Structure characteristics of $SiO_2$ thin film of the FBAR Bragg reflector
(FBAR 소자의 Bragg 반사층의 $SiO_2$ 박막 특성에 관한 연구)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2005.07a
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- pp.377-378
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- 2005