• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 하계학술대회 논문집 C
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• pp.1896-1898
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• 2001

An offset problem caused by the static parasitic capacitors is analyzed and then some techniques to reduce their effect on the capacitive position sensor are presented. Also new offset compensation technique is proposed that by adjusting the magnitudes of the modulating signals independently, the charge imbalance between electrodes caused by the parasitic capacitors is eliminated without sensor gain variation. Simulation results are given to validate the proposed compensation technique.

• 한국컴퓨터정보학회논문지
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• 제17권8호
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• pp.107-114
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• 2012

본 논문에서는 인간의 가장 기본적이며 기초적인 운동인 걸음걸이로부터 검출할 수 있는 걸음 수 및 보행분석을 위해 전도성 섬유를 이용한 전기용량성 압력 센서를 깔창형태로 개발하였다. 개발된 깔창 형태의 센서는 보행시의 압력을 측정하여 보행신호를 검출하고, 검출된 신호를 이용하여 걸음 수 및 자세에 따른 압력 분포를 관찰하였다. 개발된 센서의 성능 검증을 위하여 국제규격의 표준분동을 사용하여 0 kg에서 100 kg 까지 10 kg씩 증가하여 무게에 따른 압력변화를 관찰하였으며, 그 결과 압력에 따라 비선형적인 특성을 가지고 캐패시턴스 값이 증가함을 보였다. 자세에 따른 압력변화 실험과 보행 횟수 검출비교를 위한 실험에서는 건강한 성인남성 다섯 명을 대상으로 4가지의 서로 다른 자세로 있을 때의 압력 변화를 관찰하였고, 보행 횟수 검출을 위해서는 시속 1 km/h와 4 km/h의 두 가지 걸음속도에서 3분 동안 걷게 하여 보행신호를 검출하였다. 상용 만보계 및 관찰자의 수계로 도출된 보수를 비교하였다. 기존의 상용 만보계는 저속(1 km/h)으로 걸었을 때 보수가 잘 측정되지 않은 반면 개발된 센서는 저속에서도 관찰자 수계대비 정확한 보수를 도출 할 수 있었다(상용 만보계 대비 평균 98.06 %의 인식률). 또한 자세에 따라 압력 값을 토대로 사용자의 자세를 모니터링 할 수 있음을 보였다. 본 연구는 향후 스마트폰과 무선 연동하는 스마트 보행관리 시스템을 개발하기 위한 기초연구이다.

• 대한전자공학회논문지SD
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• 제46권6호
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• pp.25-30
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• 2009

본 논문에서는 터치키에 응용할 수 있는 풀 디지털 방식의 정전용량 센싱 기법을 제안한다. 제안된 회로는 측정하고자 하는 정전용량 두 개와 두 정전용량 사이 저항으로 구성된다. 각 정전용량과 저항으로 지연을 측정한 후 두 지연의 차이로 측정하고자 하는 두 정전용량의 차이를 구하는 방식으로 동작전압, 온도, 습도와 같은 동작환경변화의 영향을 완화시킬 수 있는 장점이 있다. 실험결과 제안된 방식의 정전용량 해상도가 1.02pF이어서 터치키에 적용할 수 있음을 보였다.

• 한국정밀공학회지
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• 제19권3호
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• pp.33-38
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• 2002

To establish the national standard of capacitance, four main electrodes of the cross capacitor which were evaluated to linearity and roundness less the $\pm 1 \mu m$ respectively have to be adjusted symmetrically in an inner cylinder. Four LM shafts with diameter of 5 mm were installed between main electrodes of the cross capacitor, and the electrodes were adjusted, as the first step, by means of the measured capacitance. In the second step, the symmetrical adjustment up to $\pm 1.2\mu m$ was performed by using a ball sensor, ball-type movable sensor, non-contacting capacitive sensor and upper guard sensor which were developed in this project.

• 센서학회지
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• 제24권3호
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• pp.208-213
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• 2015

The purpose of this study is to optimize the design of a capacitive pressure sensor element using the simulation of electrical characteristics. The simulation of the ceramic sensor diaphragm ($Al_2O_3$) was performed by permitting pressure to change the curvature of the diaphragm. The pressure capacitance ($C_P$) was increased from 19.63 pF to 15.26 pF by applying pressure because the distance between the electrodes has been changed from $30{\mu}m$ to $15{\mu}m$. When the thickness of the diaphragm was changed to 0.46~0.52 mm, a larger capacitance change showed in accordance with the reduced thickness, which means an increase of sensitivity. However, considering the viewpoint of the signal linearity, it was selected for the optimum thickness of the diaphragm to 0.50 mm. The designed sensor element based on simulated results was tested to measure the output characteristics. Comparing of simulated and measured results, there was a margin of error of approximately 2%.

• 반도체디스플레이기술학회지
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• 제21권2호
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• pp.107-111
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• 2022

In this paper, a plastic film type submersion sensor capable of measuring submersion speed was developed. This submersion sensor is designed as a capacitive type, and it is a sensor that outputs the change in capacitance between the electrode of the submersion sensor and the grounded body as a voltage through a C-V(capacitance-voltage) converter. We developed an submersion sensor in which two electrodes of different lengths are connected in parallel to measure the submersion speed accurately by minimizing the influence of noise such as contamination. When both electrodes of the submersion sensor are exposed to water, the rate of change of water level suddenly increases, so the submersion speed is measured by measuring the time to this point. Since the difference in length between the two electrodes of the submersion sensor does not change in any case, it is possible to accurately measure the submersion speed.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.387-393
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• 2004

General purpose of cylindrical capacitive displacement sensor(CCS) is measuring run-out motion and deflection of rotor. If CCS has narrow sensing range, its sensitivity coefficients must be calibrated precisely. And x, y component of CCS output can be coupled. In this research, CCS calibration procedure is automated with automatic calibration program and PC-controlled stage. And, coupled-terms of CCS signals were removed and the errors between measured position and mapped CCS signal were reduced obviously by sensitivity matrix that linearly.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.672-676
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• 2004

In this paper, measuring system of 5 DOF motion errors are proposed using two capacitive type sensor, a straight edge and a laser interfoerometer. Yawing error and pitching error are measured using the laser interferometer, and rolling error is measured by the reversal method using a capacitive type sensor. Linear motion errors of horizontal and vertical direction are measured using the sequential two point method. In this case, influence of angular motion errors is compensated using the previously measured angular motion errors. In the horizontal direction, measuring accuracy is within 0.05 $\mu$m and 0.27 arcsec, and in the vertical direction, it is within 0.15 $\mu$m and 0.5 arcsec. From these results, it is confirmed that the proposed measureing system is very effective to the measurement of 5 DOF motion errors in the ultra precision feed tables.

• 로봇학회논문지
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• 제11권3호
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• pp.140-145
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• 2016

In this paper, we fabricate arrayed-type flexible capacitive touch sensor using liquid metal (LM) droplets (4 mm spatial resolution). Poly-4-vinylphenol (PVP) layer is used as a dielectric layer on the electrode patterned Polyethylene naphthalate (PEN) film. Bonding tests between hydroxyl group (-OH) on the PVP film and polydimethylsiloxane (PDMS) are conducted in a various $O_2$ plasma treatment conditions. Through the tests, we can confirm that non-$O_2$ plasma treated PVP layer and $O_2$ plasma treated PDMS can make a chemical bond. To measure dynamic range of the device, one-cell experiments are conducted and we confirmed that the fabricated device has a large dynamic range (~60 pF).

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 추계학술대회논문집A
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• pp.548-553
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• 2000

A new design of cylindrical capacitive sensor(CCS) for the displacement measurement of precision active magnetic bearing(AMB) spindle is presented in this paper. This research is motivated by the problem that existing 4-segment CCS is still sensitive to the $3^{rd}$ harmonic component of the geometric errors of a rotor. The procedure of designing new CCS starts from the modeling and error analysis of CCS. The angular size of CCS is set up as a design parameter, and new 8-segment CCS is introduced to possess an arbitrary angular size. The optimum geometry of CCS to minimize the effect of geometric errors is determined through minimum norm approach. Experimental results with test rotors have confirmed the improvement in geometric error suppression.