• Title/Summary/Keyword: CVD factors

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Effects of Operating Parameters on Tetrafluoromethane Destruction by a Waterjet Gliding Arc Plasma (워터젯 글라이딩 아크 플라즈마에 의한 사불화탄소 제거에 미치는 운전변수의 영향)

  • Lee, Chae Hong;Chun, Young Nam
    • Applied Chemistry for Engineering
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    • v.22 no.1
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    • pp.31-36
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    • 2011
  • Tetrafluoromethane ($CF_4$) has been used as the plasma etching and chemical vapor deposition (CVD) gas for semiconductor manufacturing processes. However, the gas need to be removed efficiently because of their strong absorption of infrared radiation and the long atmospheric lifetime which cause global warming effects. A waterjet gliding arc plasma system in which plasma is combined with the waterjet was developed to effectively produce OH radicals, resulting in efficient destruction of $CF_4$ gas. Design factors such as electrode shape, electrode angle, gas nozzle diameter, electrode gap, and electrode length were investigated. The highest $CF_4$ destruction of 93.4% was achieved at Arc 1 electrode shape, $20^{\circ}$ electrode angle, 3 mm gas nozzle diameter, 3 mm electrode gap and 120 mm electrode length.

A Study on Contact Resistance Properties of Metal/CVD Graphene (화학기상증착법을 이용하여 합성한 그래핀과 금속의 접촉저항 특성 연구)

  • Dong Yeong Kim;Haneul Jeong;Sang Hyun Lee
    • Journal of the Microelectronics and Packaging Society
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    • v.30 no.2
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    • pp.60-64
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    • 2023
  • In this study, the electrical contact resistance characteristics between graphene and metals, which is one of important factors for the performance of graphene-based devices, were compared. High-quality graphene was synthesized by chemical vapor deposition (CVD) method, and Al, Cu, Ni, and Ti as electrode materials were deposited on the graphene surface with equal thickness of 50 nm. The contact resistances of graphene transferred to SiO2/Si substrates and metals were measured by the transfer length method (TLM), and the average contact resistances of Al, Cu, Ni, and Ti were found to be 345 Ω, 553 Ω, 110 Ω, and 174 Ω, respectively. It was found that Ni and Ti, which form chemical bonds with graphene, have relatively lower contact resistances compared to Al and Cu, which have physical adsorption properties. The results of this study on the electrical properties between graphene and metals are expected to contribute to the realization of high-performance graphene-based devices including electronics, optoelectronic devices, and sensors by forming low contact resistance with electrodes.

Wear out in electrically stressed LCVD silicon nitride films (Laser CVD silicon nitride막의 wear out)

  • Kim, Chun-Sub;Kwon, Bong-Jae;Kim, Yong-Woo;Kim, Seong-Jeen;Sung, Yung-Kwon
    • Proceedings of the KIEE Conference
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    • 1990.11a
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    • pp.115-118
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    • 1990
  • Recently, it has been reported that the Insulating films deposited by PECVD show some degradation under somewhat high electric field. In this paper, we Introduce silicon nitride films deposited by LCVD, and evaluate the breakdown and wear-out of these films by TDDB test. Further, failure times against electric field are examined and acceleration factors $\gamma$ are obtained for each case. As a result, it is shown that the breakdown and wear-out limitation for these films is improved.

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Silicon Heterojunction Solar Cell with HWCVD Passivation Layer (HWCVD 계면 보호층을 적용한 실리콘 이종접합 태양전지 연구)

  • Park, Sang-Hyun;Jeong, Dae-Young;Kim, Chan-Seok;Song, Jun-Yong;Cho, Jun-Sik;Lee, Jeong-Chul;Choe, Deok-Gyun;Yoon, Kyoung-Hoon;Song, Jin-Soo
    • 한국신재생에너지학회:학술대회논문집
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    • 2009.11a
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    • pp.346-346
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    • 2009
  • For high efficiency hetero junction solar cell over 20%, good silicon wafer passivation is one of the most important technological factor. Compared to the conventional PECVD technique, HWCVD has appeared as an promising alternative for high quality passivation layer formation. In this work, HWCVD passivation layer characteristics have been intensively investigated on wafer surface treatment, Hydrogen density in deposited thin layer and thermal effects in deposition process. Comprehensive results of the individual process factors on interface passivation has been discussed and resultant silicon hetero junction solar cell characteristics has been investigated.

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Application of Taguchi Methodology for Optimization of Parameters of CVD Influencing Formation of a Desired Optical Band Gap of Carbon Film

  • Mishra, D.K.;Bejoy, N.;Sharon, Maheshwar.
    • Carbon letters
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    • v.6 no.2
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    • pp.96-100
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    • 2005
  • Taguchi methodology has been applied to get an idea about the parameters related to the chemical vapour deposition technique, which influences the formation of semiconducting carbon thin film of a desired band gap. L9 orthogonal array was used for this purpose. The analysis based on Taguchi methodology suggests that amongst the parameters selected, the temperature of pyrolysis significantly controls the magnitude of band gap (46%). Sintering time has a small influence (30%) on the band gap formation and other factors have almost no influence on the band gap formation. Moreover this analysis suggests that lower temperature of pyrolysis (${\leq}$ $750^{\circ}C$) and lower time of sintering (${\leq}$ 1 h) should be preferred to get carbon thin film with the desired band gap of 1.2eV.

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Factors Affecting Readmission After Discharge in Stroke Patients: A Retrospective Study (뇌졸중 환자의 퇴원 후 재입원에 영향을 미치는 요인: 후향적 연구)

  • Kang, Ae Jeong;Lee, Song Hee;Kim, Rock Beum;Jeon, Mi Yang
    • Journal of Korean Biological Nursing Science
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    • v.24 no.4
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    • pp.262-271
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    • 2022
  • Purpose: The purpose of this study was to identify the factors affecting readmission in stroke patients. Methods: A retrospective study design was used. Participants were 3,675 adult cerebral stroke patients in the inpatient wards of the Department of Neurology and Neurosurgery of G University Hospital located in C city. Data were collected from January 1, 2016 to December 31, 2021 and data were analyzed using χ2 test, independent t-test, and multivariate logistic regression with SPSS/WIN 24.0. Results: After discharge for stroke, the readmission rate was 23.7%, and the mortality rate was 0.3%. The variables with significant differences between the readmission group and non-readmission group were age, type of stroke, surgery, ICU treatment, mRS score, blood pressure, diabetes, and heart disease. Factors influencing an readmission in stroke patients were Age 65-74 (OR 1.30, 95% CI=1.03-1.64), ≥ 75 (OR 1.28, 95% CI=1.02-1.62), mRS score 2points (OR 2.50, 95% CI=1.99-3.13), HTN status (OR 1.26, 95% CI=1.07-1.50), CVD status (OR 1.38, 95% CI=1.01-1.90), TC (OR 1.60, 95% CI=1.05-2.44). Conclusion: To lower the readmission rate of stroke patients, it is essential to control lifestyle, including whether or not to take treatment drugs, after diagnosing risk factors such as high blood pressure, diabetes, and heart disease, hyperlipidemia. Nursing interventions that can provide information on risk factor management and coping strategies are urgently needed as symptoms change. In addition, research is needed to develop and implement an intervention strategy that can improve the function of stroke patients as much as possible at home or in society so that they can lead an independent life without the help of others, and verify their effectiveness.

Independent beneficial effects of aged garlic extract intake with regular exercise on cardiovascular risk in postmenopausal women

  • Seo, Dae-Yun;Lee, Sung-Ryul;Kim, Hyoung-Kyu;Baek, Yeong-Ho;Kwak, Yi-Sub;Ko, Tae-Hee;Kim, Na-Ri;Rhee, Byoung-Doo;Ko, Kyoung-Soo;Park, Byung-Joo;Han, Jin
    • Nutrition Research and Practice
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    • v.6 no.3
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    • pp.226-231
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    • 2012
  • The purpose of the study was to assess the effects of a 12 weeks aged garlic extract (AGE) regimen with regular exercise on cardiovascular disease (CVD) risk in postmenopausal women. A total of 30 postmenopausal women ($54.4{\pm}5.4$ years) were randomly divided into the following four groups: Placebo (Placebo; n = 6), AGE intake (AGEI; n = 8), exercise and placebo (Ex + Placebo; n = 8), exercise and AGE (Ex + AGE; n = 8) groups. The AGE group consume 80 mg per day, and exercise groups performed moderate exercise (aerobic and resistance) three times per week. After 12 weeks of treatment, body composition, lipid profile, and CVD risk factors were analyzed. Body weight was significantly decreased in AGEI, Ex + Placebo, and Ex + AGE groups compared to baseline. Body fat % was significantly decreased in the AGEI and Ex + Placebo groups. Body mass index (BMI) was significantly decreased in the AGEI, Ex + Placebo, and Ex + AGE groups. Fat-free mass was significantly decreased in the AGEI group. Total cholesterol (TC) was significantly lower in the Ex + Placebo compared to the Placebo group. AGE supplementation or exercise effectively reduced low-density lipoprotein (LDL-C). Triglyceride (TG) was significantly increased in the AGEI group. Malondialdehyde (MDA) levels were significantly decreased in the AGEI, Ex + Placebo, and Ex + AGE compared to the placebo group. AGE supplementation reduced homocysteine levels regardless of whether the women also exercised. The present results suggest that AGE supplementation reduces cardiovascular risk factors independently of exercise in postmenopausal women.

The Relationship Between Adiposity and Risk factors for Cadiovascular Disease at Normal Body Weight Male (정상 체중인 성인 남성에서 지방과다와 심혈관질환의 위험요인간의 관련성)

  • Kwon, Woo-Sung;Kim, Jun-Su;Chae, Jin-Wook;Lee, Keun-Mi;Jung, Seung-Pil;Moon, Yong
    • Journal of Yeungnam Medical Science
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    • v.20 no.1
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    • pp.62-70
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    • 2003
  • Background: Most of all studies about the relation between the health risk and obesity are based on the European and American data. The purpose of this study is to examine the relation between adiposity and risk factors for cardiovacular disease (CVD) in normal weight individuals. Materials and Methods: Normal weight subjects with a body mass index (BMI) between 18.5 and $23kg/m^2$ (76 subjects) and overweight subjects with a BMI between 23 and $25kg/m^2$ (53 subjects) were retained for this study. Normal weight subjects were divided into three group of each adiposity variable, then three group and the overweight group were evaluated for the presence of CVD risk factors and analyze the correlation coefficients between adiposity variables and risk factors controlled for age in normal weight, overweight groups. Using logistic regression analysis, the odds ratio (OR) for the prevalence of risk factors for each group of adiposity variables and the overweight group was estimated relative to the first group in normal weight subjects. Results: Systolic BP, diastolic BP, LDL cholestrol, HDL cholesterol, triglycerides in normal weight subjects were significantly correlated with all adiposity variables (P<0.01). Third group (3.7 for %fat and 4.7 for fat mass)of adiposity variables in the normal weight group and the overweight group (6.6 for %fat and 11.5 for fat mass) tended to have higher ORs compared to first group for risk factor variables. Conclusion: Normal weight subjects with elevated adiposity had higher prevalence of risk factors than normal weights subjects with less adiposity. Measuring of adiposity added additional information of cardiovascular disease risk factors in normal weight subjects.

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Study on Role of Platelet Aggregation in Cerebrovascular Disease (뇌졸중증(腦卒中症)에 있어서 혈소판(血少板) 응집( 凝集)의 역할에 관한 연구(硏究))

  • Hong, Ki-Whan;Lee, Won-Suk
    • The Korean Journal of Pharmacology
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    • v.18 no.2
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    • pp.15-25
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    • 1982
  • It was undertake to investigate the factors involved in the micro thrombus formation in the plasma from the patients with cerebrovascular disease(CVD) and the in vitro actions of sodium nitroprusside on the platelet aggregate formation. 1) The microthrombus formation in the plasma from CVD was significantly enhanced, in comparison with that from the healthy volunteers. 2) Both lipid peroxide and cathepsin D in the plasma from CVD were higher than those levels from the healthy volunteers. 3) Whereas the platelets from healthy individuals showed less aggregation activity in response to ADP in the second phase those from CVD revealed the enhanced aggregating response to ADP. 4) When the bovine basilar artery, rabbit aorta and human umbilical artery were pretreated with $K^+-free$ PSS, ouabain, 13-hydroperoxylinoleic acid(13-HPLA) and cadmium they markedly enhanced the platelet aggregability respectively. 5) Platelet aggregation induced by $K^+-free$ PSS-treated bovine basilar artery was decreased by sodium nitroprusside in a dose-dependent manner, but not by either hydralazine. 6) Both dibutyryl cyclic AMP and 8-bromo cyclic GMP had the inhibitory action on the platelet aggregation. However, the latter had more prominent action than former. The antiaggregating effect by sodium nitroprusside was antagonized by pretreatment with methylene blue, but not by hemoglobin. These results provide the evidences for the therapeutic use of sodium nitroprusside in the emergency of cerebrovascular disease and in remains the further study of the clinical therapy with it.

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Surface Roughness Prediction of Interrupted Cutting in SM45C Using Coated Tool (초경피복공구를 이용한 기계구조용 탄소강의 단속절삭시 표면거칠기 예측)

  • Bae, Myung-Il;Rhie, Yi-Seon
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.13 no.3
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    • pp.77-82
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    • 2014
  • In this study, we carried out the interrupted cutting of carbon steel for a machine structure (SM45C) with a CVD-coated tool and conducted an ANOVA test and a confidence interval analysis to find factors influence the surface roughness and to obtain a regression equation. We found that factor which mostly affects the surface roughness during interrupted cutting was the feed rate. The cutting speed and depth of the cut only had small effect on the surface roughness. From the result of a multi-regression analysis during an interrupted cutting experiment, we obtained regression equation. Its coefficient of determination was 0.918, indicating that the regression equation was predictable. Compared to continuous cutting, if the feed rate increases, the surface roughness will also increase during interrupted cutting.