Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Fabrication of DLC Using Electrodeposition

전기분해 DLC 합성

  • Lee, Sang-Heon (Department of Electronic Engineering, Sun Moon University) ;
  • Choi, Yong (Department of Electromaterials Enginering, Sun Moon University)
  • 이상헌 (선문대학교 전자공학부) ;
  • 최용 (선문대학교 전자재료공학과)
  • Published : 2007.07.18
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Abstract

Electro-deposition of carbon film on silicon substrate in methanol solution was carried out with various current density, solution temperature and electrode spacing between anode and cathode. The carbon films with smooth surface morphology and high electrical resistance were formed when the distance between electrode was relatively wider. The electrical resistance of the carbon films were independent of both current density and solution temperature.

Keywords