전기학회논문지P (The Transactions of the Korean Institute of Electrical Engineers P)

  • 제60권1호
  • /
  • Pages.27-31
  • /
  • 2011
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  • 1229-800X(pISSN)
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  • 2586-7792(eISSN)
대한전기학회 (The Korean Institute of Electrical Engineers)
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CF4 기체에서의 전리와 부착계수

Ionization and Attachment Coefficients in CF4

  • 김상남 (인천대학교 전기공학과)
  • 투고 : 2011.01.11
  • 심사 : 2011.02.22
  • 발행 : 2011.03.01
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초록

In this paper, the electron transport characteristics in $CF_4$ has been analysed over the E/N range 1~300[Td] by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity, longitudinal diffusion coefficient, the ratio of the diffusion coefficient to the mobility, electron ionization and attachment coefficients, effective ionization coefficient, mean energy, collision frequency and the electron energy distribution function. The electron energy distribution function has been analysed in $CF_4$ at E/N=5, 10, 100, 200 and 300[Td] for a case of the equilibrium region in the mean electron energy and respective set of electron collision cross sections. The results of Boltzmann equation and Monte Carlo simulation have been compared with experimental data by Y. Nakamura and M. Hayashi. The swarm parameter from the swarm study are expected to serve as a critical test of current theories of low energy electron scattering by atoms and molecules, in particular, as well as crucial information for quantitative simulations of weakly ionized plasmas.

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