• Journal of the Korean Society for Marine Environment & Energy
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• v.12 no.3
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• pp.197-201
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• 2009

As one of the promising model on the multiphase fluid mixtures, the Lattice-Boltzmann Method(LBM) is being developed to simulate flows containing two immisible components which are different mass values. The equilibrium function in the LBM can have a nonideal gas model for the equation of state and use the interfacial energy for the phase separation effect. An example on the phase separation has been carried out through the time evolution. The LBM based on the statistic mechanics is appropriate to solve very complicated flow problems and this model gives comparative merits rather than the continuum mechanics model.

• Journal of the Korean Vacuum Society
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• v.10 no.4
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• pp.424-430
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• 2001

An electron Boltzmann equation is solved numerically to calculate the electron energy distribution functions in plasma discharge which is generated by radio-frequency (RF) and microwave frequency electric field. The maintenance field strengths are determined self-consistently by solving the homogeneous electron Boltzmann equation in the Lorentz approximation expressed by 2nd order differential equation and an additional particle balance equation expressed by integro-differential equation. By using this numerical code, the electron energy distribution functions in argon discharge are calculated in the range from RF to microwave frequency. The influence of frequency of the HF electric field on the electron energy distribution functions and ionization rate are investigated.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.26 no.2
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• pp.181-186
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• 2022

Poisson-Boltzmann equation (PBE) is used to model problems arising from various disciplinary including bio-pysics and colloid chemistry. Therefore, to predict a numerical solution of PBE is an important issue. The authors proposed deep learning based methods to solve PBE while the computational time to generate finite element method (FEM) solutions were bottlenecks of the algorithms. In this work, we shorten the generation time of FEM solutions in two directions. First, we experimentally find certain penalty parameter in a bilinear form. Second, we applied algebraic multigrids methods to the algebraic system so that condition number is bounded regardless of the meshsize. In conclusion, we have reduced computation times to solve algebraic systems for PBE. We expect that algebraic multigrids methods can be further employed in various disciplinary to generate deep learning samples.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1800-1805
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• 2008

A "finite volume method" is proposed to predict heat transport in a spherical enclosure at micro/nanoscale with the Boltzmann transport equation (BTE). The gray version of the BTE with the relaxation time approximation has been applied. Pointing out similarity between radiative transfer equation (RTE) and BTE, the mapping process in RTE is adopted to treat the angular derivative term and linear algebraic discretization equation is derived by using the established method which is used in 2-D BTE in cartesian coordinates. The simulation results are compared to exact solution to RTE for various acoustic thicknesses and ratio of radii. The comparison shows that this method is logical and accurate, and it is possible to easily adopt various models in spherical BTE.

• Nuclear Engineering and Technology
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• v.54 no.9
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• pp.3181-3204
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• 2022

The variational nodal method for solving the neutron transport equation has evolved over 40 years. Based on a functional form of the Boltzmann neutron transport equation, the method now comprises a complete set of variants that can be employed for different problems. This paper presents an extensive review of the development of the variational nodal method. The emphasis is on summarizing the whole theoretical system rather than validating the methodologies. The paper covers the variational nodal formulation of the Boltzmann neutron transport equation, the Ritz procedure for various application purposes, the derivation of boundary conditions, the extension for adjoint and perturbation calculations, and treatments for anisotropic scattering sources. Acceleration approaches for constructing response matrices and solving the resulting system of algebraic equations are also presented.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.64 no.4
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• pp.241-245
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• 2015

Energy Distribution Function in pure $CH_4$, $CF_4$ and mixtures of $CF_4$ and Ar, have been analyzed over a range of the reduced electric field strength between 0.1 and 350[Td] by the two-term approximation of the Boltzmann equation (BEq.) method and the Monte Carlo simulation (MCS). The calculations of electron swarm parameters require the knowledge of several collision cross-sections of electron beam. Thus, published momentum transfer, ionization, vibration, attachment, electronic excitation, and dissociation cross-sections of electrons for $CH_4$, $CF_4$ and Ar, were used. The differences of the transport coefficients of electrons in $CH_4$, mixtures of $CH_4$ and Ar, have been explained by the deduced energy distribution functions for electrons and the complete collision cross-sections for electrons. The results of the Boltzmann equation and the Monte Carlo simulation have been compared with the data presented by several workers. The deduced transport coefficients for electrons agree reasonably well with the experimental and simulation data obtained by Nakamura and Hayashi. The energy distribution function of electrons in $CF_4$-Ar mixtures shows the Maxwellian distribution for energy. That is, $f({\varepsilon})$ has the symmetrical shape whose axis of symmetry is a most probably energy.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.4
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• pp.375-380
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• 2005

CF₄ molecular gas is used in most of semiconductor manufacture processing and SF/sub 6/ molecular gas is widely used in industrial of insulation field. but both of gases have defect in global warming. C₃F/sub 8/ gas has large attachment cross-section more than these gases, moreover GWP, life-time and price of C₃F/sub 8/ gas is lower than them, therefor it is important to calculate transport coefficients of C₃F/sub 8/ gas like electron drift velocity, ionization coefficient, attachment coefficient, effective ionization coefficient and critical E/N. The aim of this study is to get these transport coefficients for imformation of the insulation strength and efficiency of etching process. In this paper, we calculated the electron drift velocity (W) in pure C₃F/sub 8/ molecular gas over the range of E/N=0.1∼250 Td at the temperature was 300 K and gas pressure was 1 Torr by the Boltzmann equation method. The results of this paper can be important data to present characteristic of gas for plasma etching and insulation, specially critical E/N is a data to evaluate insulation strength of a gas.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.628-631
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• 2004

A tetrafluoromethane$(CF_4)$ is most useful gas in plasma dry etching, because it has a electron attachment cross-section. therefor it is important to calculate transport coefficients like electron drift velocity, ionization coefficient, attachment coefficient, effective ionization coefficient. and critical E/N. The aim of this study is to get these transport coefficients for information of the insulation strength and efficiency of etching process. Electron transport coefficients in $CF_4+Ar$ gas mixture are simulated in range of E/N values from 1 to 250 [Td] at 300[K} and 1 [Torr] by using Boltzmann equation method. The results of this method can be important data to present characteristic of gas for plasma etching and insulation, specially critical E/N is a data to evaluate insulation strength of a gas. and is presented in this paper for various mixture ratios of $CF_4+Ar$ gas mixture.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.60 no.1
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• pp.27-31
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• 2011

In this paper, the electron transport characteristics in $CF_4$ has been analysed over the E/N range 1~300[Td] by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity, longitudinal diffusion coefficient, the ratio of the diffusion coefficient to the mobility, electron ionization and attachment coefficients, effective ionization coefficient, mean energy, collision frequency and the electron energy distribution function. The electron energy distribution function has been analysed in $CF_4$ at E/N=5, 10, 100, 200 and 300[Td] for a case of the equilibrium region in the mean electron energy and respective set of electron collision cross sections. The results of Boltzmann equation and Monte Carlo simulation have been compared with experimental data by Y. Nakamura and M. Hayashi. The swarm parameter from the swarm study are expected to serve as a critical test of current theories of low energy electron scattering by atoms and molecules, in particular, as well as crucial information for quantitative simulations of weakly ionized plasmas.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.61 no.1
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• pp.13-17
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• 2012

Ionization and Attachment Coefficients in pure $CH_4$, $CF_4$ and mixtures of $CF_4$ and Ar, have been analyzed over a range of the reduced electric field strength between 0.1 and 350[Td] by the two-term approximation of the Boltzmann equation (BEq.) method and the Monte Carlo simulation (MCS). The calculations of electron swarm parameters require the knowledge of several collision cross-sections of electron beam. Thus, published momentum transfer, ionization, vibration, attachment, electronic excitation, and dissociation cross-sections of electrons for $CH_4$, $CF_4$ and Ar, were used. The results of the Boltzmann equation and the Monte Carlo simulation have been compared with the data presented by several workers. The deduced transport coefficients for electrons agree reasonably well with the experimental and simulation data obtained by Nakamura and Hayashi. The energy distribution function of electrons in $CF_4$-Ar mixtures shows the Maxwellian distribution for energy. That is, f(${\varepsilon}$) has the symmetrical shape whose axis of symmetry is a most probably energy. The proposed theoretical simulation techniques in this work will be useful to predict the fundamental process of charged particles and the breakdown properties of gas mixtures.