• 한국진공학회지
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• 제12권1호
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• pp.1-6
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• 2003

50 kW급 출력의 전자빔을 발생시킬 수 있는 축선 방식 전자총 (axial electron beam gun)과 전원장치를 제작하였다. 전자총은 전자빔 발생장치와 전자빔 궤적제어장치로 이루어졌다. 전자빔 발생장치는 필라멘트와 음극(cathode), 양극(anode)으로 구성되었고 전자빔의 최대전류는 2A, 가속전압은 평균 25kV이다. 전자빔 궤적제어장치는 전자빔의 크기를 조절하는 초점 (focusing) 코일과 전자빔의 방향을 조절하는 편향(deflection) 코일 및 주사 (scanning) 코일로 구성되었다. 전자총과 별개로 진공용기 내부에 Helmholtz 코일을 설치하여 시료의 표면에 입사되는 전자빔의 입사각도를 최적화시켰다. 각 부분의 동작 특성을 측정한 결과와 제작된 전자총으로 고융점 원소인 지르코늄 (zirconium, Zr)과 가돌리늄(gadolinium, Gd) 금속을 증발시킨 결과를 정리하였다.

• 대한기계학회논문집A
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• 제35권5호
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• pp.479-485
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• 2011

열 전자 방출 형 전자 빔 장치에서 영상을 획득하기 위해서는 텅스텐 필라멘트에서 발생한 전자빔을 스캔 할 장치가 필요하다. 이때, 스캔 되는 주파수에 따라서 시료 표면에서 튀어 나오는 2 차 전자신호에 대하여 잡음 성분의 발생이 다르게 나타난다. 본 연구에서는 잡음 성분 제거를 위한 필터 설계를 위해서 2 차 전자신호에 대한 실시간 주파수 분석을 통해 신호와 잡음 성분을 구분했다. 그리고 부동 소수점 연산이 가능한 DSP 에서 디지털 필터 설계를 통하여 신호대비 잡음 성분 제거를 통하여 고배율로 획득한 전자현미경의 영상의 질을 향상 시켰다.

• Current Optics and Photonics
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• 제5권3호
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• pp.229-237
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• 2021

The capabilities of the near-field scanning optical microscope (NSOM) for obtaining high resolution lateral topographical images as well as for mapping the spectroscopic and optical properties of a sample below the diffraction limit of light have made it an attractive research field for most researchers dealing with optical characteristics of materials in nano scales. The apertured NSOM technique involves confining light into an aperture of sub-wavelength size and using it to illuminate a sample maintained at a distance equal to a fraction of the sub-wavelength aperture (near-field region). In this article, we present a setup for developing NSOM using a cantilever with a sub-wavelength aperture at the tip. A single laser is used for both cantilever deflection measurement and near-field sample excitation. The laser beam is focused at the apex of the cantilever where a portion of the beam is reflected and the other portion goes through the aperture and causes local near-field optical excitation of the sample, which is then raster scanned in the near-field region. The reflected beam is used for an optical beam deflection technique that yields topographical images by controlling the probe-sample in nano-distance. The fluorescence emissions signal is detected in far-field by the help of a silicon avalanche photodiode. The images obtained using this method show a good correlation between the topographical image and the mapping of the fluorescence emissions.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.552-556
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• 1997

The Direct Metal Prototyping(DMP), one of the rapid prototyping technologies, allows the manufacturing of three-dimensional metallic parts using metal powders directly from the CAD data. Laser power and scanning speed are the most important variables of the process. The objective of this study is to obtain the design data for laser power and scanning speed to bond metal powders effectively using the finite element method. To obtain the design values, a numerical analysis considering two-dimensional heat transfer during the sintering of metal powder layers of the process was performed. The laser beam has been modeled to have directionality in its heat flux distribution, i. e., in the scanning direction a Gaussian beam mode distribution has been assumed and in the thickness direction a square beam mode distribution. The three-dimensional irregular distribution of metal powders of the powder layer is idealized as two-dimensional distribution in which metal powders are located regularly and periodically on the plate. In this study the design values of laser power vs scanning speed have been obtained. Temperature distribution and temperature variation of the powder layers with respect to time have been predicted. The commputed dsign data will be useful in determining the initial conditions of the process.

• Nuclear Engineering and Technology
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• 제46권4호
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• pp.521-528
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• 2014

The surface modification of engineering materials by laser beam scanning (LBS) allows the improvement of properties in terms of reduced wear, increased corrosion resistance, and better strength. In this study, the laser beam scan method was applied to produce an oxide dispersion strengthened (ODS) structure on a zirconium metal surface. A recrystallized Zircaloy-4 alloy sheet with a thickness of 2 mm, and $Y_2O_3$ particles of $10{\mu}m$ were selected for ODS treatment using LBS. Through the LBS method, the $Y_2O_3$ particles were dispersed in the Zircaloy-4 sheet surface at a thickness of 0.4 mm, which was about 20% when compared to the initial sheet thickness. The mean size of the dispersive particles was 20 nm, and the yield strength of the ODS treated plate at $500^{\circ}C$ was increased more than 65 % when compared to the initial state. This strength increase was caused by dispersive $Y_2O_3$ particles in the matrix and the martensite transformation of Zircaloy-4 matrix by the LBS.

• 한국의학물리학회지:의학물리
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• 제27권4호
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• pp.267-271
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• 2016

In this study, we present the commissioning and validation results of a dedicated scanning nozzle. The dedicated scanning nozzle is installed in one of the two gantry treatment rooms at Samsung Proton Therapy Center. Following a successful completion of the acceptance test, the commissioning process including the beam data measurement for treatment planning system has been conducted. Extended measurements have been conducted as a validation of the clinical performance of the nozzle and various quality assurance protocols have been prepared.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 추계학술대회논문집
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• pp.841-844
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• 2003

In the semiconductor and the optical industry a new transport system which can replace the conventional sliding system is required. These systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system can solve these problem. In this paper, the vibration behavior of flexural beam in the ultrasonic transport system is verified using Laser Scanning Vibrometer. The experiments for verifying vibration are performed in three conditions such as in the maximum transport speed, in the zero speed, and in the change of transport direction.

• 대한전자공학회논문지
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• 제23권2호
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• pp.257-263
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• 1986

A laser scanner utilizing a computer-generated hologram(CGH) as beam deflector is reported. The CGH optical element has been used mainly for under-filled scanning. Here, a CGH optical element for overfilled scanning is proposed. It can achieve, under the same limitation of fabrication accuracy, better resolution and longer scan length than those for under-filled scanning. Measured scanning characteristics of the laser scanner show the scan length of 40 cm and the beam diameter of 100\ulcorner, where the designed minimum distance between the lines of CGH is 8\ulcorner.

• 한국정밀공학회지
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• 제23권12호
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• pp.122-127
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• 2006

This paper reports on the development of carbon nanotube tip modified with focused ion beam(FIB). We used an electric field which causes dielectrophoresis, to align and deposit CNTs on a metal-coated canning Probe Microscope (SPM) tip. Using the CNT attached SPM tip, we have obtained an enhanced resolution and wear property compared to that from the bare silicon tip through the scanning of the surface of the bio materials. The carbon nanotube tip was aligned toward the source of the ion beam allowing their orientation to be changed at precise angles. By this technique, metal coated carbon nanotube tips that are several micrometer in length are prepared for SPM.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1992년도 추계학술대회 논문집
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• pp.266-270
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• 1992

In this study an active vision system using a laser range finder is proposed for the navigation of a mobile robot in unknown environment. The laser range finder consists of a slitted laser beam generator, a scanning mechanism, CCD camera, and a signal processing unit. A laser beam from laser source is slitted by a set of cylindrical lenses and the slitted laser beam is emitted up and down and rotates around the robot by the scanning mechanism. The image of laser beam reflected on the surface of an object is engraved on the CCD array. A high speed image processing algorithm is proposed for the real-time navigation of the mobile robot. Through experiments it is proved that the accurate and real-time recognition of environment is able to be realized using the proposed laser range finder.