Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1997.07d
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- Pages.1383-1386
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- 1997
Characterization of structural and electrical properties of diamond-like carbon thin films
Diamond-like Carbon (DLC) 박막의 구조적, 전기적 물성분석
- Lee, Jae-Yup (Dept. of Electrical Engineering, Hanyang University) ;
- Lee, Jin-Bok (Dept. of Electrical Engineering, Hanyang University) ;
- Son, Min-Kyu (Korea Academy of Industrial Technology) ;
- Kim, Soung-Young (Korea Academy of Industrial Technology) ;
- Kim, Yong-Sang (Dept. of Electrical Engineering, Myoung-Ji University) ;
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Park, Jin-Seok
(Dept. of Electrical Engineering, Hanyang University)
- 이재엽 (한양대학교 전기공학과) ;
- 이진복 (한양대학교 전기공학과) ;
- 손민규 (생산기술연구원) ;
- 김성영 (생산기술연구원) ;
- 김응상 (명지대학교 전기공학과) ;
-
박진석
(한양대학교 전기공학과)
- Published : 1997.07.21
Abstract
Dimond-like carbon(DLC) films have been deposited by using both rf plasma-enhanced chemical vapor deposition (PECVD) and filtered cathodic vacuum arc (FCVA) deposition systems. Effects of deposition conditions, such as dc self-bias,
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