• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.566-569
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• 2001

Hot Plate is the major unit that it used to remove damp of wafer surface, to strength adhesion of photoresist(PR) and to bake coated PR in FAB process of semiconductor. It is necessary to guarantee the performance of Hot Plate(HP). Therefore, in this study designed and developed the reliability system of HP to measure and estimated thermal uniformity and flatness in temperature setting amplitude $0~250^{\circ}C$. We developed the techniques that measures and analyzes thermal uniformity using infrared thermal vision, and compensates measuring error of flatness using laser displacement sensor. For measuring flatness, we specially makes the measurement stage of 3 axes which adopts the precision encoder. The allowable error of measuring technique is less than thermal uniformity, $\pm 0.1^{\circ}C$ and flatness, $\pm 1mm$. It is expected that the developed system can measure from $\Phi$210(wafer 8") to $\Phi$356(wafer 12") and also can be used in performance test of the Cool Plate and industrial heater, etc.

• Korean Journal of Materials Research
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• v.12 no.7
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• pp.533-539
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• 2002

Porous anodic aluminum oxide layer for nano templates was prepared in acidic solutions. In order to investigate effects of 2nd anodization on ordered formation behaviors of the porous oxide layers, electrochemical and microstructural studies were performed, primarily using TEM, FE- SEM, AFM, and Ultramicrotomy. The pore diameter of the anodic oxide layer increased approximately linearly with increasing voltages, and to the contrary, the pore density decreased. It was shown that 2nd anodizing on the cell base after dissolving 1st anodic oxide layer was remarkably effective for forming ordered array of the pores, comparing with the case for 1st anodization only. And for controlling the diameter of pores, widening method by chemical dissolution seemed more practical than by electrochemical methods.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.36 no.4
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• pp.431-438
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• 2012

The mechanical behavior of the polymeric material, HDPE depends on both time and temperature. The study of the tensile behavior at different strain rates is important in engineering design of the orthopedics device such as X-band plate. The mechanical properties and deformation mechanisms of HDPE are strongly dependent on the applied strain rate. Generally, the deformation behavior of HDPE based on the stress-strain curve is complex because of the highly inhomogeneous nature of plastic deformation, particularly that of necking. Therefore, we attempted to determine the mechanical behavior of HDPE in this study. Normally, tensile testing under various strain rates of the HDPE has been used to determine the mechanical behavior. We performed tensile tests at various strain rates (1 to 500 %/min) to analyze the viscoelastic behavior on increasing the strain rate. A tensile stress-strain curve was plotted from the data, and the point of transition was marked to calculate the transition stress, strain, and modulus.

• Journal of Radiation Protection and Research
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• v.36 no.3
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• pp.134-139
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• 2011

In this research, we developed the newly cloud chamber apparatus by using Peltier device to apply nuclear physics experiment in high school or university. We observed the cosmic rays track by using the developed apparatus and a camcorder. And we compared and analyzed the acquired data. From the results, we acquired the following conclusions and suggestions : First, it is very difficult to observe the cosmic rays track in the typical cloud chamber because of the low frequency of it. But in the newly developed cloud chamber we can observe easily the cosmic rays track owing to the high frequency of it. Second, when we do the experiment with the newly developed apparatus, we found that the cosmic rays track happens well under the condition that the temperature of the upper place of cooling plate must be below 5$^{\circ}C$ with more than isopropanol $1.04{\times}10^{-5}$ $ml{\cdot}mm^{-3}$. Third, the newly developed apparatus will be improved to have better precision by controling the temperature of cooling plate in the cloud chamber by current intensity. Therefore we think that it is very useful to use the newly developed apparatus in the nuclear physics experiment in highschool or university.

• Transactions of the KSME C: Technology and Education
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• v.3 no.2
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• pp.131-140
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• 2015

The mono-ski for the paraplegia designed to skiing is formed as seat bucket on the sled. The impact force transferred by snow surface during skiing is absorbed by the leg joints of normal human, but it is transferred to the human body on the seat when using mono-ski. Most of commercially available mono-ski have absorbing device and link mechanism between seat and ski mount in order to complement it. In this study we developed the comfort evaluation model that could provide skiing simulation of mono-ski with hydraulic damper and analyzed vibrational acceleration occurred during skiing uneven surface. The evaluation method used in this study is the international standard BS6841. We evaluated comfort performance of mono-ski in accordance with nozzle adjustment of hydraulic damper.

• 한국연소학회:학술대회논문집
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• 2005.10a
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• pp.328-336
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• 2005

Effects of surface defect distribution on flame instability during flame-surface interaction are experimentally investigated. To examine the chemical quenching phenomenon, we prepared thermally grown silicon oxide plates with well-defined defect density. Ion implantation was used to control the number of defects, i.e. oxygen vacancies. In an attempt to preferentially remove the oxygen atoms from silicon dioxide surface, argon ions with low energy level from 3keV to 5keV were irradiated at the incident angle of $60^{\circ}C$. Compositional and structural modification of $SiO_2$ induced by low-energy $Ar^+$ ion irradiation has been characterized by Atomic Force Microscopy (AFM) and X-ray Photoelectron Spectroscopy (XPS). The analysis shows that as the ion energy increases, the number of structural defect also increases and non-stoichiometric condition of $SiO_x(x{\le}2)$ plates is enhanced. From the quenching distance measurements, we found out that when the surface temperature is under $300^{\circ}C$, the quenching distance decreases on account of reduced heat loss; as the surface temperature increases over $300^{\circ}C$, however, quenching distance increases despite reduced heat loss effect. Such aberrant behavior is caused by heterogeneous chemical reaction between active radicals and surface defect sites. The higher defect density, the larger quenching distance. This results means that chemical quenching is governed by radical adsorption and can be parameterized by the oxygen vacancy density on the surface.

• Journal of Sensor Science and Technology
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• v.18 no.3
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• pp.239-244
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• 2009

We fabricated nano-templates by low temperature BCP(block copolymer) process at 180 $^{\circ}C$, then we deposited 10 nm-thick $TiO_2$ layers with ALD(atomic layer deposition) at low temperature of 150 $^{\circ}C$. Through FE-SEM analysis, we confirmed the successful formation of the groove-type(width of crest : 30 nm, width of trough : 18 nm) and the cylinder-type(diameter : 10 nm, distance between hole : 25 nm) templates. Moreover, after $TiO_2$-ALD processing, we confirmed the deposition of the uniform nano layers of $TiO_2$ on the nano-templates. Through AFM analysis, the pitches of the crest-through(in groove-type) and hole-hole(in cylinder-type) were the same before and after $TiO_2$-ALD processing. In addition, we indirectly determined the existence of the uniform $TiO_2$ layers on nano-templates as the surface roughness decreased drastically. We successfully fabricated nano-template at low temperature and confirmed that the three-dimensional nano-structure for sensor application could be achieved by $TiO_2$-ALD processing at extremely low temperature of 150 $^{\circ}C$.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.201.1-201.1
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• 2015

복합 유무기 혼합물을 사용하여 제작한 유기 쌍안정 메모리 소자는 저전력 소비, 고밀도 저장성, 높은 기계적 유연성, 저렴한 가격, 간단한 공정 과정 등의 장점들로 인하여 메모리 분야에서 많은 관심을 받고 있다. 그래핀 옥사이드층을 활용하여 만든 소자에 관한 연구는 이미 다양하게 진행되고 있으나, CdSe/ZnS 양자점을 활용한 메모리 소자에 관한 연구는 아직 많이 연구되고 있지 않다. 본 연구에서는 CdSe/ZnS 양자점을 그래핀 옥사이드에 내포한 유기 쌍안정 메모리 소자를 제작하여 메모리로써의 활용 가능성과 메커니즘을 확인하였다. Indium-tin-oxide (ITO) 기판을 세척한 후, CdSe/ZnS 양자점을 내포한 그래핀 옥사이드 층을 스핀코팅을 이용하여 1000 rpm, 3000 rpm, 1000 rpm으로 각각 3 s, 40 s, 3 s로 코팅한 후 핫플레이트에서 90oC로 30분 동안 열처리 한다. 이렇게 제작된 소자의 실온에서 전류-전압을 측정한 결과 높은 전도도와 낮은 전도도의 비율이 최대 [10]^3까지 나오는 것을 확인할 수 있었다. 투과전자 현미경 및 X선 광전자 분광법 측정결과 그래핀 옥사이드 층과 그 안에 내포된 양자점들의 유무를 확인할 수 있었다. 내구성을 측정한 결과 소자가 안정적이라는 것을 확인할 수 있었다.

• Journal of Welding and Joining
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• v.11 no.4
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• pp.57-69
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• 1993

In the present study, the microstructure and Charpy V notch toughness of multipass $CO_2$ FCA weldment in three different heat inputs(1-3KJ/mm)were investigated. The weldments using two different domestic FCAW wires(AWS E71T-1 and E71T-5 equivalent) in C-Mn steel were chemically analysed. The following conclusions can be inferred. 1. T-1 wire Showed a stable arc transfer, less spatter and harsh, a better bead spreading and easy slag removal, whereas T-5 wire suffered from the arc stability, which tended to increase spatter and produce a more convex bead. 2.The microsturctures of the top beads of the weldments in three different heat inputs consisted of coarse-grained boundary ferrite and Widmanstatten ferrite side plate with increasing heat inputs. The modest fraction of acicular ferrite in the two wire weldments was observed in the 2KJ/mm heat input. 3.The fine-grained reheated zones of both welds consisted of a duplex microstructure of polygonal ferrite and second phases. 4. The basic flux weldment of T-5wires showed a higher Charpy impact property than that of T-1 wires because of a higher fraction of acicular ferrite in the weld microstructure.

• Journal of Advanced Marine Engineering and Technology
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• v.29 no.1
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• pp.49-59
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• 2005

The evaporation heat transfer experiments are conducted with the shell and plate heat exchanger (S&PHE) without oil in the refrigerant loop using R-410A. An experimental refrigerant loop has been established to measure the evaporation heat transfer coefficient h. of R-410A in a vertical S&PHE. Two vertical counter flow channels were formed in the S&PHE by three plates haying a corrugated trapezoid shape of a $45^{\circ}C$ chevron angle. UP flow of the boiling R-410A in one channel receives heat from the hot down flow of water in the other channel The effects of the refrigerant mass flux. average heat flux. refrigerant saturation temperature and vapor qualify are explored in detail. Similar to the case of a plate heat exchanger. even at a very low Reynolds number, the flow in the S&PHE remains turbulent. The Present data shows that the evaporation heat transfer coefficients of R-410A increased with the vapor qualify. The results indicate a rise in the refrigerant mass flux caused an increase in the h.. Raising the imposed wall heat flux is found to slightly improve h., while h, is found to be lower at a higher refrigerant saturation temperature. Based on the present data. empirical correlation of the evaporation heat transfer coefficient is proposed.