• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.3
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• pp.195-202
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• 1998

The LPCVD system of batch type for the massproduction of semiconductor fabrication has a problem of phosphorous concentration uniformity in the boat. In this paper we study an improvement of the uniformity for phosphorous concentration and sheet resistance. These property was improved by using the nitrogen process and modified long nozzle for gas injection tube in the doped polysilicon deposition system. The phosphorous concentration and its uniformity for polysilicon film are measured by XRF(X-ray Fluorescence) for the conventional process condition and nitrogen process. In conventional process condition, the phosphorous concentration, it uniformity and sheet resistance for polysilicon film are in the range of 3.8~5.4$\times$10\ulcorner atoms/㎤, 17.3% and 59~$\Omega$/ , respectively. For the case of nitrogen process the corresponding measurements exhibited between 4.3~5.3$\times$10\ulcorner atoms/㎤, 10.6% and 58~81$\Omega$/ . We find that in the nitrogen process the uniformity of phosphorous concentration improved compared with conventional process condition, however, the sheet resistance in the up zone of the boat increased about 12 $\Omega$/ . In modified long nozzle, the phosphorous concentration, its uniformity and sheet resistance for polysilicon films are in the range of 4.5~5.1$\times$10\ulcorner atoms/㎤, 5.3% and 60~65$\Omega$/ respectively. Annealing after $N_2$process gives the increment of grain size and the decrement of roughness. Modification of nozzle gives the increment of injection amount of PH$_3$. Both of these suggestion result in the stable phosphorous concentration and sheet resistance. The results obtained in this study are also applicable to process control of batch type system for memory device fabrication.

• KSBB Journal
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• v.15 no.2
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• pp.181-187
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• 2000

The production of heterologous protein using GAL promoter in conventional S. cerevisiae has several problems to s이ve for c commercialization. In this research, S. cerevisiae mutant(reg1-501, gaI1), which cannot use galactose and has alleviated g glucose repression level, is used as host for optimizing induction of GAL promoter. In this experiment, the effects of specific g growth rate on specific recombinant protein expression rate were tested in both cases and optimum fed batch fermentation m method was obtained in both cases. Through these experiments, optimum condition of recombinant protein production by G GAL promoter using S. cerevisiae mutant (reg1-501, gal1) were found.

• Resources Recycling
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• v.14 no.2
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• pp.28-32
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• 2005

By using thermal decomposition method, the preliminary experiments for recovery of metallic Ga from GaAs scraps produced in the manufacturing of compound semiconductors were carried out in laboratory(200 g/batch) scales. From these results, decomposition appratus with packed tower was constructed in commercial scale(30 kg/batch). The decomposition rate of GaAs increased with raising decomposition temperature, but the yield of Ga decreased over 1000$^{\circ}C. As a result, the optimum decomposition temperature was 1000~1050$^{\circ}C when the pressure of decomposition reactor was 2~2.5${\times}10^{-2} mmHg, and the yield of Ga was about 89 wt.%. The commercial decomposition apparatus was designed with packed tower because the partial pressure of As in vapor state was not reduced even if the temperature of As vapor was decreased. The recovery yield of Ga from GaAs scraps in large scale experiment showed 99%.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.45 no.4
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• pp.53-60
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• 2022

In a group-testing method, instead of testing a sample, for example, blood individually, a batch of samples are pooled and tested simultaneously. If the pooled test is positive (or defective), each sample is tested individually. However, if negative (or good), the test is terminated at one pooled test because all samples in the batch are negative. This paper considers a queueing system with a two-stage group-testing policy. Samples arrive at the system according to a Poisson process. The system has a single server which starts a two-stage group test in a batch whenever the number of samples in the system reaches exactly a predetermined size. In the first stage, samples are pooled and tested simultaneously. If the pooled test is negative, the test is terminated. However, if positive, the samples are divided into two equally sized subgroups and each subgroup is applied to a group test in the second stage, respectively. The server performs pooled tests and individual tests sequentially. The testing time of a sample and a batch follow general distributions, respectively. In this paper, we derive the steady-state probability generating function of the system size at an arbitrary time, applying a bulk queuing model. In addition, we present queuing performance metrics such as the offered load, output rate, allowable input rate, and mean waiting time. In numerical examples with various prevalence rates, we show that the second-stage group-testing system can be more efficient than a one-stage group-testing system or an individual-testing system in terms of the allowable input rates and the waiting time. The two-stage group-testing system considered in this paper is very simple, so it is expected to be applicable in the field of COVID-19.

• Korean Journal of Materials Research
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• v.33 no.7
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• pp.265-272
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• 2023

In this study, the synthesis of nitrobenzene was carried out using sulfated silica catalyst. The study delved into H₂SO₄/SiO₂ as a solid acid catalyst and the effect of its weight variation, as well as the use of a microwave batch reactor in the synthesis of nitrobenzene. SiO₂ was prepared using the sol-gel method from TEOS precursor. The formed gel was then refluxed with methanol and calcined at a temperature of 600 ℃. SiO₂ with a 200-mesh size was impregnated with 98 % H₂SO₄ by mixing for 1 h. The resulting 33 % (w/w) H₂SO₄/SiO₂ catalyst was separated by centrifugation, dried, and calcined at 600 ℃. The catalyst was then used as a solid acid catalyst in the synthesis of nitrobenzene. The weights of catalyst used were 0.5; 1; and 1.5 grams. The synthesis of nitrobenzene was carried out with a 1:3 ratio of benzene to nitric acid in a microwave batch reactor at 60 ℃ for 5 h. The resulting nitrobenzene liquid was analyzed using GC-MS to determine the selectivity of the catalyst. Likewise, the use of a microwave batch reactor was found to be appropriate and successful for the synthesis of nitrobenzene. The thermal energy produced by the microwave batch reactor was efficient enough to be used for the nitration reaction. Reactivity and selectivity tests demonstrated that 1 g of H₂SO₄/SiO₂ could generate an average benzene conversion of 40.33 %.

• Journal of Adhesion and Interface
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• v.7 no.4
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• pp.28-31
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• 2006

Due to the miniaturization of MEMS and microelectronics the joining techniques also have to be adjusted. The dosing technology with viscous adhesives does not permit reproducible adhesive volumes, which are clearly under a nano-liter. A nano-liter means however a diameter of bonding area within the range of several 100 micrometers. Additional, viscous adhesives need a certain time, until they are cross linked or cured. The problem especially in the MEMS is the initial strength, since it gives the time, which is needed for joining an individual adhesive joint. The time up to the initial strength is with viscous, also with fast curing systems, within the range of seconds until minutes. Until the reach of the initial strength, the micro part must be fixed/held. Without sufficient adjustment/clamping it can come to a shift of the micro parts. Also existing micro adhesive bonding processes are not batch able, i.e. the individual adhesive joints of a micro system must be processed successively. In the context of the WCARP III 2006 now an innovative method is to be presented, how it is possible to solve the existing problems with micro bonding. i.e. a method is presented, which is batch able, possess a minimum joining geometry with some micrometers and is so fast that no problems with the initial strength arise. It is a method, which could revolutionize the sticking technology in the micro system engineering.

• Journal of Aerospace System Engineering
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• v.10 no.3
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• pp.63-69
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• 2016

The properties of composite materials, when compared to those of metallic materials, are highly variable due to many factors including the batch-to-batch variability of raw materials, the prepreg manufacturing process, material handling, part-fabrication techniques, ply-stacking sequences, environmental conditions, and test procedures. It is therefore necessary to apply reliable statistical-analysis techniques to obtain the design allowables of composite materials. A new composite-material qualification process has been developed by the Advanced General Aviation Transport Experiments (AGATE) consortium to yield the lamina-design allowables of composite materials according to standardized coupon-level tests and statistical techniques; moreover, the generated allowables database can be shared among multiple users without a repeating of the full qualification procedure by each user. In 2005, NASA established the National Center for Advanced Materials Performance (NCAMP) with the purpose of refining and enhancing the AGATE process to a self-sustaining level to serve the entire aerospace industry. In this paper, the statistical techniques and procedures for the generation of the allowables of aerospace composite materials will be discussed with a focus on the pooling-across-environments method.

• Korean Chemical Engineering Research
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• v.46 no.3
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• pp.585-597
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• 2008

The aim of this study was to find an analytic solution to the problem of determining the optimal capacity (lot-size) of a batch-storage network to meet demand for a finished product in a system undergoing random failures of operating time and/or batch material. The superstructure of the plant considered here consists of a network of serially and/or parallel interlinked batch processes and storage units. The production processes transform a set of feedstock materials into another set of products with constant conversion factors. The final product demand flow is susceptible to short-term random variations in the cycle time and batch size as well as long-term variations in the average trend. Some of the production processes have random variations in product quantity. The spoiled materials are treated through regeneration or waste disposal processes. All other processes have random variations only in the cycle time. The objective function of the optimization is minimizing the total cost, which is composed of setup and inventory holding costs as well as the capital costs of constructing processes and storage units. A novel production and inventory analysis, the PSW (Periodic Square Wave) model, provides a judicious graphical method to find the upper and lower bounds of random flows. The advantage of this model is that it provides a set of simple analytic solutions while also maintaining a realistic description of the random material flows between processes and storage units; as a consequence of these analytic solutions, the computation burden is significantly reduced.

• Proceedings of the Korea Society for Industrial Systems Conference
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• 1998.03a
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• pp.129-135
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• 1998

The present automated manufacturing environment is very different when the classical statiscal process control method based on batch processing were used. Therefore these must be replaced by automated statiscal process control method. In this point of view , this study intends to develop the automated statiscal process control method which can be implemented in the proesent automated manufacturing environment . Specially this study suggested modified control limit line and developed the rule to identify the special cause of the manufacturing process in the aspect of the ppm manegement.

• Proceedings of the Korean Institute of Communication Sciences Conference
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• 1986.04a
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• pp.156-159
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• 1986

In this paper, we discribed characteristics of two buffer which are limited area in packet communication networks, we selected JSQ(Join the Shortest Queue) method for buffrt management and compared it with single, random methods. The blocking probabilities of massage using JSQ method is decreased about (2.5 times) in compared with that of single queue method and (0.5 times) in random selection method. This results could be used in designing packet switching communication networks.