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Quantitative Analysis of Ultrathin SiO2 Interfacial Layer by AES Depth Profilitng

  • Soh, Ju-Won;Kim, Jong-Seok;Lee, Won-Jong
    • The Korean Journal of Ceramics
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    • v.1 no.1
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    • pp.7-12
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    • 1995
  • When a $Ta_O_5$ dielectric film is deposited on a bare silicon, the growth of $SiO_2$ at the $Ta_O_5$/Si interface cannot be avoided. Even though the $SiO_2$ layer is ultrathin (a few nm), it has great effects on the electrical properties of the capacitor. The concentration depth profiles of the ultrathin interfacial $SiO_2$ and $SiO_2/Si_3N_4$ layers were obtained using an Auger electron spectroscopy (AES) equipped with a cylindrical mirror analyzer (CMA). These AES depth profiles were quantitatively analyzed by comparing with the theoretical depth profiles which were obtained by considering the inelastic mean free path of Auger electrons and the angular acceptance function of CMA. The direct measurement of the interfacial layer thicknesses by using a high resolution cross-sectional TEM confirmed the accuracy of the AES depth analysis. The $SiO_2/Si_3N_4$ double layers, which were not distinguishable from each other under the TEM observation, could be effectively analyzed by the AES depth profiling technique.

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Mineralogical Chemistry of Granitoids and Pegmatites in the Sangdong and the UIchin Areas (상동 및 울진지역 화강암질암과 페그마타이트의 광물화학)

  • Chon, Hyo-Taek;Son, Chang-Il
    • Economic and Environmental Geology
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    • v.28 no.1
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    • pp.33-41
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    • 1995
  • Tin mineralizations in South Korea have been found only in the Ulchin and the Sangdong areas. The Wangpiri and the Yuchang Sn pegmatites appear to be in close spatial and genetical relation to the Wangpiri granitoid in the Ulchin area, and the Soonkyeong Sn pegmatite be in close association with the Nonggeori granites in the Sangdong area from geochemical viewpoint. The electron-microprobe analysis of muscovite, biotite, tourmaline and cassiterite from the granitoids and pegmatites in the Ulchin and the Sangdong areas has revealed a distinct differences of geochemical compositions. The Wangpiri and the Yuchang Sn pegmatites show an enrichment of MnO and a depletion of $TiO_2$, FeO and MgO in comparison with the Soonkyeong Sn pegmatite. This result coincides with the geochemical compositions of granitoid rocks in these areas. Enrichment of MnO and depletion of $TiO_2$ FeO and MgO are characteristic in muscovite, biotite and tourmaline of pegmatites compared with those of granitoids. These geochemical differences of muscovite, biotite and tourmaline between granitoids and pegmatites in these areas implies that pegmatites are more fractionated than granitoids.

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ZnO thin film deposition at low temperature using ALD (ALD를 이용한 저온에서의 ZnO 박막 증착)

  • Kim, H.S.
    • Journal of the Korean Vacuum Society
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    • v.16 no.3
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    • pp.205-209
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    • 2007
  • ZnO thin films were deposited on a Si wafer and a soda lime glass using atomic layer deposition(ALD). The substrate temperature were between $130^{\circ}C{\sim}150^{\circ}C$. The deposition rate of the ZnO film was measured to be $2.72{\AA}$ per cycle. The films were analyzed using field emission scanning electron microscopy(FESEM), X-ray diffractometer(XRD), and Auger electron spectroscopy(AES). Impurity-free ZnO thin films were obtained and the crystallinity was found to be dependant upon the substrate temperature.

Homeotropic Alignment Effect of a Nematic Liquid Crystal on Oblique Deposited SiOx Thin-film with e-beam Evaporation

  • Choi, Dai-Seub
    • Transactions on Electrical and Electronic Materials
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    • v.8 no.6
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    • pp.274-277
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    • 2007
  • In this study, liquid crystal(LC) aligning capabilities for homeotropic alignment on the $SiO_x$ thin film by electron beam evaporation method were investigated. Also, the control of pretilt angles and thermal stabilities of the nematic liquid crystal(NLC) treated on $SiO_x$ thin film were investigated. A high pretilt angle of about $86.5^{\circ}$ was obtained, and also the suitable pretilt angle of the NLC on the $SiO_x$ thin film at $10{\sim}50nm$ thickness with e-beam evaporation can be achieved. The uniform LC alignment and good thermal stabilities on the $SiO_x$ thin film surfaces with electron beam evaporation can be achieved. It is considered that the LC alignment on the $SiO_x$ thin film by electron beam evaporation is attributed to elastic interaction between LC molecules and micro-grooves at the $SiO_x$ thin film surface created by evaporation.

Interaction of Co/Ti Bilayer with $SiO_2$ Substrate ($SiO_2$와 Co/Ti 이중층 구조의 상호반응)

  • 권영재;이종무;배대록;강호규
    • Journal of the Korean Vacuum Society
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    • v.7 no.3
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    • pp.208-213
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    • 1998
  • Silicidation of the Co/Ti/Si bilayer system in which Ti is used as epitaxy promoter for $CoSi_2$has recently received much attention. The Co/Ti bilayer on the spacer oxide of gate electrode must be thermally stable at high temperatures for a salicide transistor to be fabricated successfully. In the $SiO_2$substrate was rapid-thermal annealed. The Sheet resistances of the Co/Ti bilayer increased substantially after annealing at $600^{\circ}C$, which is due to the agglomeration of the Co layer to reduce the interface energy between the Co layer and the $SiO_2$substrate. In the bilayer system insulating Ti oxide stoichiometric Ti oxide and silicide were not found after annealing.

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Dissolution Phenomenon in BaO-B2O3-ZnO Glass System by Acid Etching (산 에칭에 의한 BaO-B2O3-ZnO계 유리조성물의 용출 현상)

  • Kim, Jae-Myung;Hong, Kyung-Jun;Kim, Nam-Suk;Kim, Hyung-Sun
    • Journal of the Korean Ceramic Society
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    • v.43 no.1 s.284
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    • pp.33-37
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    • 2006
  • For producing the fine ribs structure of plasma display panel, the metal ions of barrier materials during the etching process should be understood on the etching mechanism with etching conditions. Etching was done on bulk glasses of the $BaO_B_2O_3-ZnO$ system with $HNO_3$ solution at $40^{\circ}C$. The surface structure of glasses and ion dissolution were analyzed by ICP (Inductive Coupled Plasma measurement). The structure and surface of the etched bulk glass were investigated by using scanning electron microscopy and nanoindenter. As a result, Ba (3-35 ppm/min) and Zn (2-27 ppm/min) ions as major components were leached in the solution and the leached layers were found to be phosphor-rich surface layers. A decrease of the bridge oxygen and relative increase of non bridge oxygen in the etched glass were found by X-ray photoelectron spectroscopy.

Effect of Calcining Temperature on the Sintering Behaviors and Microwave Dielectric Properties of $Ba(Mg_{1/3}Ta_{2/3})O_3$ Ceramics (하소온도의 변화에 따른 $Ba(Mg_{1/3}Ta_{2/3})O_3$계 세라믹스의 소결 거동과 마이크로파 유전특성)

  • 이정아;김정주;이희영;김태홍;최태구
    • Journal of the Korean Ceramic Society
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    • v.31 no.12
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    • pp.1561-1569
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    • 1994
  • Effect of calcining temperature on the sintering behaviors and microwave dielectric properties of BMT[Ba(Mg1/3Ta2/3)O3] ceramics was studied. The calcining temperatures were varied from 80$0^{\circ}C$ to 130$0^{\circ}C$, respectively. It was found that, as calcining temperature lowered below 125$0^{\circ}C$, second phase such as Ba5Ta4O15 phases started to appear in calcined powder with unreacted powders. After sintering, exaggerately grown Ba5TaO3 phase could be found amang the uniform BMT grains in sintered body. Basis on the infiltration experiment, Ba0.05TaO3 phase should be formed by reaction of BMT grain and BaO-MgO eutectic liquid. But increase of calcining temperature above 125$0^{\circ}C$, there was not any second phase or unreated component in calcined powder and sintered body. As result, low calcining temperature led to precipitation of second phase in specimen and resulted decrease of Q value of BMT ceramics.

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Identificaiton of the dITP- and XTP-Hydrolyzing Protein from Escherichia coli

  • Chung, Ji-Hyung;Park, Hyun-Young;Lee, Jong-Ho;Jang, Yang-Soo
    • BMB Reports
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    • v.35 no.4
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    • pp.403-408
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    • 2002
  • A hypothetical 21.0 kDa protein (ORF O197) from Escherichia coli K-12 was cloned, purified, and characterized. The protein sequence of ORF O197(termed EcO197) shares a 33.5% identity with that of a novel NTPase from Methanococcus jannaschii. The EcO197 protein was purified using Ni-NTA affinity chromatography, protease digestion, and gel filtration column. It hydrolyzed nucleoside triphosphates with an O6 atom-containing purine base to nucleoside monophosphate and pyrophosphate. The EcO197 protein had a strong preference for deoxyinosine triphosphate (dITP) and xanthosine triphosphate (XTP), while it had little activity in the standard nucleoside triphosphates (dATP, dCTP, dGTP, and dTTP). These aberrant nucleotides can be produced by oxidative deamination from purine nucleotides in cells; they are potentially mutagenic. The mutation protection mechanisms are caused by the incorporation into DNA of unwelcome nucleotides that are formed spontaneously. The EcO197 protein may function to eliminate specifically damaged purine nucleotide that contains the 6-keto group. This protein appears to be the first eubacterial dITP-and XTP-hydrolyzing enzyme that has been identified.

A Study on the Leachate Characteristics of Heavy Metals from MSW Bottom Ash Solidified with Stabilizing Reagents (안정화제를 첨가한 생활폐기물 소각시설 바닥재의 중금속 용출특성에 관한 연구)

  • Lim, Jong-Wan;Dong, Jong-In
    • Applied Chemistry for Engineering
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    • v.26 no.6
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    • pp.692-697
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    • 2015
  • In this study, the reduction efficiencies of leachate heavy metal levels were investigated by adding $Al_2O_3$ and CaO to the bottom ash to observe their effects on the heavy metals leachate reduction efficiency. The ratio of $Al_2O_3$ and CaO contents were varied by 10~40% (W/W) alongside different curing time of 7 and 28 days. The reduction efficiencies of leachate heavy metal levels were estimated to be 69.3% for Cu and 52.1% for Pb during the curing time of 7 days. For the curing time of 28 days, the efficiencies changed to 85.2 and 100% for Cu and Pb, respectively. It was thus confirmed that the high reduction efficiency could be obtained as the curing time increased.

Effect of $Li_4Ti_5O_{12}$ coating layer on capacity retention of $LiMn_2O_4$ as cathode materials of lithium ion secondary batteries for HEV application (HEV용 리튬 이차전지 양극물질 $LiMn_2O_4$$Li_4Ti_5O_{12}$ 코팅에 따른 영향)

  • Wai, Yin-Loo;Choi, Byung-Hyun;Jee, Mi-Jung;Lee, Dae-Jin;Shin, Jae-Su;Song, Kwang-Ho
    • 한국신재생에너지학회:학술대회논문집
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    • 2007.11a
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    • pp.125-128
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    • 2007
  • In these recent years, low cost and stable battery electrode materials have been studied for HV/HEV application. Spinel cathode material $LiMn_2O_4$ is widely studied as a promising cathode material of lithium ion secondary batteries because of it is low cost, easily to be prepared and capable to be operated in high voltage range. In this study, $LiMn_2O_4$ was undergoing surface modification with spinel lithium titanium oxide by sol-gel method in order to enhance its capacity retention. Properties of both unmodified and surface-modified $LiMn_2O_4$ were characterized by XRD, SEM, particle size analyzer while their cycling performance was tested with charge and discharge tester.

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