• Title/Summary/Keyword: Barrier system

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Investigation of Vanadium-based Thin Interlayer for Cu Diffusion Barrier

  • Han, Dong-Seok;Park, Jong-Wan;Mun, Dae-Yong;Park, Jae-Hyeong;Mun, Yeon-Geon;Kim, Ung-Seon;Sin, Sae-Yeong
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.05a
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    • pp.41.2-41.2
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    • 2011
  • Recently, scaling down of ULSI (Ultra Large Scale Integration) circuit of CMOS (Complementary Metal Oxide Semiconductor) based electronic devices become much faster speed and smaller size than ever before. However, very narrow interconnect line width causes some drawbacks. For example, deposition of conformal and thin barrier is not easy moreover metallization process needs deposition of diffusion barrier and glue layer. Therefore, there is not enough space for copper filling process. In order to overcome these negative effects, simple process of copper metallization is required. In this research, Cu-V thin alloy film was formed by using RF magnetron sputter deposition system. Cu-V alloy film was deposited on the plane $SiO_2$/Si bi-layer substrate with smooth and uniform surface. Cu-V film thickness was about 50 nm. Cu-V layer was deposited at RT, 100, 150, 200, and $250^{\circ}C$. XRD, AFM, Hall measurement system, and XPS were used to analyze Cu-V thin film. For the barrier formation, Cu-V film was annealed at 200, 300, 400, 500, and $600^{\circ}C$ (1 hour). As a result, V-based thin interlayer between Cu-V film and $SiO_2$ dielectric layer was formed by itself with annealing. Thin interlayer was confirmed by TEM (Transmission Electron Microscope) analysis. Barrier thermal stability was tested with I-V (for measuring leakage current) and XRD analysis after 300, 400, 500, 600, and $700^{\circ}C$ (12 hour) annealing. With this research, over $500^{\circ}C$ annealed barrier has large leakage current. However V-based diffusion barrier annealed at $400^{\circ}C$ has good thermal stability. Thus, thermal stability of vanadium-based thin interlayer as diffusion barrier is good for copper interconnection.

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The Evaluation of Geosynthetic Clay Liner as a barrier layer for the Final Cover System in landfill (폐기물 매립지 최종복토 차단층으로서 Geosynthetic Clay Liner 적용성 평가)

  • Lee, Jung-Lan;Moon, Chul-Hwan;Jung, Chan-Kee;Lee, Jai-Young
    • Journal of the Korean Geosynthetics Society
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    • v.3 no.2
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    • pp.23-29
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    • 2004
  • One of the most important concern in the design of barrier layer in to protect the water through the landfill. The barrier layer consists of a single compacted clay liner(CCL) or a composite liner with high density polyethylene(HDPE). The construction of barrier layer at the edge of cover system usually has some problems because of steep slope in the landfill. In this study the authors evaluate the geosynthetic clay liner(GCL) as a barrier layer at the edge of the final cover system in landfill. The GCLs were simulated the stability of slope, the HELP(Hydrologic Evaluation of Landfill Performance) and the durability of environmental situation. As the results, the GCL has more stable than the CCL. Therefore, the authors suggest that the GCL in good for the barrier layer of the final cover system in the landfill.

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Permeability Characteristics of Geosynthetics Vertical Barrier Connections for the Prevention of Contaminants Diffusion (오염물질 확산방지를 위한 토목섬유 연직차수벽 연결부의 투수성능 평가)

  • Park, Jeong Jun
    • Journal of the Society of Disaster Information
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    • v.18 no.1
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    • pp.1-9
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    • 2022
  • Purpose: In this study, we used hydrophilic waterstop used in geosynthetics vertical barrier system to evaluate the performance of impermeability under sealing conditions. Method: ASTM D5887 and ASTM D6766 were applied to determine the capability of the connection during the geosynthetics vertical barrier system. Hydrophilic waterstop was saturated in each solution and the weight, thickness, and volume changes were analyzed over elapsed time. Hydrophilic waterstop was installed at the geosynthetics vertical barrier system connection to evaluate the permeability characteristics. Results: As the expansion reaction time of hydrophilic waterstop increased relatively under saline conditions, the decrease in permeability also showed a smaller decrease in fresh water. Furthermore, the method of engagement of the geosynthetics vertical barrier system showed somewhat better performance of the impermeability due to the large pressure resistance caused by the roll joint type than interlock type. Conclusion: In urban pollutants, which can estimate the outflow of pollutants such as oil storage facilities and industrial complexes, proactive response technologies that can prevent the contaminant diffusion can significantly reduce the damage.

Effect of Pt on the High Temperature Stability of NiCoCrAlY or NiAl Bond Coat in the Thermal Barrier Coating System (NiCoCrAlY 및 NiAl bond coat를 사용한 Thermal Barrier Coating의 고온안정성에 미치는 Pt의 영향)

  • Ku Seongmo;Kim Gil Moo
    • Korean Journal of Materials Research
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    • v.15 no.6
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    • pp.375-381
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    • 2005
  • High temperature oxidation behavior of thermal barrier coating (TBC) system (IN738 substrate + NiCoCrAlY or NiAl bond coat with or without Pt + yttria stabilized zirconia) prepared by air plasma spray (APS) process has been studied in order to understand the effect of Pt addition to bond coat on the stability of TBC system. Specimens were oxidized in thermal cycling and isothermal oxidation test at $1100^{\circ}C$. The Pt addition in TBC system with NiCoCrAlY bond coat showed a longer life time compared to that without addition of Pt. Pt addition to TBC system is believed to help the formation of more stable thermally grown oxide, $Al_2O_3$, at the TBC/bond coat interface, leading to a longer lifetime of TBC system.

A Study on Certification Method of Health and Barrier Free Environment by the BIM for Aged Person - With Sanitary Facilities of Elderly Housing Facility - (노인 주거시설의 위생공간을 중심으로 고령자의 건강과 무장애 생활환경을 위한 인증 방법에 관한 연구 - BIM기반 설계 및 응용을 통한 방법을 중심으로 -)

  • Hong, Sa-Chul;Paik, Jin-Kyung;Kim, Suk-Tae
    • Korean Institute of Interior Design Journal
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    • v.26 no.3
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    • pp.13-24
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    • 2017
  • Promoting barrier-free living environments is necessary in residential facilities on which senior citizens rely most of their lives. Safety of elder people can be reassured by a certification system based on the existing barrier-free certification program in public facilities. The range of certification does not cover all living area, but is limited to the bathroom, which is a sanitary space. Given the nature of BIM modeling, an existing multi-family building was selected and modeled, as the certification process requires all the necessary information and various viewport. BIM modeling of the bathroom was conducted in accordance with the requirements of the certification for barrier-free living environment. The results suggested that there is a need for a removal of thresholds, larger doors, better selection of finishing materials, sufficient room for a wheelchair, larger space next to the toilet, and the availability of an emergency bell and grab bars. Such information supports the potentials of BIM modeling, and it is expected that an automated certification system would be established in the foreseeable future.

Estimation of Fatigue Characteristics Using Weibull Statistical Analysis with Aramid Fiber on LNGC Secondary Barrier (LNGC 2차 방벽에 적용된 Aramid 섬유의 Weibull 통계 분석을 이용한 피로특성 평가)

  • Park, Jin Hyeong;Oh, Dong Jin;Kim, Min Gyu;Kim, Myung Hyun
    • Journal of the Society of Naval Architects of Korea
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    • v.54 no.5
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    • pp.415-420
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    • 2017
  • Insulation systems in Liquefied Natural Gas Carriers (LNGC) are vulnerable to sloshing impact and fatigue loads because of waves. If gas leaks into the primary barrier, the Flexible Secondary Barrier (FSB) prevents the leakage of gas in this system. Fatigue strength of the FSB largely depends on the behavior of composite materials. In this study, a new system is applied to the FSB using aramid fiber to improve the fatigue strength of the secondary barrier, with the intention of replacing conventional E-glass fibers. The manufacturing method involved varying the ratio of the aramid fiber to the E-glass fiber for optimum design of the FSB. The fatigue tests results of the secondary barrier using aramid fiber were superior to that using E-glass fiber. The statistical analysis is performed to obtain the fatigue test results and estimate the probability of failure as well as the design guideline of LNGC secondary barriers.

Environmental Evaluation of Protein Based Oxygen High Barrier Film Using Life Cycle Assessment (단백질 기반 Oxygen High Barrier 소재의 전과정평가를 통한 환경 영향 측정)

  • Kang, DongHo;Shin, YangJai
    • KOREAN JOURNAL OF PACKAGING SCIENCE & TECHNOLOGY
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    • v.25 no.1
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    • pp.1-10
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    • 2019
  • Environmental evaluation of two different oxygen high barrier films were performed using life cycle assessment. One of the films (traditional film) was composed of aluminum oxide coated PET film, ink, LDPE and LLDPE. Another film (new film) was consists of PET, ink, protein based coating material, LDPE, LLDPE. Main layer to achieve the high oxygen barrier for traditional film was aluminum oxide coated PET film, whereas the protein based coating material act as oxygen barrier layer for new film. Functional unit of this study was 1000 pouches made of traditional and new film. System boundary was factory to gate. The results of this study revealed that the new film shows better environmental performance for most of impact indicator than traditional film, except marine eutrophication and fine particulate matter formation due to extra coating process in new film system.

A Study on Improvement of Barrier Free Door Standard (Barrier Free 출입문 규격기준 개선에 관한 연구)

  • Kim, In-Bae;Kim, Won-pil
    • Journal of The Korea Institute of Healthcare Architecture
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    • v.23 no.4
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    • pp.7-15
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    • 2017
  • Purpose: The Korean government has implemented a Barrier Free Certification System since 2008 to create a secure and convenient environment for the socially disadvantaged. The drastic increase in the number of BF-certification facilities is expected due to the revision of the system and increasing the number of certification institutions. An analysis of individual evaluation items needs to be made for the BF-Certification with public confidence. Method: Korean standard, International Standard(ISO/FDIS 21542, 2011), German Standard(DIN 18040-1, 2010), Austrian Standard(${\ddot{O}}NORM$ B 1600, 2017) and Swiss Standard(Norm SIA 500 / SN 521 500, 2009) were investigated and analyzed. A comprehensive improvement plan is proposed by comparing details of the aforementioned standards and the evaluation items of BF-Certification. Results: Many problems arise in applying existing Barrier-free standards due to changes in population structure, environmental change and the use of powered wheelchairs. International standards are being improved to solve these problems. The korean standards also require improving of the Barrier Free Law and Certification System, which reflect these trends. In korean cases, standards such as the size of the doors (width and height), the Unobstructed Manoeuvring Space and Clear Space at the Latch side of the Door are required to improve standards in accordance with international standards. In addition, the expression of laws and evaluation items of BF-Certification should be clearly defined. And the application of visual contrast standards for the enhancement of perceptions presented in international standards should be considered. Implication: Barrier Free related legal standards and evaluation items of BF-Certification that are used in Korea are required to be revised in consideration of social and environmental changes. Comprehensive improvements should be made through detailed review.

Simultaneous Formation of NiSi Contact and Cu Plug/Ti Barrier (NiSi 접촉과 Cu 플러그/Ti 확산방지층의 동시 형성 연구)

  • Bae, Kyoo-Sik
    • Korean Journal of Materials Research
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    • v.20 no.6
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    • pp.338-343
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    • 2010
  • As an alternative to the W plug used in MOSFETs, a Cu plug with a NiSi contact using Ta / TaN as a diffusion barrier is currently being considered. Conventionally, Ni was first deposited and then NiSi was formed, followed by the barrier and Cu deposition. In this study, Ti was employed as a barrier material and simultaneous formation of the NiSi contact and Cu plug / Ti barrier was attempted. Cu(100 nm) / Ti / Ni(20 nm) with varying Ti thicknesses were deposited on a Si substrate and annealed at $4000^{\circ}C$ for 30 min. For comparison, Cu/Ti/NiSi thin films were also formed by the conventional method. Optical Microscopy (OM), Scanning Probe Microscopy (SPM), X-Ray Diffractometry (XRD), and Auger Electron Microscopy (AES) analysis were performed to characterize the inter-diffusion properties. For a Ti interlayer thicker than 50 nm, the NiSi formation was incomplete, although Cu diffusion was inhibited by the Ti barrier. For a Ti thickness of 20 nm and less, an almost stoichiometric NiSi contact along with the Cu plug and Ti barrier layers was formed. The results were comparable to that formed by the conventional method and showed that this alternative process has potential as a formation process for the Cu plug/Ti barrier/NiSi contact system.

Aerodynamic performance of a novel wind barrier for train-bridge system

  • He, Xuhui;Shi, Kang;Wu, Teng;Zou, Yunfeng;Wang, Hanfeng;Qin, Hongxi
    • Wind and Structures
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    • v.23 no.3
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    • pp.171-189
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    • 2016
  • An adjustable, louver-type wind barrier was introduced in this study for improving the running safety and ride comfort of train on the bridge under the undesirable wind environment. The aerodynamic characteristics of both train and bridge due to this novel wind barrier was systematically investigated based on the wind tunnel tests. It is suggested that rotation angles of the adjustable blade of the louver-type wind barrier should be controlled within $90^{\circ}$ to achieve an effective solution in terms of the overall aerodynamic performance of the train. Compared to the traditional grid-type wind barrier, the louver-type wind barrier generally presents better aerodynamic performance. Specifically, the larger decrease of the lift force and overturn moment of the train and the smaller increase of the drag force and torsional moment of the bridge resulting from the louver-type wind barrier were highlighted. Finally, the computational fluid dynamics (CFD) technique was applied to explore the underlying mechanism of aerodynamic control using the proposed wind barrier.