• 한국재료학회지
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• 제15권3호
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• pp.149-154
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• 2005

Teflon like fluorocarbon thin films have been deposited on silicon and oxide molds as an antistiction layer for the hot embossing process by an inductively coupled plasma (ICP) chemical vapor deposition (CVD) method. The process was performed at $C_4F_8$ gas flow rate of 2 sccm and 30 W of plasma power as a function of substrate temperature. The thickness of film was measured by a spectroscopic ellipsometry. These films were left in a vacuum oven of 100, 200 and $300^{\circ}C$ for a week. The change of film thickness, contact angle and adhesion and friction force was measured before and after the thermal test. No degradation of film was observed when films were treated at $100^{\circ}C$. The heat treatment of films at 200 and $300^{\circ}C$ caused the reduction of contact angles and film thickness in both silicon and oxide samples. Higher adhesion and friction forces of films were also measured on films treated at higher temperatures than $100^{\circ}C$. No differences on film properties were found when films were deposited on either silicon or oxide. A 100 nm silicon template with 1 to $500\;{\mu}m$ patterns was used for the hot embossing process on $4.5\;{\mu}m$ thick PMMA spun coated silicon wafers. The antistiction layer of 10 nm was deposited on the silicon mold. No stiction or damages were found on PMMA surfaces even after 30 times of hot embossing at $200^{\circ}C$ and 10 kN.

• 한국세라믹학회지
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• 제42권8호
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• pp.575-581
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• 2005

SiC-based ceramics are considered as candidate materials for the advanced nuclear energy systems such as the generation IV reactors and the fusion reactors due to their excellent high-temperature strength and irradiation resistance. The advanced nuclear energy systems and their main components adopting ceramic composites were briefly reviewed. A novel fabrication method of $SiC_f/SiC$ composites by introducing SiC whiskers was also described. In addition, the charged-particle irradiation ($Si^{2+}$ and $H^{+}$ ion) into CVD SiC was carried out to simulate the severe environments of the advanced nuclear reactors. SiC whiskers grown in the fiber preform increased the matrix infiltration rate by more than $60\%$ compared to the conventional CVI process. The highly crystalline and pure SiC showed little degradation in hardness and elastic modulus up to a damage level of 10 dpa at $1000^{\circ}C$.

• 한국세라믹학회지
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• 제52권6호
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• pp.429-434
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• 2015

This study investigates the macroscopic wear behaviors of C/C and C/C-SiC composites coated with hafnium carbide (HfC). To improve the wear resistance of C/C composites, low-pressure chemical vapor deposition (LPCVD) was used to obtain HfC coating. The CVD coatings were deposited at various deposition temperatures of 1300, 1400, and $1500^{\circ}C$. The effect of the substrate material (the C/C substrate, the C/C-CVR substrate, or the C/C-SiC substrate deposited by LSI) was also studied to improve the wear resistance. The experiment used the ball-on-disk method, with a tungsten carbide (WC) ball utilized as an indenter to evaluate the wear behavior. The HfC coatings were found to effectively improve the wear resistance of C/C and C/C-SiC composites, compared with the case of a non-coated C/C composite. The former showed lower friction coefficients and almost no wear loss during the wear test because of the presence of hard coatings. The wear scar width was relatively narrower for the C/C and C/C-SiC composites with hafnium coatings. Wear behavior was found to critically depend on the deposition temperature and the material. Thus, the HfC-coated C/C-SiC composites fabricated at deposition temperatures of $1500^{\circ}C$ showed the best wear resistance, a lower friction coefficient, and almost no loss during the wear test.

• 한국결정성장학회지
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• 제27권4호
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• pp.149-153
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• 2017

최근 많은 양의 보석용 무색 합성 멜리사이즈 다이아몬드가 주얼리 시장에 유입되고 있으며, 이로 인해 세계 곳곳에서 다이아몬드와 관련된 속임 건수가 보고되고 있다. 예를 들면, 의도적으로 합성 다이아몬드를 천연 다이아몬드라고 판매하거나 또는 의도적으로 천연 다이아몬드에 합성 다이아몬드를 섞어 판매하는 경우이다. 결론적으로, 천연 멜리사이즈 다이아몬드와 합성 멜리사이즈 다이아몬드의 구별이 그 어느 때보다도 더욱 중요한 상황이다. 현재 중국에서는 합성 다이아몬드를 생산할 수 있는 큐빅 프레스가 10,000기가 넘는다. 이 중 1,000기가 무색의 보석용으로 생산되고 있으며, 1기당 24시간을 기준으로 10캐럿의 합성 멜리 다이아몬드를 생산할 수 있다. 합성 다이아몬드는 때때로 핀포인트나 금속성 플럭스를 함유하는 특징을 가지지만, 감별을 위해서는 전문 감정원의 첨단 장비들이 요구된다. 소비자의 신뢰를 확보하기 위해서는 천연 다이아몬드로부터 모든 합성 다이아몬드는 구분되어야 한다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.376.1-376.1
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• 2014

그래핀은 차세대 2차원 물질로서 지금까지 활발히 연구되어 왔으나 밴드갭이 없기 때문에 전자소자로서의 응용이 매우 제한적이다. 최근에 그래핀을 대체할 수 있는 물질로서 Transition Metal Dichalcogenides (TMDs)가 주목을 받고 있다. 특히, TMDs 중에서 $MoS_2$는 bulk일 때 indirect한 1.2 eV인 밴드 갭을 갖고 있으나, layer가 줄어들면서 direct한 1.8 eV인 밴드갭을 가진다. 국내외 여러 연구 그룹에서 $MoS_2$를 이용하여 제작한 Field Effect Transistor (FET)는 high-$\small{K}$ gate가 산입되지 않은 경우에 on-off ratio와 mobility가 각각 $10^6$와 약 $3cm^2/Vs$로 나타나고 있다. 이와 같이 아주 우수한 전기적, 광학적 특성을 갖는 소자 응용성을 가지고 있다. 최근까지의 연구결과들은 대부분 mechanical exfoliation method (MEM) 로 제작된 $MoS_2$ monolayer를 이용하였으나, 이 방법은 large scale 및 layer controllable에는 적합하지 않다. 본 연구에서는 대면적의 집적회로 응용에 적합한 chemical vapor deposition법을 이용하여 $MoS_2$를 성장하였다. 높은 결정성을 위해 sulphur (powder purity 99.99%)와 molybdenum trioxide(powder purity 99.9%)를 이용하고, Ar 가스 분위기에서 sulphur powder 및 molybdenum trioxide powder를 각각 $130^{\circ}C$ 및 $1000^{\circ}C$로 유지하며 $MoS_2$ 박막을 성장하였다. 성장된 $MoS_2$ 박막은 Atomic force Microscopy (AFM)을 통해 박막의 단차와 roughness을 확인하였다. 또한, X-ray Diffraction (XRD) pattern 분석으로 박막의 결정성을 확인하였으며, Raman Spectroscopy, X-ray Photoelectron Spectroscopy (XPS), Photoluminescence (PL) 측정으로 광학적 특성을 분석하였다.

• Korean Chemical Engineering Research
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• 제46권6호
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• pp.1063-1068
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• 2008

화학기상증착법으로 제조된 $TiO_2$ 광촉매 볼을 이용하여 마이크로웨이브와 자외선을 동시에 조사시켜 메틸렌블루 수용액의 광촉매 분해실험을 하였다. 광촉매반응에 마이크로웨이브와 자외선을 같이 사용하기 위하여 마이크로웨이브에 의해 방전되는 무전극자외선램프를 개발하였다. 실험결과 마이크로웨이브의 강도, 반응수용액의 순환유속 그리고 산화보조제의 첨가량이 증가할수록 광촉매분해속도가 증가하였다. 특히 과산화수소를 첨가한 광촉매반응에 마이크로웨이브를 부가한 실험의 반응속도상수는 $0.0197min^{-1}$이고 광촉매반응에 과산화수소만을 첨가한 경우의 속도상수는 $0.0061min^{-1}$로 약 3배정도 높은 값을 나타내었다. 본 연구의 결과로부터 광촉매반응에 마이크로웨이브가 미치는 영향을 정량적으로 평가하기는 어렵지만, 과산화수소가 첨가되는 광촉매반응에 마이크로웨이브의 조사가 매우 중요한 인자인 것을 알 수 있었다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2016년도 추계학술대회 논문집
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• pp.105-105
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• 2016

Recently, high power impulse magnetron sputtering (HIPIMS) has attracted considerable attentions due to its high potential for industrial applications. By pulsing the sputtering target with high power density and short duration pulses, a high plasma density and high ionization of the sputtered species can be obtained. HIPIMS has exhibited several merits such as increased coating density, good adhesion, microparticle-free and smooth surface, which make the HIPIMS technique desirable for synthesizing hard coatings. However, hard coatings present intrinsic defects (columnar structures, pinholes, pores, discontinuities) which can affect the corrosion behavior, especially when substrates are active alloys like steel or in a wear-corrosion process. Atomic layer deposition (ALD), a CVD derived method with a broad spectrum of applications, has shown great potential for corrosion protection of high-precision metallic parts or systems. In ALD deposition, the growth proceeds through cyclic repetition of self-limiting surface reactions, which leads to the thin films possess high quality, low defect density, uniformity, low-temperature processing and exquisite thickness control. These merits make ALD an ideal candidate for the fabrication of excellent oxide barrier layer which can block the pinhole and other defects left in the coating structure to improve the corrosion protection of hard coatings. In this work, CrN/Al2O3/CrN multilayered coatings were synthesized by a hybrid process of HIPIMS and ALD techniques, aiming to improve the CrN hard coating properties. The influence of the Al2O3 interlayer addition, the thickness and intercalation position of the Al2O3 layer in the coatings on the microstructure, surface roughness, mechanical properties and corrosion behaviors were investigated. The results indicated that the dense Al2O3 interlayer addition by ALD lead to a significant decrease of the average grain size and surface roughness and greatly improved the mechanical properties and corrosion resistance of the CrN coatings. The thickness increase of the Al2O3 layer and intercalation position change to near the coating surface resulted in improved mechanical properties and corrosion resistance. The mechanism can be explained by that the dense Al2O3 interlayer acted as an excellent barrier for dislocation motion and diffusion of the corrosive substance.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 1994년도 춘계학술대회강연 및 발표대회 강연및 발표논문 초록집
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• pp.6-6
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• 1994

Har dmaterials such as cemented carbides with or without coated layer, cermets, ceramics and diamond or c-BN high pressure sintered compact are used for cutting tools, wear -resistant parts, rock drilling bits and/or high pressure vessels. These hardmaterials contain not only hard phase, but also second consituent as the element for forming ductile phase and/or sintering aid, and the mechanical properties of each material depend on (1) the amount of the second constituent as well as (2) the grain size of the hard phase. The hardness of each material mainly depends on these two factors. The fracture strength, however, largely depends on other microstructur a1 factors as well as the above two factors. For all hardmaterials, the fracture strength is consider ably affected by (3) the size of microstructur a1 defect which acts as the fracture source. In cemented carbides, the following factors which are generated mainly due to the addition of the second constituent are also important; (4) the variation of the carbon content in the normal phase region free from V-phase and graphite phase, (5) the precipitation of $Co_3$ during heating at about $800^{\circ}C$,(6) the domain size of binder phase, and (7) the formation of ${\beta}$-free layer or Co-rich layer near the surface of sintered compacts. For cemented carbides coated with thin hard substance, the important factors are as follows; (8) the kind of coated substance, (9) the formation of ${\eta}$-phase layer at the interface between coated layer and substrate, (10) the type of residual stress (tension or compression) in the coated layer which depends on the kind of coating method (CVD or PVD), and (11) the properties of the substrate, and (12) the combination, coherency and periodicity of multi-layers. In the lecture, the details of these factors and their effect on the strength will be explained.

• 한국결정성장학회지
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• 제25권4호
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• pp.145-152
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• 2015

rf-PECVD 방법에 의해서 $CH_4+H_2$ 혼합가스를 이용Si-웨이퍼 위에 DLC 박막을 증착할 때, 이산화탄소나 질소 등 보조가스가 증착된 박막의 결합구조와 기계적 특성에 미치는 영향을 고찰하였다. DLC 박막의 증착속도는 rf-power가 증가함에 따라서 증가하지만, 보조가스의 양이 증가함에 따라서는 감소하였다. 또한, 이산화탄소($CO_2$) 가스가 증가함에 따라 박막내 수소 함량은 감소하였으나, $sp^3/sp^2$ 결합 비는 증가하였다. 질소($N_2$) 가스가 증가하는 경우는 수소 함량은 감소하였으나, $sp^3/sp^2$ 결합비 변화에 있어 경향성은 보이지 않는 것으로 확인되었다.

• 전기화학회지
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• 제3권3호
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• pp.173-177
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• 2000

리튬 이차 전지의 성능은 부극으로 쓰이는 탄소재료의 표면의 미세 구조에 크게 의존한다. 본 연구에서는 이러한 표면 구조의 개질을 위해 유동상 화학증착법을 도입하여 금속 및 금속 산화물을 탄소재료 표면에 코팅하여 그 성능을 전기 화학적으로 평가하였다. 주석산화물을 코팅한 탄소 전극은 원래의 탄소 전극에 비해 용량의 상승을 나타내었으나 사이클이 진행됨에 따라 주석산화물이 코팅된 전지의 용량은 심각한 부피 변화에 의해 저하되어 사이클 수명이 감소되었다. 그러나, 부피 변화를 완화시켜주는 비활성 매트릭스 역할을 하는 구리를 주석 산화물 위에 코팅함으로 인해 부피 변화에 의한 용량 저하를 감소시킬 수 있었다.