• 제목/요약/키워드: Carbon film

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Inductively Coupled Plasma에 의한 fluorocarbon 가스 플라즈마의 실리카 표면 반응 연구 (The Study of Silica Surface Reaction with Fluorocarbon Plasma Using Inductively Coupled Plasma)

  • 박상호;신장욱;정명영;최태구;권광호
    • 한국전기전자재료학회논문지
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    • 제11권6호
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    • pp.472-476
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    • 1998
  • The surface reactions of silica film($SiO_2-P_2O_5-B_2O_3-GeO_2$) with fluorocarbon plasma has been studied by using angle -resolved x-ray photoelectron spectroscopy(XPS). It has been confirmed that residual carbon consists of C-C and C-CFx bonds and fluorine mainly binds silicon in the case of etched silica by using $CF_4$ gas plasma. The surface reaction of silica with various fluorocarbon gases, such as $CF_4,C_2F_6 and CHF_3$ were investigated. XPS results showed that though the etching gases were changed, the elements and binding states of the residual layers on the etched silica by using various fluorocarbon gas plasma were nearly the same . This seems to be due to the high volatility of byproducts, that is, $SiF_4 and CO_2$ etc..

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이온빔 배향을 이용한 네마틱 액정의 프리틸트각 제어를 위한 통계적 모델링 (Statistical modeling of pretilt angle control for NLC using ion beam alignment)

  • 강희진;강동훈;이정환;윤일구;오용철;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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    • pp.302-303
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    • 2006
  • The response surface modeling of the pretilt angle control using ion-beam (IB) alignment on nitrogen doped diamond-like carbon (NDLC) thin film layer is investigated. The response surface model is used to analyze the variation of the pretilt angle under various process conditions IB exposure angle and IB exposure time are considered as Input factors. The analysis of variance technique is used to analyze the statistical significance, and effect plots are also investigated to examine the relationships betweenthe process parameters and the response. The model can allow us to reliably predict the pretilt angle with respect to the varying process conditions.

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Investigation of Physicochemical Properties of Mo Carbide Utilizing Electron Spectroscopy

  • Jeong, Eunkang;Park, Juyun;Kang, Yong-Cheol
    • 통합자연과학논문집
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    • 제13권3호
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    • pp.87-91
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    • 2020
  • Molybdenum carbide (MoCx) thin films (TFs) were deposited by reactive radio frequency (rf) magnetron co-sputtering in high vacuum chamber. We compared the properties of MoCx thin films as the rf power changed on C target. The result of alpha step measurement showed that the thickness of the MoCx TFs varied from163.3 to 194.86 nm as C power was increased from 160 to 200 W. The crystallinity of MoCx such as b-Mo2C, Mo2C, and diamond like carbon (DLC) structures were observed by XRD. The oxidation states of Mo and C were determined using high resolution XPS spectra of Mo 3d and C 1s were deconvoluted. Molybdenum was consisted of Mo, Mo4+, and Mo6+ species. And C was deconvoluted to C-Mo, C, C-O, and C=O species.

Flexible and Transparent Plastic Electrodes Composed of Reduced Graphene Oxide/Polyaniline Films for Supercapacitor Application

  • Sarker, Ashis K.;Hong, Jong-Dal
    • Bulletin of the Korean Chemical Society
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    • 제35권6호
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    • pp.1799-1805
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    • 2014
  • In this article, we described about the preparation and electrochemical properties of a flexible energy storage system based on a plastic polyethylene terephthalate (PET) substrate. The PET treated with UV/ozone was fabricated with multilayer films composed of 30 polyaniline (PANi)/graphene oxide (GO) bilayers using layer-by-layer assembly of positively charged PANi and negatively charged GO. The conversion of GO to the reduced graphene oxide (RGO) in the multilayer film was achieved using hydroiodic acid vapor at $100^{\circ}C$, whereby PANi structure remained nearly unchanged except a little reduction of doping state. Cyclic voltammetry and charge/discharge curves of 30 PANi/RGO bilayers on PET substrate (shorten to PANi-$RGO_{30}$/PET) exhibited an excellent volumetric capacitance, good cycling stability, and rapid charge/discharge rates despite no use of any metal current collectors. The specific capacitance from charge/discharge curve of the PANi-$RGO_{30}$/PET electrode was found to be $529F/cm^3$ at a current density of $3A/cm^3$, which is one of the best values yet achieved among carbon-based materials including conducting polymers. Furthermore, the intrinsic electrical resistance of the PANi-$RGO_{30}$/PET electrodes varied within 20% range during 200 bending cycles at a fixed bend radius of 2.2 mm, indicating the increase in their flexibility by a factor of 225 compared with the ITO/PET electrode.

산화리튬의 치환에 따른 붕규산 유리의 분상에 관한 연구 (The Phase Separation of Low Alkali Borosilicate Glass by Substituting $Li_2O$ for $Na_2O$)

  • 양중식
    • 한국세라믹학회지
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    • 제18권1호
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    • pp.27-34
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    • 1981
  • The phase separation of low-alkali borosilicate glass with the composition of $6.25Na_2O$.$18.75B_2O_3$.$75.00SiO_2$(mole%) substituting $Li_2O$ for $Na_2O$ was studied. The phase separation in the temperature range of transformation was examined with various heating temperatures and soaking times. Durability to water, thermal expansion and specific density of the specimen were investigated and the microstructure of the separated phase was also observed by transmission electron micrograph techniques. The maximum alkali extraction result with the best phase separation effect was obtained when $Na_2O$ of the base glass was replaced with $1.88Li_2O$ (mole %) and electron micrograph of carbon film replica of $1.88Li_2O$$4.37Na_2O$.$18.75B_2O_3$.$75.00SiO_2$ (mole %) glass showed that the glass consisted of homogeneous two phases. The minimum specific density was shown with the specimen treated at 57$0^{\circ}C$ and it was also shown that the longer the treating time the lower the specific density. The apparent activation energies of approximately 45 kcal/mole by the alkali extraction and 43kcal/mole by the thermal expansion method were derived from the Arrhenius plots, respectively.

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유류오염 토양에서 분리한 Acinetobacter sp. 2-3A의 유화활성 (Emulsification Activity of Acinetobacter sp. 2-3A Isolated from Petroleum Oil-Contaminated Soil)

  • 임지현;정성윤
    • 한국환경과학회지
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    • 제18권11호
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    • pp.1261-1270
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    • 2009
  • Fifty hydrocarbon-metabolizing microorganisms were isolated from soil samples polluted by the petroleum oils in Gamman-dong, Busan. Among them, strain 2-3A, showing strong emulsification activity, was selected by oil film-collapsing method. This bacterium was identified as Acinetobacter sp. and designated as Acinetobacter sp. 2-3A. The optimum temperature and pH on the growth of Acinetobacter sp. 2-3A were $25^{\circ}C$ and pH 7.0, respectively. The carbon and nitrogen sources for the most effective emulsification activity were 3.0% olive oil and 0.5% peptone, respectively. The 0.15% potassium phosphate was the most effective emulsification activity as a phosphate source. The optimum emulsification activity condition was $20^{\circ}C$, pH 7.0, and 2.0% NaCl. The optimum time for the best production of biosurfactant was 27 hrs. The emulsification stability was maintained at the temperature range from $4^{\circ}C$ to $100^{\circ}C$, pH range from 6.0 to 10.0, and NaCl range from 0% to 10%. For the oil resolvability of the biosurfactant, the residual oils were investigated by gas chromatography. As a result, it was verified that the biosurfactant decreased and decomposed crude oils from $_nC_{10}$ to $_nC_{32}$.

Synthesis, Self-assembly, and Catalytic Activity of 1H-Imidazole Amphiphiles

  • Park, Jun-Ha;Kim, Min-Soo;Seo, Sang-Hyuk;Chang, Ji-Young
    • Bulletin of the Korean Chemical Society
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    • 제32권7호
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    • pp.2193-2198
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    • 2011
  • We prepared polycatenar 1H-imidazole amphiphiles having a structure in which a 1H-imidazole head was connected through a benzene ring to a pheny group having two or three oligo(ethylene glycol) chains and studied their supramolecular assembly by fluorescence spectroscopy, transmission electron microscopy (TEM) and atomic force microscopy (AFM). When the aqueous solutions of the amphiphiles ($5{\times}10^{-5}M{\sim}10^{-3}M$) were deposited onto a carbon-coated copper grid and dried, twisted structures with diameters of ~200-300 nm were imaged by TEM and AFM. We presume that the structures comprised a chain of the amphiphile dimers formed via successive hydrogen bonding between the 1H of the imidazole group and 3N of the neighboring one. In a solution of pH 4, entangled fibers with diameters of several nanometers were observed by TEM. In a pH 10 solution, film-like aggregates formed exclusively. The 1H-imidazole amphiphiles hydrolyzed tetraethoxysilane to induce gelation to form fibrous and spherical silica structures at neutral pH in aqueous solutions. No silica was formed when imidazole was used instead of the amphiphiles, suggesting that the selfassembled aggregates of the amphiphiles were responsible for the gelation.

$CHF_3$/$C_2$$F_6$ 반응성이온 건식식각에 의한 실리콘 표면의 오염 및 제거에 관한 연구 (A Study on the Silicon surface and near-surface contamination by $CHF_3$/$C_2$$F_6$ RIE and its removal with thermal treatment and $O_2$ plasma exposure)

  • 권광호;박형호;이수민;곽병화;김보우;권오준;성영권
    • 전자공학회논문지A
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    • 제30A권1호
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    • pp.31-43
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    • 1993
  • Thermal behavior and $O_{2}$ plasma effects on residue and penetrated impurities formed by reactive ion etching (RIE) in CHF$_{3}$/C$_{2}$F$_{6}$ have been investigated using X-ray photoelectron spectroscopy (XPS) and secondary ion mass spectrometry (SIMS) techniques. Decomposition of polymer residue film begins between 200-300.deg. C, and above 400.deg. C carbon compound as graphite mainly forms by in-situ resistive heating. It reveals that thermal decomposition of residue can be completed by rapid thermal anneal above 800.deg. C under nitrogen atmosphere and out-diffusion of penetrated impurities is observed. The residue layer has been removed with $O_{2}$ plasma exposure of etched silicon and its chemical bonding states have been changed into F-O, C-O etc.. And $O_{2}$ plasma exposure results in the decrease of penetrated impurities.

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컬럼반응조내에서의 고정된 생물막에 의한 농약 4-chloro-2-methylphenoxyacetic acid의 분해 (Degradation of a Pesticide, 4-Chloro-2-methylphenoxyacetic Acid by Immobilized Biofilm in Bench-scale Column Reactors)

  • 오계헌;차민석
    • KSBB Journal
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    • 제11권5호
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    • pp.524-528
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    • 1996
  • 과립활성탄(GAC)상에 고정된 세균에 의한 4chloro-2-methylphenoxyacetic acid (MCPA)의 분해가 유통 조건하의 컬럼반응조에서 연구되었다. GAC상에 생물막을 형성시키기 위한 접종으로서 M MCPA를 분해하는 세균의 혼합배양이 사용되었다. 접종하기 전에 GAC에 의한 MCPA의 흡착을 조사 하였으며 접종후 GAC상에 형성된 생물막을 주사전자 현미경으로 관찰하였다. MCPA 분해는 생물막이 형성된 GAC를 포함하는 컬럼반응조의 회분 및 연 속운전 조건하에서 조사되었다. 회분배양에서 MC P PA의 완전분해가 이루어졌다. 연속배양상태에서 분적 인 MCPA의 분해가 일어났으나 분해정도는 기질인 MCPA의 결럼반응조내로 유입속도에 의존 었다.

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Bi-electrolyte Carbon Dioxide Gas Sensor Based on Paste Sodium-Beta Alumina and Yttria-stabilized Zirconia

  • Han, Hyeuk Jin;Park, Chong Ook
    • 센서학회지
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    • 제23권3호
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    • pp.170-172
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    • 2014
  • $CO_2$ sensor was used only one solid electrolyte in many cases. To improve the sensing characteristics of $CO_2$ sensors, solid electrolyte $CO_2$ sensor has been developed by bi-electrolyte type sensor using Na-Beta-alumina and YSZ. However, in many further studies, bi-electrolyte type sensor was made by pellet pressed by press machine and additional treatment for formation of interface. In the aspect of mass production, using thick film and additional treatment is not suitable. In this study, $CO_2$ sensor was fabricated by bi-electrolyte structure which was made by an NBA paste layer deposited on YSZ pellet and fired at $1650^{\circ}C$ for 2 hour. The formation of stable interface between YSZ and NBA were confirmed by SEM image. When the type IV electrochemical cell arrangement represented by $CO_2,O_2,Pt{\mid}Li_2CO_3-CaCO_3{\parallel}NBA{\parallel}YSZ{\mid}O_2,Pt$ is used to measure the $CO_2$ concentration in air. This sensor EMF should depend only on the concentration of $CO_2$ by logarithmic. Also, sensor shows $P_{CO_2}$ and EMF relationship like nerstian reaction at a temperature of $450^{\circ}C$.