• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.179-179
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• 2012

Low pressure radio-frequency glow discharges are investigated using theoretical modeling and various experimental diagnostic methods. In the calculations, global models and transformer models are developed to understand the chemical kinetics as well as the electrical properties such as the effective collision frequency, the heating mechanism and the power transferred to the plasma electrons. In addition, Boltzmann equation solver is used to compensate the effect of the electron energy distribution function (EEDF) shape in the global model, and the general expression of energy balance for non-Maxwellian electrons is developed. In the experiments, a number of traditional plasma diagnostic methods are used to compare with calculated results such as Langmuir probe, optical emission spectroscopy (OES), optical absorption spectroscopy (OAS) and two-photon absorption laser-induced fluorescence (TALIF). These theoretical and experimental methods are applied to understand several interesting phenomena in low pressure ICP discharges. The chemical and physical properties of low pressure ICP discharges are described and the applications of these methods are discussed.

• 한국전기전자재료학회논문지
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• 제13권4호
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• pp.359-364
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• 2000

The paper describes the electron transport characteristics in SP$_{6}$+He gas calculated E/N values 0.1~700[Td] by the Monte Carlos simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters obtained by TOF method. This study gained the values of the electron swarm parameters such as the electron drift velocity the electron ionization or attachment coefficients longitudinal and transverse diffusion coefficients for SF$_{6}$+He gas at a range of E/N.E/N.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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• pp.279-283
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• 1998

The electron swarm parameters in the$CF_4$(O.l%, 5%)+Ar mixtures are measured by time of flight method over the E/N(Td) range from 10 to 300LTdl. A two-term approximation of the Boltzmann equation analysis and Monte Carlo simulation have been also used to study electron transport coefficients. We have calculated W, NDL, NDT, $\alpha$ and the limiting breakdown electric field to gas mixtures ratio in pure $CF_4$ gas and$CF_4+Ar$ mixtures. The measured results and the calculated results have been compared each other paper.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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• pp.696-699
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• 1999

The electron transport coefficients in $SF_6+N_2$ gas is analysed in range of E/N values from 100~900(Td) by a Monte Carlo simulation and Boltzmann method, using a set of electron collision cross sections determined by the authors. The result of the Monte Carlo simulation such as electron drift velocity, ionization and electron attachment coefficients, longitudinal and transverse diffusion coefficients in nearly agreement with the respective experimental and theoretical for a range of E/N.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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• pp.1566-1567
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• 2006

Energy distribution function for electrons in $SF_6$-Ar mixtures gas used by MCS-BEq algorithm has been analysed over the E/N range $30{\sim}300$[Td] by a two term Boltzmann equation and by a Monte Carlo Simulation using a set of electron cross sections determined by other authors, experimentally the electron swarm parameters for 0.2[%] and 0.5[%] $SF_6$-Ar mixtures were measured by time-of-flight (TOF) method. The results show that the deduced electron drift velocities, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients and mean energy agree reasonably well with theoretical for a rang of E/N values.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.468-469
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• 2007

In this paper, the electron transport characteristics in $CF_4$ has been analysed over the E/N range 1~300[Td] by a two-tenn approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity, longitudinal diffusion coefficient, the ratio of the diffusion coefficient to the mobility, electron ionization and attachment coefficients, effective ionization coefficient, mean energy, collision frequency and the electron energy distribution function. The swarm parameter from the swarm study are expected to serve as a critical test of current theories of low energy electron scattering by atoms and molecules, in particular, as well as crucial information for quantitative simulations of weakly ionized plasmas.

• 한국전기전자재료학회논문지
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• 제11권1호
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• pp.67-73
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• 1998

In this paper, the electron swarm parameters in the 0.5% and 0.2% SF\ulcorner+Ar mixtures are measured by time of flight method over the E/N(Td) range from 30 to 300(Td). The measurements have been carried out by the double shutter drift tube with variable drift distance from the cathod. A two-term approximation of the boltzmann equation analysis and Monte Carlo simulation have been also used to study electron transport coefficients. We have calculated W, $ND_L,\;ND_T,\;\alpha,\;\eta,\;\alpha-\eta$, and the limiting breakdown electric field to gas mixtures ratio in pure $SF_6$+Ar mixtures. The electron energy distribution function has been analysed in $SF_6$+Ar mixtures at E/N : 200(Td) for a case of the equilibrium region in the mean electron energy. The measured results and the calculated results have been compared each other.

• 대한조선학회논문집
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• 제43권5호
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• pp.586-596
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• 2006

A 3-dimensional FDLB model with additional internal degree of freedom is applied for diatomic gases such as air, in which an additional distribution function is introduced. Direct simulations of aero-acoustic by using the applied model and scheme are presented. Speed of sound is correctly recovered. As typical examples, the Aeolian tone emitted by a circular column is successfully simulated even very low Mach number flow. Acoustic pressure fluctuations with the same frequency of the Karman vortex street compared with the pressure fluctuation around a circular column is captured. Full three-dimensional acoustic wave past a compact block like pentagon, furthermore, is also emitted in y direction as dipole like sound.

• 전기학회논문지P
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• 제59권2호
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• pp.197-201
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• 2010

$SF_6$ gas would be used in power transformer, GIS (Gas insulated switchgear) and so on because of its electrically superior insulation and chemically stable structure. Recently, the reduction of $SF_6$ is required to avoid global warming and the researches on the dilution of $SF_6$ with other gases have been carried out. $SF_6$ mixture gases with $N_2$ and $C_xF_y$ have drawn attention to the synergy effect. However, in order to understand the mechanism of the synergy effect, it is important to analyze and evaluate properties of mixture gases quantitatively. In this paper, we investigated the mechanism of synergy effect from electron collision processes and electron energy distribution by solving Boltzmann equation with propagator method. Three kinds of gases for dilution of $SF_6$ ($SF_6/N_2$, $SF_6/CF$4 and $SF_6/C_4F_8$) are considered in this simulation. On the properties of $SF_6/N_2$ mixture gas, the variation of reduced electric field was shown highly within 0%~40% mixtures of $SF_6$. And the more low-level electron energy has been distributed, the higher insulation capability has appeared.

• 한국연소학회:학술대회논문집
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• 한국연소학회 1999년도 제19회 KOSCO SYMPOSIUM 논문집
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• pp.117-128
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• 1999

The removal of nitrogen oxides(NOx) from $N_{2}/O_{2}$ gas using a pulsed corona discharge was investigated as a function of the reduced electric field(E/N) and the energy density(J/L). A kinetic model was developed to characterize the chemical reactions taking place in a pulsed corona discharge reactor. The model calculates the fractional concentrations of radical species at each pulse-on period and utilizes the radicals to remove NOx for the subsequent pulse-off period. Electron collision reaction data are calculated using ELENDIF program to solve Boltzmann equation for electron energy distribution function, and the subsequent chemical reactions are calculated using CHEMKIN-II program to solve stiff ODE(ordinary differential equation) problems for species concentrations. The corona discharge energy per pulse and the time-space averaged E/N were obtained by fitting the model to experimental data. The model calculation shows good agreement with the experimental data, and predicts the formation of other species such as $NO_{2}$, $O_{3}$ and $N_{2}O$.