• 한국해양환경ㆍ에너지학회지
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• 제12권3호
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• pp.197-201
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• 2009

다상유동의 상분리 시뮬레이션 기법으로 Lattice-Boltzmann방법(LBM)을 이용하였다. 기체와 액체상사이의 경계면에서 마이크로한 상호교환을 LBM의 등가함수에서 취급하고 있으며, Van-der-Walls의 free energy를 도입하였다. 표면에너지에 따라 상경계면의 기울기의 변화, 온도에 따른 상분리 특성등을 조사하고, 일정 온도상에서 기체와 액체의 상분리 시뮬레이션을 수행하였다.

• 한국진공학회지
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• 제10권4호
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• pp.424-430
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• 2001

RF나 마이크로웨이브의 전기장이 작용될 때 플라즈마 방전에서의 전자에너지분포함수를 계산하기 위하여 전자 볼츠만 방정식을 수치적으로 푼다. 2차미분 방정식인 로렌츠근사를 사용하는 동차 전자 볼츠만 방정식과 적분-미분방정식인 입자균형방정식을 동시에 풀어 자체모순이 없게 방전 전기장의 크기를 결정한다. 이 수치코드를 이용하여 아르곤 방전에 대하여 전자에너지 분포함수를 RF와 마이크로파영역에 걸쳐 계산한다. 이로부터 전자에너지 분포함수와 이온화율에 대한 고주파 전기장의 주파수 변화에 따른 영향을 조사한다.

• 한국정보통신학회논문지
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• 제26권2호
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• pp.181-186
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• 2022

포아즌 볼츠만 방정식 (Poisson-Boltzmann equation, PBE)은 생물물리, 콜로이드 화학 등에서 등장하는 문제들을 모델링하는데 사용되는 방정식이다. 따라서 PBE의 수치해를 효율적으로 예측하는 것은 중요한 이슈이다. 저자들은 기존의 연구에서 PBE를 풀기위한 딥러닝 방법을 제안하였으나, 딥러닝을 훈련하기 위한 샘플을 생성하는 시간이 컸다는 어려움이 있었다. 본 논문에서는 FEM 수치해를 생성하는데 걸리는 시간을 줄이는 두가지 방안을 마련하였다. 첫째로 대수 방정식을 만들 때 bilinar form에 포함되는 penalty 파라메터를 실험적으로 조정하였다. 두 번째로, 대수적멀티그리드 기법을 활용하여 대수 방정식의 컨디션 넘버를 meshsize와 무관하게 만들었다. 따라서 PBE 방정식의 대수 방정식을 풀 때 계산 시간을 효과적으로 줄였다. 이러한 대수적 멀티그리드를 사용한 방법은 다양한 분야에서 딥러닝의 샘플을 생성하는데 효과적으로 활용될 수 있을 것으로 기대된다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1800-1805
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• 2008

A "finite volume method" is proposed to predict heat transport in a spherical enclosure at micro/nanoscale with the Boltzmann transport equation (BTE). The gray version of the BTE with the relaxation time approximation has been applied. Pointing out similarity between radiative transfer equation (RTE) and BTE, the mapping process in RTE is adopted to treat the angular derivative term and linear algebraic discretization equation is derived by using the established method which is used in 2-D BTE in cartesian coordinates. The simulation results are compared to exact solution to RTE for various acoustic thicknesses and ratio of radii. The comparison shows that this method is logical and accurate, and it is possible to easily adopt various models in spherical BTE.

• Nuclear Engineering and Technology
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• 제54권9호
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• pp.3181-3204
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• 2022

The variational nodal method for solving the neutron transport equation has evolved over 40 years. Based on a functional form of the Boltzmann neutron transport equation, the method now comprises a complete set of variants that can be employed for different problems. This paper presents an extensive review of the development of the variational nodal method. The emphasis is on summarizing the whole theoretical system rather than validating the methodologies. The paper covers the variational nodal formulation of the Boltzmann neutron transport equation, the Ritz procedure for various application purposes, the derivation of boundary conditions, the extension for adjoint and perturbation calculations, and treatments for anisotropic scattering sources. Acceleration approaches for constructing response matrices and solving the resulting system of algebraic equations are also presented.

• 전기학회논문지P
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• 제64권4호
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• pp.241-245
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• 2015

Energy Distribution Function in pure $CH_4$, $CF_4$ and mixtures of $CF_4$ and Ar, have been analyzed over a range of the reduced electric field strength between 0.1 and 350[Td] by the two-term approximation of the Boltzmann equation (BEq.) method and the Monte Carlo simulation (MCS). The calculations of electron swarm parameters require the knowledge of several collision cross-sections of electron beam. Thus, published momentum transfer, ionization, vibration, attachment, electronic excitation, and dissociation cross-sections of electrons for $CH_4$, $CF_4$ and Ar, were used. The differences of the transport coefficients of electrons in $CH_4$, mixtures of $CH_4$ and Ar, have been explained by the deduced energy distribution functions for electrons and the complete collision cross-sections for electrons. The results of the Boltzmann equation and the Monte Carlo simulation have been compared with the data presented by several workers. The deduced transport coefficients for electrons agree reasonably well with the experimental and simulation data obtained by Nakamura and Hayashi. The energy distribution function of electrons in $CF_4$-Ar mixtures shows the Maxwellian distribution for energy. That is, $f({\varepsilon})$ has the symmetrical shape whose axis of symmetry is a most probably energy.

• 한국전기전자재료학회논문지
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• 제18권4호
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• pp.375-380
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• 2005

CF₄ molecular gas is used in most of semiconductor manufacture processing and SF/sub 6/ molecular gas is widely used in industrial of insulation field. but both of gases have defect in global warming. C₃F/sub 8/ gas has large attachment cross-section more than these gases, moreover GWP, life-time and price of C₃F/sub 8/ gas is lower than them, therefor it is important to calculate transport coefficients of C₃F/sub 8/ gas like electron drift velocity, ionization coefficient, attachment coefficient, effective ionization coefficient and critical E/N. The aim of this study is to get these transport coefficients for imformation of the insulation strength and efficiency of etching process. In this paper, we calculated the electron drift velocity (W) in pure C₃F/sub 8/ molecular gas over the range of E/N=0.1∼250 Td at the temperature was 300 K and gas pressure was 1 Torr by the Boltzmann equation method. The results of this paper can be important data to present characteristic of gas for plasma etching and insulation, specially critical E/N is a data to evaluate insulation strength of a gas.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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• pp.628-631
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• 2004

A tetrafluoromethane$(CF_4)$ is most useful gas in plasma dry etching, because it has a electron attachment cross-section. therefor it is important to calculate transport coefficients like electron drift velocity, ionization coefficient, attachment coefficient, effective ionization coefficient. and critical E/N. The aim of this study is to get these transport coefficients for information of the insulation strength and efficiency of etching process. Electron transport coefficients in $CF_4+Ar$ gas mixture are simulated in range of E/N values from 1 to 250 [Td] at 300[K} and 1 [Torr] by using Boltzmann equation method. The results of this method can be important data to present characteristic of gas for plasma etching and insulation, specially critical E/N is a data to evaluate insulation strength of a gas. and is presented in this paper for various mixture ratios of $CF_4+Ar$ gas mixture.

• 전기학회논문지P
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• 제60권1호
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• pp.27-31
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• 2011

In this paper, the electron transport characteristics in $CF_4$ has been analysed over the E/N range 1~300[Td] by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity, longitudinal diffusion coefficient, the ratio of the diffusion coefficient to the mobility, electron ionization and attachment coefficients, effective ionization coefficient, mean energy, collision frequency and the electron energy distribution function. The electron energy distribution function has been analysed in $CF_4$ at E/N=5, 10, 100, 200 and 300[Td] for a case of the equilibrium region in the mean electron energy and respective set of electron collision cross sections. The results of Boltzmann equation and Monte Carlo simulation have been compared with experimental data by Y. Nakamura and M. Hayashi. The swarm parameter from the swarm study are expected to serve as a critical test of current theories of low energy electron scattering by atoms and molecules, in particular, as well as crucial information for quantitative simulations of weakly ionized plasmas.

• 전기학회논문지P
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• 제61권1호
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• pp.13-17
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• 2012

Ionization and Attachment Coefficients in pure $CH_4$, $CF_4$ and mixtures of $CF_4$ and Ar, have been analyzed over a range of the reduced electric field strength between 0.1 and 350[Td] by the two-term approximation of the Boltzmann equation (BEq.) method and the Monte Carlo simulation (MCS). The calculations of electron swarm parameters require the knowledge of several collision cross-sections of electron beam. Thus, published momentum transfer, ionization, vibration, attachment, electronic excitation, and dissociation cross-sections of electrons for $CH_4$, $CF_4$ and Ar, were used. The results of the Boltzmann equation and the Monte Carlo simulation have been compared with the data presented by several workers. The deduced transport coefficients for electrons agree reasonably well with the experimental and simulation data obtained by Nakamura and Hayashi. The energy distribution function of electrons in $CF_4$-Ar mixtures shows the Maxwellian distribution for energy. That is, f(${\varepsilon}$) has the symmetrical shape whose axis of symmetry is a most probably energy. The proposed theoretical simulation techniques in this work will be useful to predict the fundamental process of charged particles and the breakdown properties of gas mixtures.