• Journal of the Korean Vacuum Society
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• v.14 no.4
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• pp.252-257
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• 2005

A high-brightness electron beam source for a microfocus X-ray tube has been fabricated using a carbon-nanotube (CNT) field emitter. The electron source consists of cathode that includes a CNT field emitter, a beam-extracting grid, and an anode that accelerates that electron beam. The microfocus X-ray tube requires an electron beam with the diameter of less than 5 $\mu$m and beam current of higher than 30 $\mu$A at the position of the X-ray target. To satisfy the requirements, the geometries of the field emitter tips and the electrodes of the gun was optimized by calculating the electron trajectories and beam spatial profile with EGUN code. The CNT tips were fabricated with successive steps: a tungsten wire with the diameter of 200 $\mu$m was chemically etched and was subsequently coated with CNTs by chemical vapor deposition. The experiments of electron emission at the fabricated CNT tips were performed. The design characteristics and basic experimental results of the electron source are reported.

• Proceedings of the KIEE Conference
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• 2011.07a
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• pp.1408-1409
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• 2011

Carbon nanotubes (CNTs) were grown on conical tip substrates by using various methods such as electrophoretic deposition, dip-coating, and spray. The scanning electron microscope measurement showed that the spray method ascertained the most uniform deposition of CNTs. The CNT-emitter that was fabricated by the spray method revealed the lowest turn on voltage of electron emission and the highest emission current. In addition, the spray-produced CNT emitter showed the most stable long-term emission characteristics.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.510-513
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• 2002

띠모양의 에미터와 에미터와 정렬된 띠모양의 케이트 구멍을 가진 탄소나노튜브(CNT) 삼극 구조에 대하여 전계방출 시뮬레이션을 수행하였다. 전자방출은 주로 가장자리에서 발생하였으며 에미터와 게이트사이의 간격이 가까워지면 급격히 증가하였다. 전자방출 특성도 상당히 우수하였다. 한쪽 가장자리만을 사용한 삼극구조의 경우에는 방출된 전자의 궤적이 좁은 띠모양으로 형성되어 방향성이 매우 우수하게 나타났다. 띠모양의 에미터 및 게이트로 이어진 삼극구조는 제작이 용이하고 조립할 때 정렬이 쉬운 장점이 있다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.149-149
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• 2010

The effect of titanium (Ti) coating over the surface of carbon nanotubes (CNTs) on field emission characteristics was investigated. Since the work function of CNTs emitter is about 5.0 eV, field emission would be observed at lower voltage if this work function gets lower. Work function of Ti is approximately 4.09eV. Field emission characteristics of as-grown and Ti-coated CNTs were measured in a diode-type configuration. The resultant emission characteristics revealed that thin($50{\AA}$-thick) Ti-coated CNTs could be a better electron emitter with lower emission voltage and higher emission efficiency.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.04b
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• pp.60-63
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• 2004

Recently, carbon nanotubes(CNTs) have been demonstrated to possess remarkable mechanical and electronic properties, in particular, for field emission applications. Its high aspect ratio and extremely small diameter, hollowness, together with high mechanical strength and high chemical stability, are advantages for use in field emitter. In this paper, we demonstrate electrical discharge properties from carbon nanotube cathode electrodes to use as an emitter electrode of vacuum gauges. Vertically aligned $2{\times}2mm^2$ CNT arrays on the silicon substrate were synthesized by the thermal CVD method on Fe catalytic metal, and a glass patterning by the sand blast method and the silicon/glass anodic bonding processes were applied to make samples with 2 electrodes. The field emission was examined under the vacuum range of $10^{-3}$ Torr.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.1271-1272
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• 2007

Experimental results regarding to the structural properties of carbon nanotubes (CNTs) and the field-emission characteristics of CNT-coated tungsten (W) tips are presented. CNTs are successfully grown on conical-type W-tips by inductively coupled plasma-chemical vapor deposition (ICP-CVD) with or without inserting a TiN-buffer layer prior to the formation of Ni catalysts. For all the CNTs grown, their nanostructures, morphologies, and crystalline structures are analyzed by FESEM, HRTEM, and Raman spectroscopy. Furthermore, the emission properties of CNT-based field-emitters are characterized to estimate the maximum current density and the threshold voltage. The results obtained in this study indicate that the emission current level of the CNT-emitter without using a TiN buffer is desirable for the application of micro-focused x-ray systems.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.05a
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• pp.32.2-32.2
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• 2009

높은 효율성을 가지는 전계방출 디스플레이(field emission displays)를 개발하기 위해 탄소나노튜브 음극소자 (CNT cathodes)의 표면처리에 대한 연구가 활발히 진행되고 있다. 열처리가 끝난 탄소나노튜브 음극소자(CNT cathodes)의 표면에는 유기성 바인더들이 타면서 잔여물들이 생성되게 되는데 이러한 잔여물들은 전계방출을 하는데 있어서 방해요소가 된다. 전계방출이 용이하게 하기 위해서는 이러한 잔여물들을 효과적으로 제거해 주어야한다. 표면처리의 방법으로는 여러 가지가 존재하는데 그중에서 테이핑 방법을 이용한 표면처리는 열처리 후에 남은 잔여물들을 제거하면서 CNTs를 돌출시키는 효율적인 방법이다. 하지만 이러한 테이핑 방법으로도 완벽하게 잔여물을 제거하기란 쉽지 않다. 본 연구는 첫 번째 열처리가 끝난 시편을 테이핑 방법을 이용하여 표면 처리를 실시하고 그것으로 끝나는 것이 아니라 표면처리가 끝난 시편에 두 번째 열처리를 실시하여 탄소나노튜브 음극소자(CNT cathodes)에 남아있는 잔여물들을 좀 더 효과적으로 제거해 주는데 그 목적이 있다. 재열처리시 온도는 $330^{\circ}C$ ~ $420^{\circ}C$까지 $30^{\circ}C$의 차이를 주어 4단계에 걸쳐 실험을 실시하였고 재열저리를 하기전과 재열처리를 실행한 후의 전류밀도의 차이를 관찰하여 효과적으로 잔여물들이 제거되었는지에 대해서 알아보았다. 재열처리를 실행하였을 때 재열처리를 하기 전에 비하여 전류밀도에서 우월하였으며 $360^{\circ}C$ 부근에서 가장 많은 차이를 보였다.

• Korean Journal of Materials Research
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• v.17 no.3
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• pp.173-178
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• 2007

Carbon nanotube cathodes(CNT cathodes) with a trench structure similar to gated structure of triode-type cathode were fabricated by a screen printing method using multi-walled carbon nanotubes. The effects of surface treatments on CNT cathodes were investigated for high efficiency field emission displays(FEDs). A liquid method easily removed the organic residue and protruded the CNTs. Field emission properties were measured by using a diode-type mode. The liquid method produced a turn-on field of $1.4V/{\mu}m$. The emission current density was measured about $3.1mA/cm^{2}$ at the electric field of $3V/{\mu}m$. The liquid method showed a high potential applicable to the surface treatment for triode-type FEDs.

• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.456-458
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• 2004

We proposed a novel triode-type carbon nanotube field emitter arrays in which extracted gate is surrounded by CNT emitters. We carried out 3-dimensional numerical calculations of electrostatic potential for the proposed CNT-FEAs using the finite element method and compared the results with those obtained from the structure of conventional CNT-FEAs. It was found that the proposed structure could reduce the turn-on voltage for electron emission and improve beam focusing.

• Korean Journal of Materials Research
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• v.14 no.8
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• pp.542-546
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• 2004

We report a new fabrication process for high performance triode type CNT field emitters and their superior electrical properties. The CNT-based triode-type field emitter structure was fabricated by the conventional semiconductor processes. The keys of the fabrication process are spin-on-glass coating and trim-and-leveling of the carbon nanotubes grown in trench structures by employing a chemical mechanical polishing process. They lead to strong adhesion and a uniform distance from the carbon nanotube tips to the electrode. The measured emission property of the arrays showed a remarkably uniform and high current density. The gate leakage current could be remarkably reduced by coating of thin $SiO_{2}$ insulating layer over the gate metal. The field enhancement factor(${\beta}$) and emission area(${\alpha}$) were calculated from the F-N plot. This process can be applicable to fabrication of high power CNT vacuum transistors with good electrical performance.