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http://dx.doi.org/10.6111/JKCGCT.2011.21.3.119

The geometry change of carbon nanofilaments by SF6 incorporation in a thermal chemical vapor deposition system  

Kim, Sung-Hoon (Department of Engineering in Energy & Applied Chemistry, Silla University)
Publication Information
Journal of the Korean Crystal Growth and Crystal Technology / v.21, no.3, 2011 , pp. 119-123 More about this Journal
Abstract
Carbon nanotilaments (CNFs) could be synthesized on nickel catalyst layer-deposited silicon oxide substrate using $C_2H_2$ and$H_2$ as source gases under thermal chemical vapor deposition system. By the incorporation of $SF_6$ as a cyclic modulation manner, the geometries of carbon coils-related materials, such as nano-sized coil and wave-like nano-sized coil could be observed on the substrate. The characteristics (formation density and morphology) of as-grown CNFs with or without $SF_6$ incorporation were investigated. Diameter size reduction for the individual CNFs-related shape and the enhancement of the formation density of CNFs-related material could be achieved by the incorporation of $SF_6$ as a cyclic modulation manner. The cause for these results was discussed in association with the slightly increased etching ability by $SF_6$ addition and the sulfur role in SF 6 for the geometry change.
Keywords
Carbon nanofilaments; Carbon coil; $SF_6$; Geometry; Cyclic modulation process; Thermal chemical vapor deposition;
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