대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1990년도 추계학술대회 논문집 학회본부
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- Pages.115-118
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- 1990
Laser CVD silicon nitride막의 wear out
Wear out in electrically stressed LCVD silicon nitride films
- Kim, Chun-Sub (Dept. of Electrical Eng., Korea University) ;
- Kwon, Bong-Jae (Dept. of Electrical Eng., Korea University) ;
- Kim, Yong-Woo (Dept. of Electrical Eng., Korea University) ;
- Kim, Seong-Jeen (Dept. of Electrical Eng., Korea University) ;
- Sung, Yung-Kwon (Dept. of Electrical Eng., Korea University)
- 발행 : 1990.11.17
초록
Recently, it has been reported that the Insulating films deposited by PECVD show some degradation under somewhat high electric field. In this paper, we Introduce silicon nitride films deposited by LCVD, and evaluate the breakdown and wear-out of these films by TDDB test. Further, failure times against electric field are examined and acceleration factors
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