• Title/Summary/Keyword: CF11

Search Result 282, Processing Time 0.025 seconds

$C_2F_6$/$CHF_3$ 반응성이온 건식식각 공정시 실리콘 표면에 생성된 잔류막과 표면구조의 연구

  • Yun, Seon-Jin;Jang, Sang-Hwan;Gwon, O-Jun
    • ETRI Journal
    • /
    • v.11 no.1
    • /
    • pp.89-96
    • /
    • 1989
  • $C_2F_6$/$CHF_6$ 플라즈마를 이용한 실리콘 산화막의 반응성이온 식각공정시 실리콘 표면에 형성되는 고분자 잔류막과 근표면 손상영역을 X-선 광전자분광법(x-ray photoelectron spectroscopy)과 러더포드 후방산란법(Rutherford backscattering)을 이용하여 연구하였다. 표면 잔류막은 CF, $CF_2$, $CF_3$, $C-CF_x$, 그리고 C-C/C-H 등의 결합을 가진 불화탄소 고분자로 구성되어 있으며, 또한 C 1s와 Si 2p X-선 광선자 스펙트럼으로부터 C-Si 결합이 존재함을 확인하였다. 반응성이온 식각을 거친 실리콘 표면 구조의 연구결과, 불소와 탄소로 구성된 고분자막($<20 \AA$)이 극표면에 존재하며, 식각 후 공기중에 노출됨에 따라 고분자 잔류층으로 산소가 통과하여 기판을 산화시킴으로써 실리콘 산화막( $~10\AA$)이 그 아래에 형성되었음을 알았다. 그리고 실리콘산화막 아래에 탄소-산소 결합영역이 관찰되었다. 플라즈마 가스의 조성에서 $CHF_3$의 량이 증가함에 따라 고분자 잔류막의 두께가 증가하였으며, 본 연구의 실험조건에서 2분간 overetching한 시편의 경우에도 실리콘 표면 영역의 손상정도가 매우 적음을 발견하였다.

  • PDF

A Study on the Cleaning Characteristics according to the process gas of Low-Pressure Plasma (저압 플라즈마 세정가스에 따른 세정특성 연구)

  • Koo, H.J.;Ko, K.J.;Chung, C.K.
    • Clean Technology
    • /
    • v.7 no.3
    • /
    • pp.203-214
    • /
    • 2001
  • A silicon oxide cleaning characteristic and its mechanism were studied in RF plasma cleaning system with various gases such as $CHF_3$, $CF_4$, Argon, oxygen and mixing gas. The experimental parameters - working pressure (100 mTorr), RF power (300 W, 500 W), electrode distance (5cm, 8cm, 11.5cm), cleaning time (90, 180 seconds), gas flow (50 sccm) were fixed to compare cleaning efficiency by gas types. The results were as follows. First, the argon plasma is retaining only physical sputtering effect and etch rate was low. Second, the oxygen plasma showed good cleaning efficiency in electrode distace of 5cm, 300W, 180secs, but surface roughness increased. Third, $CF_4$ Plasma could get the best cleaning efficiency. Fourth, $CHF_3$ plasma could know that addition gas that can lower the CFx/F ratio need. We could not get good cleaning efficiency in case of added argon to $CHF_3$. But, we could get good cleaning efficiency in case added oxygen.

  • PDF

The Development Study of A Manganese Sulphate Bath System ($MnSO_4$용액조 장치 개발 연구)

  • Hwang, Sun-Tae;Lee, Kyung-Ju;Choi, Kil-Oung;Kim, Won-Sik
    • Journal of Radiation Protection and Research
    • /
    • v.11 no.1
    • /
    • pp.70-76
    • /
    • 1986
  • In order to establish the national standards of neutron measurements, a manganese sulphate ($MnSO_4$) bath system was developed under the IAEA technical support. This bath system was made up of a spherical s.s. 316 L bath, of 3.5 mm thick and of 125 cm internal diagmeter, filled with a manganese sulphate solution, a solution circulating system, and a $^5Mn\;{\gamma}-ray$ monitoring system. The solution pumped from the bath was introduced into a Marinelli beaker-type monitor vessel which was equipped with two seperate detectors, $3.8cm{\phi}{\times}3.8cm$ NaI(T1) crystals. The performance of the system were tested using the neutron sources, $^{241}Am-Be\;and\;^{252}Cf$, mounted at the center of the bath. From the decay curve analysis of $^{56}Mn$ activity, neutron emission rate of $^{252}Cf$ by the comparative method was obtained to be $3.71{\times}10^7\;n/s\;per\;50{mu}g$ as of November 15, 1985.

  • PDF

Intelligent Navigation Information Fusion Using Fuzzy Expert System (퍼지 전문가 시스템을 이용한 지능형 항행 정보 융합)

  • Kim, Do-Yeon;Yi, Mi-Ra
    • Journal of the Korea Society of Computer and Information
    • /
    • v.15 no.11
    • /
    • pp.47-56
    • /
    • 2010
  • In navigation, officers receive data about inside and outside of ship from several devices(ex, GPS / AIS / ECDIS / ARPA Radar / etc) in bridge, and use it to recognize and predict safety situations. However, observation work of a officer is still hard for a torrent of data from several devices, and the problem of inconsistent data among the devices. In previous research, we presented the conceptual model of Intelligent Navigation Safety Information System based on information fusion, and showed the example of the conceptual model using CF (Certainty Factor) expert system to solve this problem. The information fusion technology needs various reasoning skills, and CF expert system is not enough to express ambiguous or indefinite factors. In this paper, we propose the concept of an intelligent navigation information fusion using fuzzy expert system to describe the ambiguous factors, and show the validity of applying fuzzy expert system to the Navigation Safety Information System through the design and implementation of the proposed concept.

A Study on the Fluorination of Pentachloroethane (Pentachloroethane의 불소화 반응에 관한 연구)

  • Park, Kun-You;Kwon, Young-Soo;Kim, Hoon-Sik;Lee, Sang-Deuk;Lee, Byung-Gwon
    • Applied Chemistry for Engineering
    • /
    • v.4 no.2
    • /
    • pp.318-323
    • /
    • 1993
  • Pentachloroethane($CHCl_2CCl_3$) was synthesized and reacted with hydrogen fluoride using antimony pentahalide catalyst($SbCl_xF_y$) in order to manufacture HCFC-123$(CF_3CHCl_2)$, a potential CFC-11$(CFCl_3$) substitute candidate. Products analyses showed the fluorination proceeds through fluorine-chlorine exchanges between $HF/SbCl_xF_y$ and $SbCl_xF_y/CCl_3CHCl_2$ respectively. The degree of fluorination of $CCl_3$ group in pentachloroethane was greatly affected on the reaction temperature, but the effect of catalyst concentration was relatively small. Mechanistic study was also performed to elucidate the pathway to the formation of side-products such as $CCl_3CFCl_2$, $CFCl_2CFCl_2$ and $CF_2ClCFCl_2$.

  • PDF

Studies on enterotoxigenic Escherchia coli isolated from piglets with diarrhea (설사 자돈에서 분리된 병원성 대장균에 관한 연구)

  • 김광재;윤교복;최봉출;신은경;김종술;박양주;이유섭
    • Korean Journal of Veterinary Service
    • /
    • v.20 no.4
    • /
    • pp.359-370
    • /
    • 1997
  • This study was carried out to Investigate the biochemical characteristics, antibiotic susceptibility, serogroups and pili producibility test of enterotoxigenic Escherichia coli(ETEC) isolated from piglets with diarrhea in Kangwon province from March to October 1996. 1. Sixty eight E coli strains were isolated from 72 piglets with diarrhea and the biochemical and cultural reaction were compared with the classification criteria of Edwards and Ewing. 2. The serogroups of 26 isolates were classified as 08 : K87 6(8.8%), O20 : K1O1 4(5.9%), O141 : K85 4(5.9%), 09 : K103 : P987 3(4.4%), O45 : K 2(2.9%) 0139 : K82 2(2.9%), O64 : $K^{-}$2(2.9%), O149 : K91 1(1.5%), O157 : K88ac 1(1.5%) and O115 : $K^{-}$1(1.5%), respectively. 3. In antibiotic susceptibility test, the isolates showed high susceptible to Ak, Eno, Na, Gm, Am and Km, whereas resistance to Tc, Sm and Cf. 4. Sixty one strains(89.7%) of 68 I coli Isolates were resistant to one or more drugs. The isolates resistant to 2 and 3 or more drugs were 60.3% and 19.1%, respectively. Amog the 16 multiple resistant patterns, Sm Tc(11.5% ), Cf Sm Tc(11.5% ), Cf Cp Sm Su Tc(9.8% ) and Cf Cp Sm Su Tc(8.2%) patterns were frequently observed. 5. MRHA of guinea pig erythrocytes was detected in 9 out of 26 OK serotype and 9 out of 42 unidentified serotypes. MRHA titers of serotypes showed from 16 to 32 in O141 : K85 and no titers in O139 : K82. 6. By the GM1 ganglioside ELISA, $\beta$-, $\alpha$-, and $\gamma$-hemolysin producing strains was detected as 36, 6, and 5 from heat labile enterotoxin(LT) of 47 ETEC, respectively. The distribution of LT toxin from 112 isolates was showed $\beta$- hemolysin, 2 isolates $\alpha$-hemolysin and 3 isolates $\gamma$-hemol-ysin from 26 OK serotypes.

  • PDF

Copolymerization and Characteristics of Styrene and Fluorine-Containing Acrylate (스티렌과 불소함유 아크릴레이트의 공중합 및 공중합체의 특성)

  • 김상신;이상원;허정림;허완수
    • Polymer(Korea)
    • /
    • v.26 no.1
    • /
    • pp.9-17
    • /
    • 2002
  • The free radical bulk copolymerizations of perfluoroalkylethyl acrylate(FA) containing perfluoro group ($CF_3(CF_2)_nCH_2CH_2$-; n=5, 7, 9, 11) with styrene were conducted at $60^{\circ}C$ using AIBN as an initiator. Reactivity ratios($r_1$, $r_2$) were determined from monomer feed compositions and the NMR spectroscopically measured copolymer compositions using Kelen-Tudos method. The structures of copolymers were characterized with FT-IR and $^1H-NMR$ analysis. Their thermal properties investigated with DSC and TGA were decreased with increasing the content of fluorinated acrylate in the copolymer. Their surface free energies were calculated with measuring contact angles of the copolymers and PMMA blends with a small amount of them.

The effects of Hemistepta lyrata Bunge (Bunge) fractionated extract on liver X receptor α-dependent lipogenic genes in hepatocyte-derived cells (간 실질세포주에서 니호채(泥胡菜) 분획물이 liver X receptor α 의존적 지방 생성 유전자의 발현에 미치는 효과)

  • Kim, Jae Kwang;Cho, Il Je;Kim, Eun Ok;Jung, Dae Hwa;Ku, Sae Kwang;Kim, Sang Chan
    • Herbal Formula Science
    • /
    • v.28 no.3
    • /
    • pp.255-269
    • /
    • 2020
  • Objectives : Hemistepta lyrata Bunge (Bunge) is a wild herb that has been used for managing fever and wound in Korean Traditional Medicine. The present study explored the effects of H. lyrata extract on liver X receptor (LXR) α-dependent lipogenic genes in hepatocyte-derived cells. Methods : After HepG2 cells or Huh7 cells were pre-treated with 1-10 ㎍/mL of H. lyrata extract or its fractionated extract for 0.5 h, the cells were subsequently exposed to LXR ligand for 6-24 h. Cell viability, LXR response element (LXRE)-driven luciferase activity, sterol regulatory element binding protein-response element (SREBP-RE)-driven luciferase activity, SREBP-1c expression, and mRNA levels of LXRα and its-dependent target genes were determined. In addition, LC-MS/MS analysis was conducted to explore major compounds in H. lyrata-chloroform fractionated extract #4 (HL-CF4). Results : Of various H. lyrata extracts tested, chloroform extract and its fractionated extract #4, HL-CF4, significantly decreased T0901317-mediated SREBP-1c expression. In addition, HL-CF4 significantly reduced LXRE atransactivation and LXRα mRNA expression without any cytotoxicity. Moreover, HL-CF4 prevented the SREBP-RE-driven luciferase activity and mRNA levels of fatty acid synthase and stearoyl-CoA desaturase-1 induced by T0901317. Results from LC-MS/MS analysis at positive/negative mode indicated that HL-CF4 contained several compounds showing m/z 197.1176 (C11H17O3), 693.2913/227.1069 (C38H45O12/C15H15O2), 203.1797 (C15H23), 181.1225 (C11H17O2), 591.2957 (C35H43O8), 379.1040 (C18H19O9), 409.1509 (C20H25O9), 309.1348 (C16H21O6), 391.1404 (C20H23O8), and 669.2924/389.1248 (C36H45O12/C20H21O8). Conclusion : Based on its inhibition of the LXRα-dependent signaling pathway, H. lyrata chloroform extract and HL-CF4 have prophylactic potentials for managing non-alcoholic fatty liver.

Orthodontics of mutilated molars (망가진 어금니의 교정(V))

  • Park, Ui-Ung
    • The Journal of the Korean dental association
    • /
    • v.37 no.11 s.366
    • /
    • pp.818-822
    • /
    • 1999
  • 지난 호까지 4회에 걸쳐 두부계측 분석으로 악안면 골격구조(skeletal pattern)를 이해하기 위하여 모교정의 진단법인 ODI/APDI/CF에 관하여 소개를 하였습니다. 이번 호에는 이틀(denture pattern)에 관하여 설명하겠습니다.

  • PDF

Drug susceptibility of bacteria and M pachydermatis isolated from canine external ear canals (개 외이도에서 분리한 세균 및 M pachydermatis의 약제감수성에 대하여)

  • Kim, Ki-hyang;Choi, Won-phil;Yeo, Sang-geon
    • Korean Journal of Veterinary Research
    • /
    • v.39 no.3
    • /
    • pp.560-565
    • /
    • 1999
  • The present work was conducted to investigate the drug susceptibility of microorganisms isolated from canine external ear canals. Antifungal susceptibility test of M pachydermatis (17 strains) was perfomed by agar dilution method, using 11 antifungal drugs including amphotericin B(A), nystatin(N), pimaricin(P), griseofulvin(G), bifonazole(B), clotrimazole(C), miconazole(M), econazole(E), ketoconazole(K), tolnaftate(T), 5-fluorocytosine(F). All isolates were highly sensitive to K, M, T(geometric mean MIC ; GM $MIC{\leq}0.16{\mu}g/ml$) but they weren't sensitive to P, F and G(GM $MIC{\geq}92.37{\mu}g/ml{\sim}{\geq}128{\mu}g/ml$). Antibacterial susceptibility test against 119 isolates of bacteria was performed by agar dilution method, using 9 antibacterial drugs including erythromycin(ET), chloramphenicol(CP), gentamycin(G), vancomycin(V), ampicillin(AP), amoxacillin(AX), chlortetracycline(CT), ciprofloxacin(CF), enrofloxacin(EF). All isolates of Staphylococcus spp(101 strains) were highly sensitive to EF, CF, G(GM MIC $0.33{\sim}1.47{\mu}g/ml$). In other gram positive cocci(4 strains), they were highly sensitive to EF, CF, V(GM MIC $1{\sim}4.76{\mu}g/ml$) and CT(GM MIC 1 UFL unit/ml). In gram positive rods(13 strains), they were highly sensitive to EF, CF, G(GM $MIC{\leq}0.19{\sim}1{\mu}g/ml$). In Pseudomonas aeruginosa(1 strain), it was highly sensitive to AX, EF, ET, CF(GM MIC $0.06{\sim}1{\mu}g/ml$) and CT(GM MIC 1 UFL unit/ml). All isolates weren't sensitive to AP(GM MIC 16~>$32{\mu}g/ml$).

  • PDF