• 제목/요약/키워드: Carbon film

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A Kinetic Study on the Growth of Nanocrystalline Diamond Particles to Thin Film on Silicon Substrate

  • Jung, Doo-Young;Kang, Chan-Hyoung
    • 한국표면공학회지
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    • 제44권4호
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    • pp.131-136
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    • 2011
  • A kinetic study has been made for the growth of nanocrystalline diamond (NCD) particles to a continuous thin film on silicon substrate in a microwave plasma chemical vapor deposition reactor. Parameters of deposition have been microwave power of 1.2 kW, the chamber pressure of 110 Torr, and the Ar/$CH_4$ ratio of 200/2 sccm. The deposition has been carried out at temperatures in the range of $400\sim700^{\circ}C$ for the times of 0.5~16 h. It has been revealed that a continuous diamond film evolves from the growth and coalescence of diamond crystallites (or particles), which have been heterogeneously nucleated at the previously scratched sites. The diamond particles grow following an $h^2$ = k't relationship, where h is the height of particles, k' is the particle growth rate constant, and t is the deposition time. The k' values at the different deposition temperatures satisfy an Arrhenius equation with the apparent activation energy of 4.37 kcal/mol or 0.19 eV/ atom. The rate limiting step should be the diffusion of carbon species over the Si substrate surface. The growth of diamond film thickness (H) shows an H = kt relationship with deposition time, t. The film growth rate constant, k, values at the different deposition temperatures show another Arrhenius-type expression with the apparent activation energy of 3.89 kcal/mol or 0.17 eV/atom. In this case, the rate limiting step might be the incorporation reaction of carbon species from the plasma on the film surface.

이온 빔 조사된 SiNx 박막의 액정 배향 효과에 관한 연구 (Investigation on Liquid Crystal Alignment Effects of SiNx Thin Film Irradiated by Ion Beam)

  • 이상극;김영환;김병용;한진우;강동훈;김종환;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.398-398
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    • 2007
  • Most recently, the Liquid Crystal (LC) aligning capabilities achieved by ion beam exposure on the diamond-like carbon (DLC) thin film layer have been successfully studied. The DLC thin films have a high mechanical hardness, a high electrical resistance, optical transparency and chemical inertness. Nitrogen doped Diamond Like Carbon (NDLC) thin films exhibit properties similar to those of the DLC films and better thermal stability than the DLC films because C:N bonding in the NDLC film is stronger against thermal stress than C:H bonding in the DLC thin films. Moreover, our research group has already studied ion beam alignment method using the NDLC thin films. The nematic liquid crystal (NLC) alignment effects treated on the SiNx thin film layers using ion beam irradiation for three kinds of N rations was successfully studied for the first time. The SiNx thin film was deposited by plasma-enhanced chemical vapor deposition (PECVD) and used three kinds of N rations. In order to characterize the films, the atomic force microscopy (AFM) image was observed. The good LC aligning capabilities treated on the SiNx thin film with ion beam exposure for all N rations can be achieved. The low pretilt angles for a NLC treated on the SiNx thin film with ion beam irradiation were measure.

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Different Oxygen Transmission Rate Packing Films During Modified Atmosphere Storage: Effects on Asparagus Spear Quality

  • Yoon, Hyuk Sung;Choi, In-Lee;Kang, Ho-Min
    • 원예과학기술지
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    • 제35권3호
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    • pp.314-322
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    • 2017
  • The aim of this study was to determine suitable oxygen transmission rate (OTR) films for modified atmosphere (MA) storage of asparagus spears (Asparagus officinalis L.), and to examine the related changes in asparagus spear quality. Asparagus spears were packed with 10,000, 20,000, 40,000, 70,000, and $100,000cc/m^2{\cdot}day{\cdot}atm$ OTR film treatments for MA storage, and perforated film (conventional storage) was used as the control. The fresh weight loss rate was less than 1% in all OTR film treatments but not in the control. In all OTR film treatments, ethylene content rapidly increased on the first day of storage, and gradually decreased thereafter to $2.0{\mu}L{\cdot}L^{-1}$ by the final storage day. In the 10,000 cc and 20,000 cc OTR film treatments, carbon dioxide content was maintained within the permissible range for asparagus spears under recommended controlled atmosphere (CA) and MA conditions (5-12%). The oxygen content was maintained between 12% and 20% in all OTR film treatments. Hue angles and total chlorophyll content were highest in the 10,000 cc OTR film treatment in both tips and stems. Visual quality was maintained at a saleable level only in the 10,000 cc OTR film treatment until the final storage day (25 days). Based on sensory evaluation, the least off-odor was detected in the 10,000 cc OTR film treatment, and the most in the control treatment. While the soluble solids content decreased with all film treatments, it was maintained at the highest level in the 10,000 cc OTR film treatment. Vitamin C content decreased with all film treatments during storage, but was maintained at higher levels in the 10,000, 20,000, and 40,000 cc OTR film treatments. The firmness of tips and stems increased with storage duration in all film treatments, stems were firmer under the perforated film, 10,000, and 20,000 cc OTR film treatments. Given these results, the 10,000 cc OTR film treatment is considered the most appropriate for MA asparagus spear storage since visual quality and soluble solids content were maintained, and fresh weight loss, vitamin C content, off-odor, and yellowing were suppressed during storage.

Properties of Carbon for Application of New Light Source Technology

  • Lee Sang-Heon
    • 한국전기전자재료학회논문지
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    • 제19권5호
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    • pp.477-479
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    • 2006
  • Carbon films was grown on Si substrates using the method of electrolysis for methanol liquid. Deposition parameters for the growth of the carbon films were current density for the electrolysis, methanol liquid temperature and electrode spacing between anode and cathode. We examined electrical resistance and the surface morphology of carbon films formed under various conditions specified by deposition parameters. It was clarified that the high electrical resistance carbon films with smooth surface morphology are grown when a distance between the electrodes was relatively wider. We found that the electrical resistance in the films was independent of both current density and methanol liquid temperature for electrolysis. The temperature dependence of the electrical resistance in the low resistance carbon films was different from one obtained in graphite.

고분자 전해질 연료전지 금속 분리판 적용을 위한 탄소 박막의 증착과 내식성 평가 (Corrosion Properties of Carbon-Coated Metallic Bipolar Plate for PEMFC)

  • 장동수;이정중
    • 한국표면공학회지
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    • 제48권3호
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    • pp.87-92
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    • 2015
  • Carbon thin films were deposited on STS 316L sheets by inductively coupled plasma enhanced magnetron sputtering with or without substrate bias voltage. Typical Raman spectrum for amorphous diamond-like carbon (DLC) was obtained, and the interfacial contact resistance (ICR) was measured to show its conductive nature. The electrochemical impedance spectroscopy (EIS) was used to investigate the corrosion mechanism of the carbon coating under the polymer electrolyte membrane fuel cell (PEMFC) condition. According to the pore-corrosion mechanism, the electrolyte penetrates the carbon coating through the pores and reacts with the substrate. As the substrate corrosion proceeds, the pore enlargement occurs and the surface area of the substrate exposed to the electrolyte. Applicability of the carbon coating for the PEMFC bipolar plate was evaluated by potentiodynamic polarization experiments. Finally, an adhesion problem was briefly considered.

면상발열체용 Carbon Black/PVDF 복합전극의 물리 및 전기적 특성 (Physical and Electrical Properties of Carbon Black/PVDF Composite Electrode as Ohmic Joule Heater)

  • 도칠훈;진봉수;문성인;정영동;정동용;방영달
    • 공업화학
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    • 제20권6호
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    • pp.692-695
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    • 2009
  • 바닥의 전기난방 장치로 사용할 수 있는 오믹 줄 방전 현상을 이용하는 면상발열체 전극기술을 개발하였다. Super pure black의 탄소재료와 polyvinylidene fluoride의 고분자 재료를 이용하여 제조한 복합 전극 합제를 PET에 박막 도포하여 전극을 제조하였다. 전극에 대한 조성 첨가제로서 multi-walled carbon nanotube와 연옥 분말을 사용하였다. 개발한 면상발열체 전극의 비저항과 전극의 접착강도 및 전극의 강도에 대하여 연구하였다. 연옥 분말의 첨가는 비저항과 강도에 미치는 영향이 적었으며, carbon nanotube의 첨가는 전극의 비전도도와 경도를 향상하였다. 다양한 조성의 오믹 줄 방전 전극의 특성을 연구하였다.

Carbon-Nanotube FED;Japanese National Project

  • Soichiro, Okuda
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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    • pp.855-859
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    • 2004
  • The Japanese National Project "Carbon Nanotube FED" is developing a high image-quality and low power-consumption field emission display (FED) by applying carbon nanotube (CNT) to the electron source. A uniform electron source with a flat-film CNTs and fine structure triodes Fir suppressing the deviation of emission is required. For realizing an FED panel, it is also necessary to develop the glass-bulb technologies for vacuum sealing, and display technologies for driving the panel by circuit electronic and for evaluating the picture quality by measuring. By achieving these technologies, an FED compatible with conventional Cathode Ray Tubes (CRTs) will be realized.

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전기분해 DLC 합성 (Fabrication of DLC Using Electrodeposition)

  • 이상헌;최용
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2007년도 제38회 하계학술대회
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    • pp.1265-1266
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    • 2007
  • Electro-deposition of carbon film on silicon substrate in methanol solution was carried out with various current density, solution temperature and electrode spacing between anode and cathode. The carbon films with smooth surface morphology and high electrical resistance were formed when the distance between electrode was relatively wider. The electrical resistance of the carbon films were independent of both current density and solution temperature.

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표면 개질된 탄소나노튜브를 사용한 에폭시 복합재료의 마모특성에 관한 연구 (An investigation of tribology properties carbon nanotubes reinforced epoxy composites)

  • 아부바카 빈 술렁;곽정춘;박주혁
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.663-667
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    • 2005
  • Surface modified carbon nanotubes were applied into the epoxy composites to investigate its tribological property. Carbon nanotubes reinforced epoxy composites were fabricated by casting. Effects to the tribological property of loading concentrations and types of surface modification of carbon nanotubes were investigated under sliding condition using linear reciprocal sliding wear tester. The results show that the small amount of carbon nanotubes into the epoxy exhibited lower weight loss than the pure epoxy. It is concluded that the effect of an enormous aspect ratio of carbon nanotubes surface area which wider than conventional fillers that react as interface for stress transfer. As increased the contents of carbon nanotubes, the weight loss from the wear test was reduced. And the surface modified carbon nanotubes show better tribological property than as produced carbon nanotubes. It is due that a surface modification of carbon nanotubes increases the interfacial bonding between carbon nanotubes and epoxy matrix through chemical bonding. Changes in worn surface morphology are also observed by optical microscope and SEM for investigating wear behaviors. Carbon nanotubes in the epoxy matrix near the surface are exposed, because it becomes the lubricating working film on the worn surface. It reduces the friction and results in the lower surface roughness morphology in the epoxy matrix as increasing the contents of the carbon nanotubes.

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Synthesis of Zirconium Oxide Nanoballs Using Colloid-Imprinted Carbon and Their Electrical Properties

  • Kim, Chy Hyung
    • Transactions on Electrical and Electronic Materials
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    • 제16권2호
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    • pp.86-89
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    • 2015
  • Uniform ZrO2 nanoballs were synthesized at 700℃ using the inverse replication method through a colloid-imprinted carbon (CIC) template. The structural, dielectric, and conducting properties of the ZrO2 nanoballs were investigated and compared with those of ZrO2 film prepared by sol-gel method and powdered ZrO2 chemical. Both the monoclinic and cubic phases were found in the ZrO2 balls and film but the ZrO2 chemical showed a monoclinic phase, where the cubic structure is known to be formed at above 2,300℃. ZrO2 nanoballs showed the lower dielectric property of k = 21.2 at 1 MHz because the 8-coordinated cubic phase in the ZrO2 nanoball produced lower polarization than the polarization of the 7-coordinated monoclinic ZrO2 chemical (k = 23.6). The dielectric stability was maintained in each ZrO2 ball, film, and chemical under the applied forward and reverse voltage range (−5 to +5 V) at 1 MHz. The ionic conductivities were 7.86 × 10−8/Ω·cm for ZrO2 nanoballs, 3.29 × 10−8/Ω·cm for ZrO2 chemical, and 6.70 × 10−5/Ω·cm for the thickness of 1,053 nm ZrO2 film at room temperature with the electronic contribution being less than 0.006%.