• 제목/요약/키워드: Carbon films

검색결과 952건 처리시간 0.034초

Characterization of Diamond-like Carbon Films Prepared by Magnetron Plasma Chemical Vapor Deposition

  • Soung Young Kim;Jai Sung Lee;Jin Seok Park
    • The Korean Journal of Ceramics
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    • 제4권1호
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    • pp.20-24
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    • 1998
  • Thin films of diamond-like carbon(DLC) can be successfully deposited by using a magnetron plasma chemical vapor deposition (CVD) method with an rf(13.56 MHz) plasma of $C_dH_8$. Plasma characteristics are analyzed as a function of the magnetic field. As the magnetic field increases, both electron temperature ($T_e$) and density ($n_e$)increase, but the negative dc self-bias voltage (-$V_{ab}$) decreases, irrespective of gas pressures in the range of 1~7 mTorr. High deposition rates have been obtained even at low gas pressures, which may be attributed to the increased mean free path of electrons in the magentron plasma. Effects of rf power and additive gas on the structural properties of DLC films aer also examined by using various technique namely, TED(transmissio electron diffraction) microanalysis, FTIR, and Raman spectroscopies.

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$TiO_2$ 도입에 따른 ZnO 졸에서의 단일벽 탄소나노튜브의 분산안정성 및 그 투명전도성 필름의 고온 안정성 (Titania-assisted dispersion of carboxylated single-walled carbon nanotubes in ZnO sol for transparent conducting films with high thermal stability)

  • 김보경;한중탁;정희진;정승열;이건웅
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.277-277
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    • 2010
  • We present facile chemical route stabilizing dispersion of carboxylated single-Walled carbon nanotubes (SWCNTs) in ZnOsol prepared by using diethanolamine as a stabilizer. The dispersion was stabilized via capping of carboxyl groups on the SWCNT surface by a titania layer. We also demonstrated that the conductivity of the films prepared P3/$TiO_2$/ZnO as enhanced by therml treatment, and the thermal stbility of the film improved hybridization with ZnO sol pristine P3, P3/$SiO_2$ and P3/$TiO_2$ hybrid films.

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$TiO_2$ 도입에 따른 ZnO 졸에서의 단일벽 탄소나노튜브의 분산안정성 및 그 투명전도성 필름의 고온 안정성 (Titania-assisted dispersion of carboxylated single-walled carbon nanotubes in ZnO sol for transprent conducting films with high thermal stability)

  • 김보경;한중탁;;정희진;정승열;이건웅
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 춘계학술대회 논문집
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    • pp.41-41
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    • 2010
  • We present facile chemical route stabilizing dispersion of carboxylated single-walled carbon nanotubes (SWCNTs) in ZnOsol prepared by using diethanolamine as a stabilizer. The dispersion was stabilized via capping of carboxyl groups on the SWCNT surface by a titania layer. We also demonstrated that the conductivity of the films prepared P3/$TiO_2$/ZnO as enhanced by therml treatment, and thethermal stbility of the film improved hybridization with ZnO sol pristine P3, P3/$SiO_2$ and P3/$TiO_2$ hybrid films.

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레이저 증착법에 의한 비정질 탄소계 박막의 제작 (Fabrication of amorphous carbon thin film using laser ablation technique)

  • 류정탁;김연보;조경제
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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    • pp.484-487
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    • 2001
  • Amorphous carbon thin films were deposited using laser ablation technique on Si(100) substrates at different temperatures. In this study, effects of the substrate temperature on the properties of amorphous carbor, films were systematically investigated. The surface morphologic and structural properties of the films were studied by scanning electron microscopy (SEM) and raman spectroscope, respectively. With increasing of the substrate temperature, the surface morphologies were changed significantly. Moreover the intensity ratio of D-band and G-band and the full width at half maximum of these bands were dependent on substrate temperatures.

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Catalytic CO Oxidation Over Ni Films Supported by Carbon Fiber

  • Seo, Hyun-Ook;Nam, Jong-Won;Kim, Kwang-Dae;Kim, Young-Dok;Lim, Dong-Chan
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.266-266
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    • 2012
  • Ni films with a thickness of 700-800 nm were deposited on carbon fiber layers using electroless deposition, and surface structures and chemical properties of these films with various annealing temperatures (300, 600 and $900^{\circ}C$) were studied. $600^{\circ}C$-annealing under atmospheric conditions resulted in formation of porous surface structures with a mean pore size of ~100 nm, whereas the other samples showed non-porous surface structures. $600^{\circ}C$-annealed Ni film showed much higher reactivities for toluene adsorption and CO oxidation comparing to other non-porous surfaces.

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Diamond-like Carbon (DLC) 박막의 구조적, 전기적 물성분석 (Characterization of structural and electrical properties of diamond-like carbon thin films)

  • 이재엽;이진복;손민규;김성영;김응상;박진석
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1997년도 하계학술대회 논문집 C
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    • pp.1383-1386
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    • 1997
  • Dimond-like carbon(DLC) films have been deposited by using both rf plasma-enhanced chemical vapor deposition (PECVD) and filtered cathodic vacuum arc (FCVA) deposition systems. Effects of deposition conditions, such as dc self-bias, $CH_4$ gas pressure, substrate bias, and $N_2$ partial pressure, on the structural and electrical properties of DLC films are examined. The experimental results obtained have also been discussed by considering a theoretical model for film growth.

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Microstructure and Physical Properties of Sputtered Metal Containing Nanocrystalline Structured Carbon Coatings

  • Kim, Sung-I.;Han, Jeon-G.
    • 한국표면공학회지
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    • 제40권2호
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    • pp.59-62
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    • 2007
  • Metal containing hydrogen free nanocrystalline structured carbon (Me:nc-C) films were synthesized by closed-field unbalanced magnetron sputtering system (CFUBM). The aim of this study was to determine the relationship between the microstructure and physical properties of Me:nc-C films as a function of the concentration of materials. The film structures were examined by x-ray photoelectron spectroscopy and high resolution transmission electron microscopy. The physical properties of the Me:nc-C films were evaluated by using a 4-point probe. The fraction of graphite clusters was found to be increased by containing titanium and the electrical resistivity decreased with increasing amount of containing.

Preparation of gold nanoparticle/single-walled carbon nanotube nanohybrids using biologically programmed peptide for application of flexible transparent conducting films

  • Yang, MinHo;Choi, Bong Gill
    • Carbon letters
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    • 제20권
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    • pp.26-31
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    • 2016
  • In this study, we report a general method for preparation of a one-dimensional (1D) arrangement of Au nanoparticles on single-walled carbon nanotubes (SWNTs) using biologically programmed peptides as structure-guiding 1D templates. The peptides were designed by the combination of glutamic acid (E), glycine (G), and phenylalanine (F) amino acids; peptides efficiently debundled and exfoliated the SWNTs for stability of the dispersion and guided the growth of the array of Au nanoparticles in a controllable manner. Moreover, we demonstrated the superior ability of 1D nanohybrids as flexible, transparent, and conducting materials. The highly stable dispersion of 1D nanohybrids in aqueous solution enabled the fabrication of flexible, transparent, and conductive nanohybrid films using vacuum filtration, resulting in good optical and electrical properties.

Atomic structure of amorphous carbon deposited by various incidence angles -MD simulation study

  • 조민웅;이광렬
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.52-52
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    • 2010
  • Amorphous carbon films have a variety of potential applications. In most such applications film properties are crucial and highly dependent on the film growth conditions. We here investigate the atomic structure of the films, which is generated at various incidence angles, using the classical molecular dynamics. Varying incidence angle of the deposited carbon atoms, different level of sp hybridization and porosity of the film are captured in our model. As the incidence angle becomes glancing, subplantation of the deposited carbon in vertical direction is significantly reduced, rather bouncing back of the incident carbon with slight modification of surface structure is mainly occurred at the early stage of the film growth. As the surface becomes rougher, shadowing effect at these glancing incidences also becomes more significant, which tends to cause asymmetrical and columnar structure. We describe incidence angle dependence of the evolution of the atomic structure of the film and its corresponding properties.

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Friction and Wear of Nitrogen Incorporated Diamond-like Carbon Films Under a Vacuum

  • Yoon, Eui-Sung;Kong, Hosung;Lee, Kwang-Ryeol;Oh, Jae-Eung
    • Tribology and Lubricants
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    • 제11권5호
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    • pp.59-65
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    • 1995
  • Tribological behaviors of nitrogen incorporated amorphous diamond-like carbon films were experimentally measured under a vacuum ($3 \times 10^{-5}$ Torr) using a ball (AISI 52100 steel)-on-disk wear-rig. Nitrogen incorporated DLC films were deposited by r.f. plasma assisted chemical vapor deposition method. Mixtures of benzene and ammonia or nitrogen gases were used as the reaction gases for the r.f. PACVD, and Si (100) wafer was used as the substrate. In the tribo-test, effects of DLC film thickness and normal load in friction were measured and discussed. Results showed that friction of nitrogen incorporated DLC films from a mixture gas of benzene and ammonia was lower than that of 100% benzene, specially in the measurement of minimum coefficient of friction. Differences in frictional characteristics of nitrogen incorporated DLC films were explained with the changes in chemical structures of the films. Result also showed that friction of DLC films increased with the sliding contact cycle, which remarkably accompanied with roll-shaped wear debris. Mechanisms and roles of the polymer-like wear debris were presented and discussed.