• 제목/요약/키워드: CHF

검색결과 310건 처리시간 0.028초

HBr/Ar/CHF3 혼합가스를 이용한 ZnO 박막의 유도결합 플라즈마 식각 (Etching Characteristics of ZnO Thin Films Using Inductively Coupled Plasma of HBr/Ar/CHF3 Gas Mixtures)

  • 김문근;함용현;권광호;이현우
    • 한국전기전자재료학회논문지
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    • 제23권12호
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    • pp.915-918
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    • 2010
  • In this work, the etching characteristics of ZnO thin films were investigated using an inductively coupled plasma(ICP) of HBr/Ar/$CHF_3$ gas mixtures. The plasma characteristics were analyzed by a quadrupole mass spectrometer (QMS) and double langmuir probe (DLP). The surface reaction of the ZnO thin films was investigated using X-ray photoelectron spectroscopy (XPS). The etch rate of ZnO was measured as a function of the $CHF_3$ mixing ratio in the range of 0-15% in an HBr:Ar=5:2 plasma at a fixed gas pressure (6mTorr), input power (700 W), bias power (200 W) and total gas flow rate(50sccm). The etch rate of the ZnO films decreased with increasing $CHF_3$ fraction due to the etch-blocking polymer layer formation.

평판형 히터를 이용한 알루미늄과 타이타늄 산화물 나노유체의 풀비등 임계열유속에 관한 실험적 연구 (Experimental Investigation on the Pool Boiling Critical Heat Flux of Water-Based Alumina and Titania Nanofluids on a Flat Plate Heater)

  • 안호선;김형대;조항진;강순호;김무환
    • 대한기계학회논문집B
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    • 제33권10호
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    • pp.729-736
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    • 2009
  • Pool boiling heat transfer and critical heat flux (CHF) of water-based nanofluids with alumina and titania nanoparticles of 0.01% by volume were investigated on a disk heater at saturated and atmospheric conditions. The experimental results showed that the boiling in nanofluids caused the considerable increase in CHF on the flat surface heater. It was revealed by visualization of the heater surface subsequent to the boiling experiments that a major amount of nanoparticles deposited on the surface during the boiling process. Pool boiling of pure water on the surface modified by such nanoparticle deposition resulted in the same CHF increases as what boiling nanofluids, thus suggesting the CHF enhancement in nanofluids was an effect of the surface modification through the nanoparticle deposition during nanofluid boiling. Possible reasons for CHF enhancement in pool boiling of nanofluids are discussed with surface property changes caused by the nanoparticle deposition.

Si(100) 기판위에 성장된 3C-SiC의 RIE 특성 (Reactive ion Etching Characteristics of 3C-SiC Grown on Si(100) Wafers)

  • 정수용;우형순;진동우;정귀상
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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    • pp.892-895
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    • 2003
  • This paper describes on RIE(Reactive Ion Etching) characteristics of 3C-SiC(Silicon Carbide) grown on Si(100) wafers. During RIE of 3C-SiC films in this work, $CHF_3$ gas is used to form of polymer as a side wall for excellent anisotropy etching. From this process, etch rates are obtained a $60{\sim}980{\AA}/min$ by various conditions such as $CHF_3$ gas flux, $O_2$ addition ratio, RF power and electrode distance. Also, approximately $40^{\circ}$ mesa structures are successfully formed at 100 mTorr $CHF_3$ gas flow ratio, 200 W RF power and 30 mm electrode distance. Moreover, vertical side wall is fabricated by anisotropy etching with 50% $O_2$ addition ratio and 25 mm electrode distance. Therefore, RIE of 3C-SiC films using $CHF_3$ could be applicable as fabrication process technology for high-temperature 3C-SiC MEMS applications.

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수직 원형관에서 서브쿨비등시 매우 높은 임계열유속의 예측 (Prediction of Very High Critical Heat Flux for Subcooled Flow Boiling in a Vertical Round Tube)

  • 권영민;한도희
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2001년도 추계학술대회논문집B
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    • pp.288-293
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    • 2001
  • A critical heat flux (CHF) prediction method using an artificial neural network (ANN) was evaluated for application to the high-heat-flux (HHF) subcooled flow boiling. The developed ANN predictions were compared with the experimental database consisting of a total of 3069 CHF data points. Also, the prediction performance by the ANN was compared with those by mechanistic models and a look up table technique. The parameter ranges of the experimental data are: $0.33{\leq}D{\leq}37.5mm$, $0.002{\leq}L{\leq}4m$, $0.37{\leq}G{\leq}134Mg/m^2s$, $0.1{\leq}P{\leq}20MPa$, $50\leq{\Delta}h_{sub,in}\leq1660kJ/kg$, and $1.1{\leq}q_{CHF}\leq276MW/m^2$. $276MW/m^2$. It was found that 91.5% of the total data points were predicted within $a{\pm}20%$ error band, which showed the best prediction performance among the existing CHF prediction methods considered.

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임계열유속 향상을 위한 나노물질의 산화처리에 대한 연구 (Study on the Oxidation Treatment of Nanoparticles for the Critical Heat Flux)

  • 김우중;전용한;김남진
    • 한국태양에너지학회 논문집
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    • 제37권6호
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    • pp.39-49
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    • 2017
  • Pool boiling, one of the key thermal-hydraulics phenomena, has been widely studied for improving heat transfer efficiencies and safety of nuclear power plants, refrigerating systems, solar-collector heat pipes, and other facilities and equipments. In the present study, the critical heat flux (CHF) and heat-transfer coefficients were tested under the pool-boiling state using graphene M-5 and M-15 nanofluids as well as oxidized graphene M-5 nanofluid. The results showed that the highest CHF increase for both graphene M-5 and M-15 was at the 0.01% volume fraction and, moreover, that the CHF-increase ratio for small-diameter graphene M-5 was higher than that for large-diameter graphene M-15. Also at the 0.01% volume fraction, the oxidized graphene M-5 nanofluid showed a 41.82%-higher CHF-increase ratio and a 26.7%-higher heat-transfer coefficient relative to the same nanofluid without oxidation treatment at the excess temperature where the CHF of distilled water occurs.

나노 코팅을 이용한 열전달 향상에 대한 연구 (Heat Transfer Enhancement using Nano Particles coated Surface)

  • 강명보;김우중;김남진
    • 한국지열·수열에너지학회논문집
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    • 제14권2호
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    • pp.8-14
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    • 2018
  • A boiling heat transfer is used in various industry such as power generation systems, heat exchangers, air-conditioning and refrigerations. In the boiling heat transfer system, the critical heat flux (CHF) is the important factor, and it indicated safety of the system. It has kept up studies on the CHF enhancement. Recently, it is reported the CHF enhancement, when working fluid used the nanofluid with excellent thermal properties. Therefore, in this study, we investigated the influence of nano particles coated surface for heat transfer enhancement in pure water, oxidized multi-wall carbon nanotube nanofluid (OMWCNT), and oxidized graphene nanofluid (OGraphene). Nanoparticles were coated for 120 sec on the surface, and we measured the CHF at the flow velocities of 0.5, 1.0, and 1.5 m/sec, respectively. As the results, both of the OMWCNT and OGraphene nanofluids increased up to about 34.0 and 40.0%.

19F NMR Investigation of F1-ATPase of Escherichia coli Using Fluorinated Ligands

  • Jung, Seun-Ho;Kim, Hyun-Won
    • BMB Reports
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    • 제31권1호
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    • pp.44-47
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    • 1998
  • Asymmetry amongst nucleotide binding sites of Escherichia coli $F_1$-ATPase was examined using $^{19}F$ NMR signal from fluorinated analogs of adenine nucleotides bound to nucleotide binding sites. ADP-$CF_2-{PO_3}^{2-}$ showed no inhibitory effect to $F_1$-ATPase. But ADP-CHF-${PO_3}^{2-}$ (racemic mixture) showed competitive inhibition of $F_1$-ATPase with $K_i$ of $60\;{\mu}m$. ADP-CHF-${PO_3}^{2-}$ shows only negligible binding to $EF_1$ in the absence of $Mg^2+$. With the addition of $Mg^2+$ to the medium, the $^{19}F$ resonance of free ADP-CHF-${PO_3}^{2-}$ disappeared and the new broad resonances appeared. Appearance of more than two new asymmetric resonances following the binding of ADP-CHF-${PO_3}^{2-}$ to $EF_1$ may indicate that at least one of the isomers showed split resonances. This may suggest that the region between ${\alpha}$-and ${\beta}$-phosphate of ADP-CHF-${PO_3}^{2-}$ which is bound to catalytic sites is experiencing a different environment at different sites.

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임계압력 근처에서의 환형관 채널에 대한 열전달 특성 연구 (Heat Transfer Characteristics of an Annulus Channel Cooled with R-134a Fluid near the Critical Pressure)

  • 홍성덕;천세영;김세윤;백원필
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2004년도 춘계학술대회
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    • pp.2094-2099
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    • 2004
  • An experimental study on heat transfer characteristics near the critical pressure has been performed with an internally-heated vertical annular channel cooled by R-134a fluid. Two series of tests have been completed: (a) steady-state critical heat flux (CHF) and (b) heat transfer tests for pressure reduction transients through the critical pressure. In the present experimental range, the steady-state CHF decreases with the increase of the system pressure For a fixed inlet mass flux and subcooling, the CHF falls sharply at about 3.8 MPa and shows a trend toward converging to zero as the pressure approaches the critical point of 4.059 MPa. The CHF phenomenon near the critical pressure does not lead to an abrupt temperature rise of the heated wall because the CHF occurred at remarkably low power levels. In the pressure reduction transient experiments, as soon as the pressure passed through the critical pressure, the wall temperatures rise rapidly up to a very high value due to the occurrence of the departure from nucleate boiling. The wall temperature reaches a maximum at the saturation point of the outlet temperature, then tends to decrease gradually.

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Heat Transfer Characteristics of an Internally-Heated Annulus Cooled with R-134a Near the Critical Pressure

  • Hong, Sung-Deok;Chun, Se-Young;Kim, Se-Yun;Baek, Won-Pil
    • Nuclear Engineering and Technology
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    • 제36권5호
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    • pp.403-414
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    • 2004
  • An experimental study of heat transfer characteristics near the critical pressure has been performed with an internally-heated vertical annular channel cooled by R-134a fluid. Two series of tests have been completed: (a) steady-state critical heat flux (CHF) tests, and (b) heat transfer tests for pressure reduction transients through the critical pressure. In the present experimental range, the steady-state CHF decreases with increase of the system pressure for fixed inlet mass flux and subcooling. The CHF falls sharply at about 3.8 MPa and shows a trend towards converging to zero as the pressure approaches the critical point of 4.059 MPa. The CHF phenomenon near the critical pressure does not lead to an abrupt temperature rise of the heated wall, because the CHF occurs at remarkably low power levels. In the pressure reduction transients, as soon as the pressure passes below the critical pressure from the supercritical pressure, the wall temperatures rise rapidly up to very high values due to the departure from nucleate boiling. The wall temperature reaches a maximum at the saturation point of the outlet temperature, and then tends to decrease gradually.