• 한국전기화학회:학술대회논문집
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• 2004.04a
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• pp.27-27
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• 2004

• Journal of Sensor Science and Technology
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• v.19 no.4
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• pp.259-270
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• 2010

MEMS(micro electro mechanical systems) is a technology for the manufacture hyperfine structure, as a micro-sensor and a driving device, by a variety of materials such as silicon and polymer. Many study for utilizing the MEMS applications have been performed in variety of fields, such as light devices, high frequency equipments, bio-technology, energy applications and other applications. Especially, the field of Bio-MEMS related with bio-technology is very attractive, because it have the potential technology for the miniaturization of the medical diagnosis system. Bio-MEMS, the compound word formed from the words 'Bio-technology' and 'MEMS', is hyperfine devices to analyze biological signals in vitro or in vivo. It is extending the range of its application area, by combination with nano-technology(NT), Information Technology(IT). The LOC(lab-on-a-chip) in Bio-MEMS, the comprehensive measurement system combined with Micro fluidic systems, bio-sensors and bio-materials, is the representative technology for the miniaturization of the medical diagnosis system. Therefore, many researchers around the world are performing research on this area. In this paper, the application, development and market trends of Bio-MEMS are investigated.

• Journal of Sensor Science and Technology
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• v.30 no.3
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• pp.170-174
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• 2021

As the rising attention to the medical and healthcare issue, Bio-MEMS (Micro electro mechanical systems) platform such as bio sensor, cell culture system, and microfluidics device has been studied extensively. Bio-MEMS platform mostly has high resolution structure made by biocompatible material such as polydimethylsiloxane (PDMS). In addition, three dimension structure has been applied to the bio-MEMS. Lithography can be used to fabricate complex structure by multiple process, however, non-rectangular cross section can be implemented by introducing optical apparatus to lithography technic. X-ray lithography can be used even for sub-micron scale. Here in, we demonstrated lines with round shape cross section using the tilted gold absorber which was deposited on the oblique structure as the X-ray mask. This structure was used as a mold for PDMS. Molded PDMS was applied to the cell culture platform. Moreover, molded PDMS was bonded to flat PDMS to utilize to the sub-micro channel. This work has potential to the large area bio-MEMS.

• 유체기계공업학회:학술대회논문집
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• 2004.12a
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• pp.766-767
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• 2004

• Biotechnology and Bioprocess Engineering:BBE
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• v.9 no.2
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• pp.100-106
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• 2004

Micro-fluidics is one of the major technologies used in developing micro-total analytical systems (${\mu}$-TAS), also known as “lab-on-a-chip”. With this technology, the analytical capabilities of room-size laboratories can be put on one small chip. In this paper, we will briefly introduce materials that can be used in micro-fluidic systems and a few modules (mixer, chamber, and sample prep. modules) for lab-on-a-chip to analyze biological samples. This is because a variety of fields have to be combined with micro-fluidic technologies in order to realize lab-on-a-chip.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.7
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• pp.45-51
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• 2000

지난 세기부터 MEMS 제작 기술을 이용하여 만들어진 시스템들을 의학이나 생물학적인 용도로 응용하기 위한 많은 연구가 활발히 이루어져 왔다. 기술적인 측면에서 이러한 연구들은 MEMS 분야의 초창기에 강조되어 온 표면 및 몸체 미세 가공 기술(surface ＆ bulk micromachining)과 같은 미세 구조물 제작 기술의 발전에 힘입은 바 크다. 그러나 MEMS 기술이 점차 발전되어 오면서, 가공 기술이 고도화되고 미세 시스템의 구조가 점차 복잡해짐에 따라, 많은 연구들이 단순한 가공기술을 넘어 미세 시스템을 조립하고 집적화할 수 있는 기술, 접합 (bonding) 기술, 패키징 (packaging) 기술, 3차원 형상의 제작 기술, 실리콘(silicon)이나 유리(glass)가 아닌 다른 재료를 이용한 미세 가공 기술 등의 개발을 중심으로 이루어지고 있다.(중략)

• Proceedings of the Optical Society of Korea Conference
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• 2004.07a
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• pp.140-141
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• 2004

• Journal of the Korean Society for Precision Engineering
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• v.22 no.6 s.171
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• pp.199-206
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• 2005

In this work, a theoretical investigation on the energy harvesting is undertaken using one of potential smart materials; piezoelectric material. The energy equations fur both square and circular types of the piezoelectric material are derived, and the energy generated from two commercially available Products: $PZT (Lead/Zirconium/Titanium: Pb(Zr,\;Ti)O_3)$ and PVDF (polyvinylidene fluoride) are investigated in terms of the thickness and area. In addition, a finite element analysis (FEA) is undertaken to obtain the generated energy due to the uniform pressure applied on the surface of the piezoelectric materials. A comparative work between the theory and the FEA is made followed by the brief discussion on the usage of the harvested energy for Bio MEMS.

• Journal of Sensor Science and Technology
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• v.19 no.2
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• pp.130-136
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• 2010

The microbolometer array sensor with fine pitch pixel array has been implemented to the released amorphous silicon layer supported by two contact pads. For the design of focal plane mirror with geometrical flatness, the simple beam test structures were fabricated and characterized. As the beam length decreased, the effect of beam width on the bending was minimized, Mirror deformation of focal plane in a real pixel showed downward curvature by residual stress of a-Si and Ti layer. The mirror tilting was caused by the mis-align effect of contact pad and confirmed by FEA simulation results. The properties of bolometer have been measured as such that the NETD 145 mK, the TCR -2 %/K, and thermal time constant 1.99 ms.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.11
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• pp.25-35
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• 2000