The Deposition and Characterization of 10 nm Thick Teflon-like Anti-stiction Films for the Hot Embossing |
Cha Nam-Goo
(Micro Biochip Center, Hanyang University)
Kim In-Kwon (Micro Biochip Center, Hanyang University) Park Chang-Hwa (Micro Biochip Center, Hanyang University) Lim Hyung-Woo (Micro Biochip Center, Hanyang University) Park Jin-Goo (Micro Biochip Center, Hanyang University) |
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