Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Microstructure of TiO2 sensor electrode on nano block copolymertemplates using an ALD

나노 블록공중합체 템플레이트에 ALD로 제조된 센서용 TiO2 박막의 미세구조 연구

  • Park, Jong-Sung (Department of Materials Science and Engineering, University of Seoul) ;
  • Han, Jeung-Jo (Department of Materials Science and Engineering, University of Seoul) ;
  • Song, Oh-Sung (Department of Materials Science and Engineering, University of Seoul) ;
  • Jeon, Seung-Min (Department of Chemistry, Nano Systems Institute, Seoul National University) ;
  • Kim, Hyeong-Ki (Department of Chemistry, Nano Systems Institute, Seoul National University)
  • 박종성 (서울시립대학교 신소재공학과) ;
  • 한정조 (서울시립대학교 신소재공학과) ;
  • 송오성 (서울시립대학교 신소재공학과) ;
  • 전승민 (서울대학교 화학과) ;
  • 김형기 (서울대학교 화학과)
  • Published : 2009.05.31
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Abstract

We fabricated nano-templates by low temperature BCP(block copolymer) process at 180 $^{\circ}C$, then we deposited 10 nm-thick $TiO_2$ layers with ALD(atomic layer deposition) at low temperature of 150 $^{\circ}C$. Through FE-SEM analysis, we confirmed the successful formation of the groove-type(width of crest : 30 nm, width of trough : 18 nm) and the cylinder-type(diameter : 10 nm, distance between hole : 25 nm) templates. Moreover, after $TiO_2$-ALD processing, we confirmed the deposition of the uniform nano layers of $TiO_2$ on the nano-templates. Through AFM analysis, the pitches of the crest-through(in groove-type) and hole-hole(in cylinder-type) were the same before and after $TiO_2$-ALD processing. In addition, we indirectly determined the existence of the uniform $TiO_2$ layers on nano-templates as the surface roughness decreased drastically. We successfully fabricated nano-template at low temperature and confirmed that the three-dimensional nano-structure for sensor application could be achieved by $TiO_2$-ALD processing at extremely low temperature of 150 $^{\circ}C$.

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References

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