that the secondary defect formed after annealing gettered oxygen impurities existed in silicon.
Journal of the Korean association of regional geographers
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v.19
no.4
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pp.641-653
/
2013
This study analyzed the location of manufacturing industries and works' residence in Yangsan city of which large part of industries were relocated from Busan metropolitan area along the industrial suburbanization process. Through the field survey, in-depth interview, and analysis of statistical data, the study tried to describe the relocation characteristics of manufacturing industries in Yangsan city. The results of the analysis are as follows: 1. The relocation rate of manufacturing industries from Busan to Yangsan was very high in 1980s. As a result of analysis, the first prime factor on relocation was the site problem for industrial land use. But for the newly starting industries, the most important factor was the subcontract networks among industries which differed from relocated ones. 2. The industrial suburbanization process influenced on the industrial structure strongly, as the compositional weight of rubber and plastic industries in Yangsan became greater and the size of the major plants got larger. 3. The manufacturing industries in Yangsan city were widely distributed on the main national industrial districts. Also, they were diffused out to the other places beyond the boundary of industrial districts. 4. The commuting workers' residence in Busan, employed by the plants of Yangsan marked 44.5%. That confirmed the strong influence of Busan labor market.
Park, Kyung-Woo;Ji, Sung-Hoon;Koh, Yong-Kwon;Kim, Geon-Young;Kim, Jin-Kook
Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
/
v.6
no.4
/
pp.283-296
/
2008
The numerical simulations for groundwater flow were carried out to support the input parameters for safety assessment in LILW repository site. As the input parameters for safety assessment, the groundwater flux into the underground facilities during construction, flow rate through the disposal silo after closure of disposal silo and flow pathway from the disposal silo to discharge area were analyzed using the 10 cases groundwater flow simulations. From the total 10 numerical simulation results, the statistics of estimated output were similar to among 10 cases. In some cases, the analyzed input parameters were strongly governed by locally existed high permeable fracture zone at radioactive waste disposed depth. Indeed, numerical simulation for well scenario as a human intrusion scenario was carried out using the hydraulically severe case model. Using the results of well scenario, the input parameters for safety assessment were also obtained through the numerical simulation.
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