The Transactions of the Korean Institute of Electrical Engineers P (전기학회논문지P)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지
DOI QR코드

DOI QR Code

Ionization and Attachment Coefficients in CF4, CH4, Ar Mixtures Gas

CF4, CH4, Ar 혼합기체의 전리와 부착계수

  • 김상남 (인천대학교 전기공학과)
  • Received : 2011.12.23
  • Accepted : 2012.02.20
  • Published : 2012.03.01
Download PDF
⟨ Previous Next ⟩

Abstract

Ionization and Attachment Coefficients in pure $CH_4$, $CF_4$ and mixtures of $CF_4$ and Ar, have been analyzed over a range of the reduced electric field strength between 0.1 and 350[Td] by the two-term approximation of the Boltzmann equation (BEq.) method and the Monte Carlo simulation (MCS). The calculations of electron swarm parameters require the knowledge of several collision cross-sections of electron beam. Thus, published momentum transfer, ionization, vibration, attachment, electronic excitation, and dissociation cross-sections of electrons for $CH_4$, $CF_4$ and Ar, were used. The results of the Boltzmann equation and the Monte Carlo simulation have been compared with the data presented by several workers. The deduced transport coefficients for electrons agree reasonably well with the experimental and simulation data obtained by Nakamura and Hayashi. The energy distribution function of electrons in $CF_4$-Ar mixtures shows the Maxwellian distribution for energy. That is, f(${\varepsilon}$) has the symmetrical shape whose axis of symmetry is a most probably energy. The proposed theoretical simulation techniques in this work will be useful to predict the fundamental process of charged particles and the breakdown properties of gas mixtures.

Keywords

References

  1. Flamm D. L., "Plasma Etching" Academic Press, San Diego, pp.91-183. 1989.
  2. Flamm D. L., "Plasma Processing of Semiconductors" Williams P F, NATO ASI series, pp.1-22. 1997.
  3. 奧田孝美, "氣體プラズマ現象", コロナ社, pp. 21-33, 1975.상
  4. 山本賢三, 奧田孝美, "電離氣體", コロナ사, pp. 161-197, 1977.
  5. 武田進著, "プラズマの基礎", 朝倉 書店, pp. 17-58, 1976.
  6. 森正武, "Fortran 77 數値計算 プログ ラミング" (岩波書店), pp. 41-44, 1995.
  7. モンテカルロ法 と シミユレ-シヨン(培風館), 1989.
  8. 市川行和, 高柳和夫, 島材勳, "衝突の理論(上 下)", 吉岡書店, pp. 192, 1975.
  9. 高柳和夫, "電子, 原子, 分子の衝突", 培風館, pp. 51-69, 1978.
  10. H. Itoh, T. Matsumura, K. Satoh, Y. Nakao and H. Tagashira, "Development of electrons swarms in CF4", Proc. 21st int. Conf. on Phenomena in Ionized Gases, (ICPIG) (Bochum : Germany) 1, pp. 245-6, 1993.
  11. E. W. Mc Daniel and E. A. Mason "The Mobility and Diffusion off Ions in Gases" John Wiley and Sons. Inc. pp. 3-82, 1973
  12. S. A. J. Al-Amin and J. Lucas, "Electron swarm parameters in oxygen and methane", J. Phys. D:Appl. 18. pp. 1781-1794, 1985. https://doi.org/10.1088/0022-3727/18/9/009
  13. Y. Nakamura and M. Kurachi "Electron Transport Parameters in Argon and its momentum transfer cross section" J.Phys. 21, pp.718-723, 1988
  14. L. G. H. Huxley ＆ R. W. Cormpton. "The Diffusion and Drift of Electrons in Gases" John Wiley and Sons. Inc 1974
  15. A. Gilardini, "Low Energy Electron Collisions in Gases" John Wiley and Sons. lnc. pp.127-162. 1972
  16. K. L. Bell, N. S. Scott and M. A. Lennon, "The Scattering of low-energy electrons by Argon atoms" J. Phys. B: At. Mol. Phys. 17, pp. 4757-4765, 1984 https://doi.org/10.1088/0022-3700/17/23/016
  17. 中村, 富澤, "CF4 氣中における電子輸送係數の測定", 電氣學會放電硏究會資料, ED-88-58, pp. 29-37, 1988.
  18. K. L. Bell, N. S. Scott and M. A. Lennon, "The Scattering of low-energy electrons by Argon atoms" J. Phys. B: At. Mol. Phys. 17, pp. 4757-4765, 1984 https://doi.org/10.1088/0022-3700/17/23/016
  19. W. C. Fon, K. A. Berrington, P. G. Burke, "The elastic Scattering of electrons from inert gases"
  20. Arati Dasqupta and A. K. Bhatia, "Scattering of electrons from Argon atoms" Phys. Rev. A. Vol.32, No. 6, pp.3335-3341, 1985 https://doi.org/10.1103/PhysRevA.32.3335
  21. M. Hayashi, "Swarm Studies and Inelastic Electron-Molecule Collisions", L. C. Pitchford, Springer-Verlag, 1986.
  22. Y. Ohmori, K. Kitamori, M Shimozuma, and H. Tagashira, "Boltzmann equation analysis of electron swarm behaviour in methane", J. Phys. D. 19, pp 437-55, 1986. https://doi.org/10.1088/0022-3727/19/3/013
  23. 金相南, "시뮬레이션에 의한 CF4, CH4, Ar 混合氣體에서 電子 에너지分布函數" 大韓電氣學會 論文集, 52P-1-2 pp.9-13, 2003