• 한국생산제조학회지
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• 제22권6호
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• pp.982-988
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• 2013

With conventional positioning apparatus, it is very difficult to simultaneously achieve the desired driving range and precision at the sub-micrometer level. Generally, lead screw and friction drive, etc., have been used as servo control systems. These have large driving ranges, and high-speed positioning is feasible. In this study, we present a global servo system controlled by a laser interferometer acting as a displacement measurement sensor for achieving positioning accuracy at the sub-micrometer level.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 심포지엄 논문집 정보 및 제어부문
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• pp.234-236
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• 2006

Because of its long measurement range and ultra-precise resolution. the heterodyne laser interferometer systems are very common in various industry area such as semiconductor manufacturing. However the periodical nonlinearity property caused from frequency mixing is an obstacle to improve the high measurement accuracy in nanometer scale. In this paper to minimize the effect of nonlinearity, we propose an adaptive nonlinearity compensation algorithm. We first compute compensation parameters using least square (LS) with the capacitance displacement sensor as a reference input. We then update the parameters with recursive LS (RLS) while the values are optimized to modify the elliptical phase into circular one. Through comparison with some experimental results of laser system, we demonstrate the effectiveness of our proposed algorithm.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 심포지엄 논문집 정보 및 제어부문
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• pp.86-88
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• 2007

In the semiconductor manufacturing industry, the heterodyne laser interferometer plays as an ultra-precise measurement system. However, the heterodyne laser interferometer has some unwanted nonlinearity error which is caused from frequency-mixing. This is an obstacle to improve the measurement accuracy in nanometer scale. In this paper we propose a compensation algorithm based on RLS(recursive least square) method and artificial intelligence method, which reduce the nonlinearity error in the heterodyne laser interferometer. With the capacitance displacement sensor we get a reference signal which can be transformed into the intensity domain. Using the back-propagation Neural Network method, we train the network to track the reference signal. Through some experiments, we demonstrate the effectiveness of the proposed algorithm in measurement accuracy.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1990년도 하계학술대회 논문집
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• pp.297-300
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• 1990

The measurement of very fast transients generated by disconnecting switches in gas-insulated switchgear(GIS) have to deal with the problems such as reliability, interference pich-up, optimal design of high voitage equipments. This paper presents a new developed voltage sensor to measure the very fast transients, the basic theory of the measuring method, the design, structure of planar capacitive voltage probe are described. Finally the examples of modelling tests on an actual site GIS are discussed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.15-16
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• 2006

In-process surface roughness prediction is studied in this research. To implement in-process prediction, spindle displacement is introduced. Machined surface's roughness is assumed to be expressed in terms of spindle displacement. In-process measurement of spindle displacement is conducted using CCDS (cylindrical capacitive displacement sensor). Two prediction models are developed. One is simple linear model between measured surface roughness and values by spindle displacement. The other is multiple regression model including machining parameters like spindle speed, fee rate and radial depth of cut. Relation between machined surface roughness and roughness by spindle displacement are verified.

• 한국기계가공학회지
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• 제13권6호
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• pp.15-22
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• 2014

With a conventional positioning apparatus, it is very difficult simultaneously to achieve desired driving ranges and precision levels at the sub-micrometer level. Generally, a lead screw and friction drive have been used as servo control systems. These have large driving ranges, and high-speed positioning is feasible. In this study, we present a global servo system controlled by a laser interferometer acting as a displacement measurement sensor for achieving positioning accuracy at the sub-micrometer level.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.350-351
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• 2006

Thick film mechanical sensors can be categorized into four main areas piezoresistive, piezoelectric, capacitive and mechanic tube. In this areas, the thick film strain gage is the earliest example of a primary sensing element based on the substrates. The latest thick film sensor is used various pastes that have been specifically developed for pressure sensor application. Some elastic materials exhibit a change in bulk resistivity when they are subjected to displacement by an applied pressure. This property is referred to as piezoresistivity and is a major factor influencing the sensitivity of a piezoresistive strain gage. The effect of thick film resistors was first noticed in the early 1970, as described by Holmes in his paper in 1973.

• 센서학회지
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• 제31권3호
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• pp.139-144
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• 2022

Advanced tactile sensors are receiving significant attention in various industries such as extended reality, electronic skin, organic user interfaces, and robotics. The capabilities of advanced tactile sensors require a variety of functions, including position sensing, pressure sensing, and material recognition. Moreover, they should comsume less power and be bio-friendly with human contact. Recently, a tactile sensor based on the triboelectrification effect was developed. Triboelectric tactile sensors have the advantages of wide material availability, simple structure, and low manufacturing cost. Because they generate electricity by contact, they have low power consumption compared to conventional tactile sensors such as capacitive and piezoresistive. Furthermore, they have the ability to recognize the contact material as well as execute position and pressure sensing functions using the triboelectrification effect. The aim of this study is to introduce the progress of research on triboelectrification-based tactile sensors with various functions such as position sensing, pressure sensing and contact material recognition.

• 센서학회지
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• 제13권5호
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• pp.363-368
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• 2004

A reliable voltage measurement system is necessary to monitor status of power facilities in substations, which is easy to set up and is not influenced by electromagnetic interference in and around substation. In this paper, we described a voltage measurement system (VMS) which is composed of a capacitive voltage probe, an impedance converter, and an optical linker. To get a wide-band characteristic of the VMS, a high speed impedance converter was used, and the output impedance of the VMS was set at $50{\Omega}$ to match any types of observing instruments. The frequency bandwidth of the VMS. which was estimated by a step pulse, was ranges from 11.42 Hz to 13.65 MHz, and the VMS showed a good response characteristic in a high frequency domain such as impulse voltages as well as a commercial frequency voltage.

• 한국HCI학회:학술대회논문집
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• 한국HCI학회 2007년도 학술대회 1부
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• pp.573-577
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• 2007

터치 센서를 이용한 휴대단말용 인터페이스가 다양하게 개발되면서 차세대 인터랙션 수단으로서 많은 주목을 받고 있지만, 버튼 인터페이스에 비해 오동작에 취약하고 터치 인터페이스만의 차별성을 확보하지 못하고 있는 실정이다. 본 논문에서는 터치 드래그 동작을 주요 인터랙션 수단으로 활용한 모바일 기기용 사용자 인터페이스를 개발하여 오동작을 최소화하고 사용자가 조작할 때 즐거움을 줄 수 있는 UI 요소로 활용할 수 있도록 하였다. 본 논문에서 개발한 터치 인터페이스는 기기의 내부/외부 방향의 스크롤 동작을 각각 drag-in/drag-out 동작으로 칭하고 이러한 드래그 동작을 응용 프로그램의 실행과 종료에 할당하였으며 터치 센서를 따라 움직이는 스크를 동작은 기존과 동일하게 일반적인 스크롤 행위를 지시하는데 적용하였다. 제안한 인터랙션 방법은 터치 센서의 형태에 따라 크게 두 가지 방식으로 구현하였다. 첫 번째 방법은 기기 스크린 외곽에 터치 센서를 이열(二列) 배치하여, 터치스크린을 사용하지 않고도 스크린 주변의 터치 센서를 활용한 drag-in/out 동작의 감지가 가능하도록 하였다. 두 번째 구현 방법은 정전용량형 터치 센서 IC를 활용해 터치 스크린 기능과 함께 스크린 주변의 기기 케이스의 일부까지도 사용자의 접촉을 감지할 수 있도록 하였다. 기존 저항 방식 터치 스크린과 달리 본 논문에서 활용한 방식은 스크린과 케이스에서 동시에 터치를 감지할 수 있으며, 다접점 감지 알고리즘의 개발로 두 개의 손가락을 이용한 다양한 터치 인터랙션으로 활용할 수 있다.