• Journal of the Korean Vacuum Society
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• v.5 no.2
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• pp.169-174
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• 1996

The applications of the high density plasma sources to the etching in semiconductor fabrication process are actively studied because of the more strict requirement from the dry etching process due to shrinking down of the critical dimension. But in the oxide etching with the high density plasma sources, abundant fluorine atoms released from the flurocarbon feed gas make it difficult to get the highly selective $SiO_2/Si$ etching. In this study, to improve the $SiO_2/Si$ etch selectivity through the control of the radical loss channels, we propose the wall heating , one of methods of controlling loss mechanisms. With appearance mass spectroscopy(AMS) and actinometric optical emission spectroscopy(OES), the increase of both radicals impinging on the substrate and existing in bulk plasma, and the decrease of the fluorine atom with wall temperature are observed. As a result, a 40% improvement of the selectivity was achieved for the carbon rich feed gas.

• Carbon letters
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• v.4 no.2
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• pp.69-73
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• 2003

In this work, the effect of a direct oxyfluorination on surface and mechanical interfacial properties of PAN-based carbon fibers is investigated. The changes of surface functional groups and chemical composition of the oxyfluorinated carbon fibers are determined by FT-IR and XPS measurements, respectively. ILSS of the composites is also studied in terms of oxyfluorination conditions. As a result, FT-IR exhibits that the carboxyl/ester groups (C=O) at 1632 $cm^{-1} and hydroxyl group (O-H) at 3450 $cm^{-1} are observed in the oxyfluorinated carbon fibers. Especially, the oxyfluorinated carbon fibers have a higher O-H peak intensity than that of the fluorinated ones. XPS result also shows that the surface functional groups, including C-O, C=O, HO-C=O, and C-$F_x$ after oxyfluorination are formed on the carbon fiber surfaces, which are more efficient and reactive to undergo an interfacial reaction to matrix materials. Moreover, the formation of C-$F_x$ physical bonding of the carbon fibers with fluorine increases the surface polarity of the fibers, resulting in increasing ILSS of the composites. This is probably due to the improvement of interfacial adhesion between fibers and matrix resins.

• Korean Journal of Materials Research
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• v.30 no.11
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• pp.595-600
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• 2020

The photovoltaic properties of perovskite solar cells (PSCs) with a carbon electrode fabricated using different annealing processes are investigated. Perovskite formation (50 ℃, 60 min) using a hot-plate and an oven is carried out on cells with a glass/fluorine doped TiO₂/TiO₂/ZrO₂/carbon structure, and the photovoltaic properties of the PSCs are analyzed using a solar simulator. The microstructures of the PSCs are characterized using an optical microscope, a field emission scanning electron microscope, and an electron probe micro-analyzer (EPMA). Photovoltaic analysis shows that the energy conversion efficiency of the samples fabricated using the hot-plate and the oven processes are 2.08% and 6.90%, respectively. Based on the microstructure of the samples and the results of the EPMA, perovskite is formed locally on the carbon electrode surface as the γ-butyrolactone (GBL) solvent evaporates and moves to the top of the carbon electrode due to heat from the bottom of the sample during the hot plate process. When the oven process is used, perovskite forms evenly inside the carbon electrode, as the GBL solvent evaporates extremely slowly because heat is supplied from all directions. The importance of the even formation of perovskite inside the carbon electrode is emphasized, and the feasibility of oven annealing is confirmed for PSCs with carbon electrodes.

• Journal of Electrochemical Science and Technology
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• v.8 no.4
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• pp.338-343
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• 2017

Activated carbon has lower electrical conductivity and reliability than other carbonaceous materials because of the oxygen functional groups that form during the activation process. This problem can be overcome by doping the material with heteroatoms to reduce the number of oxygen functional groups. In the present study, N, F co-doped activated carbon (AC-NF) was successfully prepared by a microwave-assisted hydrothermal method, utilizing commercial activated carbon (AC-R) as the precursor and ammonium tetrafluoroborate as the single source for the co-doping of N and F. AC-NF showed improved electrical conductivity ($3.8\;S\;cm^{-1}$) with N and F contents of 0.6 and 0.1 at%, respectively. The introduction of N and F improved the performance of the pertinent supercapacitor: AC-NF exhibited an improved rate capability at current densities of $0.5-50mA\;cm^{-2}$. The rate capability was higher compared to that of raw activated carbon because N and F codoping increased the electrical conductivity of AC-NF. The developed method for the co-doping of N and F using a single source is cost-effective and yields AC-NF with excellent electrochemical properties; thus, it has promising applications in the commercialization of energy storage devices.

• Journal of the Korean Ceramic Society
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• v.49 no.4
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• pp.328-332
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• 2012

Etch rates of Si and high purity SiC have been compared for various fluorocarbon plasmas. The relative plasma resistance of SiC, which is defined as the etch rate ratio of Si to SiC, varied between 1.4 and 4.1, showing generally higher plasma resistance of SiC. High resolution X-ray photoelectron analysis revealed that etched SiC has a surface carbon content higher than that of etched Si, resulting in a thicker fluorocarbon polymer layer on the SiC surface. The plasma resistance of SiC was correlated with this thick fluorocarbon polymer layer, which reduced the reaction probability of fluorine-containing species in the plasma with silicon from the SiC substrate. The remnant carbon after the removal of Si as volatile etch products augments the surface carbon, and seems to be the origin of the higher plasma resistance of SiC.

• Bulletin of the Korean Chemical Society
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• v.27 no.3
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• pp.345-354
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• 2006

Ionic liquids are alternative reaction media of increasing interest and are regarded as an eco-friendly alternatives, of potential use in place of the volatile organic solvents typically used in current chemical processing methods. They are emerging as the smart and excellent solvents, which are made of positive and negative ions that they are liquids near room temperature. The nucleophilic substitution reaction is one of the important method for inserting functional groups into a carbon skeleton. Many nucleophilic substitution reactions have been found with enhanced reactivity and selectivity in ionic liquid. In this review, some recent interesting results of nucleophilic substitution reactions such as hydroxylations, ether cleavages, carbon-X (X= carbon, oxygen, nitrogen, fluorine) bond forming reactions, and ring opening of epoxides in ionic liquids are discussed.

• Journal of the Korean Vacuum Society
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• v.21 no.1
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• pp.48-54
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• 2012

Carbon coils could be synthesized on nickel catalyst layer-deposited silicon oxide substrate using $C_2H_2$ and $H_2$ as source gases and SF6 as an additive gas under thermal chemical vapor deposition system. The geometries of as-grown carbon materials were investigated with increasing the reaction temperature as the increment of $25^{\circ}C$ from $650^{\circ}C$ up to $800^{\circ}C$. At $650^{\circ}C$, the embryos for carbon coils were formed. With increasing the reaction temperature to $700^{\circ}C$, the coil-type geometries were developed. Further increasing the reaction temperature to $775^{\circ}C$, the development of wave-like nano-sized coils, instead of nano-sized coils, and occasional appearance of micro-sized carbon coils could be observed. Fluorine in $SF_6$ additive may shrink the micro-sized coil diameter via the reduction of Ni catalyst size by fluorine's etching role. Finally, the preparation of the micro-sized carbon coils having the smaller coil diameters, compared with the previously reported ones, could be possible using $SF_6$ additive.

• Carbon letters
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• v.10 no.4
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• pp.314-319
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• 2009

The surface treatment effects of reinforcement filler were investigated based on the dynamic mechanical properties of mutiwalled carbon nanotubes (MWCNTs)/epoxy composites. The as-received MWCNTs(R-MWCNTs) were chemically modified by direct oxyfluorination method to improve the dispersibility and adhesiveness with epoxy resins in composite system. In order to investigate the induced functional groups on MWCNTs during oxyfluorination, X-ray photoelectron spectroscopy was used. The thermo-mechanical property of MWCNTs/epoxy composite was also measured based on effects of oxyfluorination treatment of MWCNTs. The storage modulus of MWCNTs/epoxy composite was enhanced about 1.27 times through oxyfluorination of MWCNTs fillers at $25^{\circ}C$. The storage modulus of oxyfluorinated MWCNTs (OF73-MWCNTs) reinforced epoxy composite was much higher than that of R-MWCNTs/epoxy composite. It revealed that oxygen content led to the efficient carbon-fluorine covalent bonding during oxyfluorination. These functional groups on surface modified MWCNTs induced by oxyfluorination strikingly made an important role for the reinforced epoxy composite.

• Korean Journal of Pharmacognosy
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• v.7 no.3
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• pp.159-169
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• 1976

The present review records the known structures of more than 80 organic compounds containing halogens, which may be considered naturally occurring. The format of the review is based on the viewpoint of biochemists. Compounds containing one type of halogen atom have been placed in one of four major division, i.e., structures possessing fluorine, chlorine, bromine or iodine covalently bonded to carbon. Within each major division molecular structures are given along with the species from which the compounds have been isolated, The biological significance, if any, is also mentioned.

• Journal of Radiopharmaceuticals and Molecular Probes
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• v.4 no.2
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• pp.121-123
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• 2018

Fluoride is one of most important atoms for both clinical and pharmaceutical usage. Associated with such a strong need, $^{18}F$-fluoride has been widely used as an essential radioisotope. The fluoride always suffers from strong solvation effects through strong hydrogen bonding, which reduce the reactivity of fluoride anion. To enhance the reactivity, the concept of naked fluoride was introduced in the fluorination field. In this essay, I will briefly describe the history of naked fluoride concept and development of naked fluoride sources.