• Journal of Sensor Science and Technology
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• v.12 no.6
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• pp.265-272
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• 2003

This paper describes anodic bonding characteristics of MLCA (Multi Layer Ceramic Actuator) to Si-wafer using evaporated Pyrex #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with same properties were deposited on MLCA under optimum RF magneto conditions(Ar 100%, input power $1\;W/cm^2$). After annealing in $450^{\circ}C$ for 1 hr, the anodic bonding of MLCA and Si-wafer was successfully performed at 600 V, $400^{\circ}C$ in - 760 mmHg. Then, the MLCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity is 0.05-0.08 %FS. Moreover, any damages or separation of MLCA/Si bonded interfaces do not occur during actuation test. Therefore, it is expected that anodic bonding technology of MLCA/Si wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

• The Journal of the Korea institute of electronic communication sciences
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• v.14 no.2
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• pp.439-446
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• 2019

In this paper, we propose a encryption method using C-MLCA and 1D CAT to secure medical image for efficiently. First, we generate a state transition matrix using a Wolfram rule and create a sequence of maximum length. By operating the complemented vector, it converts an existing sequence to a more complex sequence. Then, we multiply the two sequences by rows and columns to generate C-MLCA basis images of the original image size and go through a XOR operation. Finally, we will get the encrypted image to operate the 1D CAT basis function created by setting the gateway values and the image which is calculated by transform coefficients. By comparing the encrypted image with the original image, we evaluate to analyze the histogram and PSNR. Also, by analyzing NPCR and key space, we confirmed that the proposed encryption method has a high level of stability and security.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07a
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• pp.160-163
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• 2003

This paper describes on anodic bonding characteristics of MLCA(Multi Layer Ceramic Actuator) to Si-wafer using evaporated Pyrex #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with same properties were deposited on MLCA under optimum RF magneto conditions(Ar 100 %, input power $1\;/cm^2$). After annealing in $450^{\circ}C$ for 1 hr, the anodic bonding of MLCA to Si-wafer was successfully performed at 600 V, $400^{\circ}C$ in - 760 mmHg. Then, the MLCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity is 0.05-008 %FS. Moreover, any damages or separation of MICA/Si bonded interfaces do not occur during actuation test. Therefore, it is expected that anodic bonding technology of MICA/Si wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

• The Journal of the Korea institute of electronic communication sciences
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• v.14 no.6
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• pp.1187-1196
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• 2019

Information security has become a major challenge with the advent of cloud and social networking sites. Conventional encryption algorithms might not be suitable for image encryption because of the large data size and high redundancy among the raw pixels of a digital image. In this paper, we generalize the encryption method for of color image proposed by Jeong et al. to color image encryption using parametric 3-dimensional chaotic cat map using Laplace expansion and C-MLCA. Through rigorous experiments, we demonstrate that the proposed new image encryption system provides high security and reliability.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.36 no.6C
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• pp.361-367
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• 2011

In this paper, we propose encryption method to using complemented MLCA(Maximum Length Cellular Automata) based on NBCA(Null Boundary CA) and 2D CAT (Two-Dimensional Cellular Automata Transform) for efficient image encryption. The encryption method is processed in the following order. First, a transition matrix T is created using the Wolfram Rule matrix. Then, the transition matrix T is multiplied to the original image that is intended to be encrypted, which transfers the pixel values of the original image. Furthermore, the converted original image goes through a XOR operation with complemented vector F to convert into a complemented MLCA applied image. Then, the gateway value is set and 2D CAT basis function is created. Also, the 2D CAT is encrypted by multiplying the created basis function to the complemented MLCA applied image. Lastly, the stability analysis verifies that proposed method holds a high encryption quality status.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.12a
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• pp.105-108
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• 2003

본 논문은 파이렉스 #7740 유리박막을 이용한 MEMS용 MLCA와 Si기판의 양극접합 특성에 관한 것이다. 최적의 RF 마그네트론 스퍼터링 조건(Ar 100 %, input power $1W/\textrm{cm}^2$)하에서 MLCA 기판위에 파이렉스 #7740 유리의 특성을 갖는 박막을 증착한 후 600 V, $400^{\circ}C$에서 1시간동안 양극접합했다. 그 다음에 Si 다이어프램을 제조한 후, MLCA/Si 접합계면과 MLCA 구동을 통한 Si 다이어프램 변위특성을 분석 및 평가하였다. 다이어프램 형상에 따라 정밀한 변위 제어가 가능했으며 0.05-0.08 %FS의 우수한 선형성을 나타내었다. 또한, 측정동안 접합계면 균열이나 계면분리가 일어나지 않았다. 따라서, MLCA/Si기판 양극접합기술은 고성능 압전 MEMS 소자 제작공정에 유용하게 사용가능할 것이다.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.17 no.1
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• pp.13-18
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• 2017

With the advancement of internet technology, the importance of data protection is gaining more attention. As a possible data protection solution, we propose a novel video encryption method using complemented maximum-length cellular automata (C-MLCA). The first step for encryption is to use 90/150 CA rule to generate a transition matrix T of a C-MLCA state followed by a 2D C-MLCA basis image. Then, we divide the video into multiple frames. Once, we perform exclusive-OR operation with the split frames and the 2D basis image, the final encrypted video can be obtained. By altering values of pixel, the fundamental information in visualizing image data, the proposed method provides improved security. Moreover, we carry out some computational experiments to further evaluate our method where the results confirm its feasibility.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.12
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• pp.1034-1038
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• 2007

In order to develop the composition ceramics capable of being sintered at low temperature with high piezoelectric properties for multilayer piezoelectric actuator application, PZW-PMN-PZT system ceramics were manufactured according to sintering aid $Li_2CO_3$ addition and their microstructural, dielectric and piezoelectric properties were investigated. The crystal structure of the specimens showed a perovskite phase and no pyrochlore or other second phase was detected. At the sintering temperature of $900\;^{\circ}C,\;0.2\;wt%Li_2CO_3$ added specimen showed a optimum values of kp = 0.562, $d_{33}\;=\;360\;pC/N$ and Qm = 1184, respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.331-332
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• 2006

Ag-ceramic composite materials were investigated as internal electrodes for multilayer ceramic actuators (MLCA). Ag-ceramic pastes were prepared by adding PZT-based ceramic powders to a Ag patse in a range of 0 to 50 wt.%. PZT/Ag-PZT multilayered laminates were fabricated by tape casting and fired at low temperatures below $950^{\circ}C$. The addition of ceramic into the Ag electrode resulted in a decrease in the thermal expansion mismatch between the electrode and the ceramic sheet. The maximum strain of PZT/Ag-PZT multilayered actuators were $9{\times}10^{-4}$ under an electric field of 2.5MV/m. In conclusion, Ag-PZT composite materials are efficient for low cost piezoelectric MLCAs.