• 한국결정성장학회지
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• 제17권1호
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• pp.18-22
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• 2007

Carbon nanofilaments were deposited on silicon oxide substrate by thermal chemical vapor deposition method. We used $Fe(CO)_5$ as the catalyst for the carbon nanofilaments formation. Around $800^{\circ}C$ substrate temperature, the formation density of carbon nanofilaments could be enhanced by the vacuum sublimation technique of $Fe(CO)_5$, compared with the conventional spin coating technique. Finally, we could achieve the low temperature, as low as $350^{\circ}C$, formation of carbon nanofilaments using the sublimated Fe-complex nanograins with thermal chemical vapor deposition. Detailed morphologies and characteristics of the carbon nanofilaments were investigated. Based on these results, the role of the vacuum sublimation technique for the low temperature deposition of carbon nanofilaments was discussed.

• 한국결정성장학회지
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• 제16권1호
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• pp.20-24
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• 2006

Iridium-catalyzed carbon nanofilaments were formed on MgO substrate as a function of the gap between the substrate and the plasma using microwave plasma-enhanced chemical vapor deposition method. Under the remote plasma condition, carbon nanofibers were formed on the substrate. Under the adjacent plasma condition, on the other hand, carbon nanotubes-like materials instead of carbon nanofibers could be formed. When the substrate immersed into the plasma, any carbon nanofilaments formation couldn't be observed. During the reaction, the substrate temperatures were measured as a function of the gap. Based on these results, the cause for the different carbon nanofilaments formation according to the gap was discussed.

• 한국세라믹학회지
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• 제40권12호
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• pp.1150-1153
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• 2003

Carbon nanofilaments were formed on silicon substrate using microwave plasma-enhanced chemical vapor deposition method. The structures of carbon nanofilaments were identified as carbon nanotubes or carbon nanofibers. The formation of bamboo-like carbon nanotubes was initiated by the application of the bias voltage during the plasma reaction. The growth kinetics of bamboo-like carbon nanotubes increased with increasing the bias voltage. The growth direction of bamboo-like carbon nanotubes was vertical to the substrate.

• 한국결정성장학회지
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• 제14권1호
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• pp.1-5
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• 2004

Carbon nanofilaments were formed on silicon substrate via microwave plasma-enhanced chemical vapor deposition method. The structure of carbon nanofilaments was identified as the carbon nanofibers. The extent of carbon nanofibers growth and the diameters of carbon nanofibers increased with increasing the total pressure. The growth direction of carbon nanofibers was horizontal to the substrate. Laterally grown carbon nanofibers showed the semiconductor electrical characteristics.

• 한국결정성장학회지
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• 제21권3호
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• pp.119-123
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• 2011

Carbon nanotilaments (CNFs) could be synthesized on nickel catalyst layer-deposited silicon oxide substrate using $C_2H_2$ and$H_2$ as source gases under thermal chemical vapor deposition system. By the incorporation of $SF_6$ as a cyclic modulation manner, the geometries of carbon coils-related materials, such as nano-sized coil and wave-like nano-sized coil could be observed on the substrate. The characteristics (formation density and morphology) of as-grown CNFs with or without $SF_6$ incorporation were investigated. Diameter size reduction for the individual CNFs-related shape and the enhancement of the formation density of CNFs-related material could be achieved by the incorporation of $SF_6$ as a cyclic modulation manner. The cause for these results was discussed in association with the slightly increased etching ability by $SF_6$ addition and the sulfur role in SF 6 for the geometry change.

• 한국진공학회지
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• 제18권6호
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• pp.481-487
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• 2009

탄소나노필라멘트의 직경크기를 조절하기 위하여 증착 반응초기에 $SF_6$를 증착원료기체($C_2H_2$, $H_2$)에 주입하였다. 증착 원료 기체와 $SF_6$를 열화학기상증착시스템에서 시간에 따라 싸이클릭 유량 변조시켰다. 싸이클릭 유량 변조 프로세스와 기판의 온도에 따라 기판위에 증착된 탄소나노필라멘트들의 특성을 조사하였다. 싸이클릭 에칭기간에 $SF_6$를 투입하자 탄소나노필라멘트의 직경크기는 급격히 감소하였다. 이러한 탄소나노필라멘트 직경의 크기 감소 원인은 $SF_6$ 기체의 주입에 따른 에칭능력 향상에 기인하는 것으로 이해되었다.

• 한국표면공학회지
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• 제46권4호
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• pp.175-180
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• 2013

Carbon nanofilaments (CNFs) could be synthesized using $C_2H_2/H_2$ as source gases and $SF_6$ as an incorporated additive gas under thermal chemical vapor deposition system. Ni powders were used as the catalyst for the formation of the CNFs. During the initial deposition stage, the initiation of the CNFs on the Ni catalyst was investigated. The geometries of the as-grown CNFs on Ni catalyst were strongly dependent on the size and/or the shape of Ni catalyst. Small size catalyst (<150 nm in diameter) gives rise to the unidirectional growth of the CNFs. On the other hand, large size catalyst (150~500 nm), the bidirectional growth of the CNFs could be observed. Particularly, the well faceted parallelogram-shaped Ni catalyst could give rise to the bidirectional growth of the CNFs having the symmetrically opposite direction. Eventually, these bidirectional growths of CNFs were understood to form the well-developed carbon microcoils (CMCs). Based on these results, the optimal shape and the size of the Ni catalyst to form the CMCs were discussed.