• Title/Summary/Keyword: Barrier film

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Influence of post-annealing temperature on double layer ZTO/GZO deposited by magnetron co-sputtering

  • Oh, Sung Hoon;Cho, Sang Hyun;Jung, Jae Heon;Kang, Sae Won;Cheong, Woo Seok;Lee, Gun Hwan;Song, Pung Keun
    • Journal of Ceramic Processing Research
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    • v.13 no.spc1
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    • pp.140-144
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    • 2012
  • Ga-doped ZnO (GZO) was a limit of application on the photovoltaic devices such as CIGS, CdTe and DSSC requiring high process temperature, because it's electrical resistivity is unstable above 300 ℃ at atmosphere. Therefore, ZTO (zinc tin oxide) was introduced in order to improve permeability and thermal stability of GZO film. The resistivity of GZO (300 nm) single layer increased remarkably from 1.8 × 10-3Ωcm to 5.5 × 10-1Ωcm, when GZO was post-annealed at 400 ℃ in air atmosphere. In the case of the ZTO (150 nm)/GZO (150 nm) double layer, resistivity showed relatively small change from 3.1 × 10-3Ωcm (RT) to 1.2 × 10-2Ωcm (400 ℃), which showed good agreement with change of carrier density. This result means that ZTO upper layer act as a barrier for oxygen at high temperature. Also ZTO (150 nm)/GZO (150 nm) double layer showed lower WVTR compared to GZO (300 nm) single layer. Because ZTO has lower WVTR compared to GZO, ZTO thin film acts as a barrier by preventing oxygen and water molecules to penetrate on top of GZO thin film.

Diffusion and Thermal Stability Characteristics of W-B-C-N Thin Film (W-B-C-N 확산방지막의 특성 및 열적 안정성 연구)

  • Kim, Sang-Yoon;Kim, Soo-In;Lee, Chang-Woo
    • Journal of the Korean Magnetics Society
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    • v.16 no.1
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    • pp.75-78
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    • 2006
  • In case of contacts between semiconductor and metal in semiconductor circuits, they become unstable because of thermal budget. To prevent these problems, we use diffusion barrier that has a good thermal stability between metal and semiconductor. So we consider the diffusion barrier to prevent the increase of contact resistance between the interfaces of metals and semiconductors, and the increase of resistance and the reaction between the interfaces. In this paper we deposited tungsten boron carbon nitride (W-B-C-N) thin film on silicon substrate. The impurities of the $1000\;{\AA}-thick$ W-B-C-N thin films provide stuffing effect for preventing the inter-diffusion between metal thin films $(Cu-2000\;{\AA})$ and silicon during the high temperature $(700\~1000^{\circ}C)$ annealing process.

The Surface Energy Change of TAC Film Treated by an Atmospheric Pressure Plasma (대기압 플라즈마 처리에 의한 TAC 필름의 표면에너지 변화)

  • Lee, Chang-Ho;Jung, Do-Young;Park, Young-Jik;Song, Hyun-Jig;Lee, Kwang-Sik
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.23 no.12
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    • pp.184-190
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    • 2009
  • Tri-acetyl-cellulose(TAC) film surface was modified by atmospheric-pressure plasma technique to obtain the hydrophilic functional groups and improve the contact angle. TAC film was modified with N2 plasma ionized in dielectric barrier discharge(DBD) reactor under atmospheric pressure. We measured the change of the contact angle and the surface energy with respect to the plasma treatment conditions such as plasma treatment power, discharge gap and N2 gas flow rate. As the plasma treatment speed of 100[mm/sec], the plasma treatment power of 1.5[kW], discharge gap 2[mm] and the $N_2$ gas flow rate 140[LPM], the best contact angle and the highest surface energy were obtained. The degree of hydrophilization depended strongly on the plasma-treating time and discharge power.

NUMERICAL STUDY ON FILM-COOLING EFFECTIVENESS FOR VARIOUS FILM-COOLING HOLE SCHEMES (다양한 막냉각 홀 형상에 대한 막냉각 효율의 수치해석)

  • Kim, S.M.;Lee, K.D.;Kim, K.Y.
    • Journal of computational fluids engineering
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    • v.16 no.4
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    • pp.92-99
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    • 2011
  • In order to protect the turbine blade from working fluid of high temperature, many cooling techniques such as internal convection cooling, film cooling, impinging jet cooling and thermal barrier coating have been developed. With all other things, film-cooling has been widely used as the important alternative. In the present work, numerical analysis has been performed to investigate and to compare the film-cooling performance of various film-cooling hole schemes such as cylindrical, crescent, louver, and dumbbell holes. To analyze the turbulent flow and the film-cooling mechanism, three-dimensional Reynolds-averaged Navier-Stokes analysis has been performed with shear stress transport turbulence model. The validation of numerical results has been assessed in comparison with experimental data. The characteristics of fluid flow and the film-cooling performance for each shaped hole have been investigated and evaluated in terms of centerline, laterally averaged and spatially averaged film-cooling effectivenesses. Among the film cooling holes, the dumbbell shaped hole shows better film-cooling effectiveness than the other shaped holes. And the louver and cylindrical shaped hole show the worst film cooling performance, and concentrated flows on near the centerline only.

Fabrication of Three-Dimensional Reflective White Pattern using Dry-Film Resist

  • Jun, Hwa Joon;Na, Dae Gil;Kwon, Young Hoon;Kwon, Jin Hyuk
    • Journal of the Optical Society of Korea
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    • v.19 no.1
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    • pp.80-83
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    • 2015
  • White reflective patterns are very difficult to fabricate, due to the scattering and reflection of light, especially when the pattern size goes down to micron size. A reflective white barrier structure of height $50{\mu}m$ and width $80{\mu}m$ was fabricated using dry-film resist as an intermediate reverse pattern. The reverse dry-film resist pattern was coated with an $SiO_2$ layer by sputtering, to protect the resist from chemical attack by the radical molecules in UV white resin. The UV white resin was applied on the dry-film resist pattern and then cured with ultraviolet light. The fine three-dimensional reflective patterns were finished by removing the dry-film resist.

The Effect of Clay Concentration on Mechanical and Water Barrier Properties of Chitosan-Based Nanocomposite Films

  • Rhim, Jong-Whan
    • Food Science and Biotechnology
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    • v.15 no.6
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    • pp.925-930
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    • 2006
  • Chitosan-based nanocomposite films were prepared using a solution intercalation method incorporating varying amounts of organically modified montmorillonite (Cloisite 30B) from 0 to 30 wt%. The nanocomposite films prepared were optically clear despite a slight decrease in the transmittance due to the spatial distribution of nanoclay. X-ray diffraction patterns indicated that a certain degree of intercalation or exfoliation formed when the amount of clay in the film was low and that microscale tactoids formed when the clay content in the sample was high (more than 10 wt%). The tensile strength (TS) of the chitosan film increased when the clay was incorporated up to 10 wt% and then decreased with further increases in the clay content of the film. The elongation at break (E) increased slightly upon the addition of low levels of clay up to 5 wt% and then decreased with further increases in the amount of the clay in the film. The water vapor permeability (WVP) decreased exponentially with increasing clay content. The water solubility (WS) and swelling ratio (SR) of the nanocomposite films decreased slightly, indicating that the water resistance of the chitosan film increased due to the incorporation of the nanoclay.

Characteristics of TaN by Atomic Layer Deposition as a Copper Diffusion Barrier (ALD법을 이용해 증착된 TaN 박막의 Cu 확산방지 특성)

  • Na, Kyoung-Il;Hur, Won-Nyung;Boo, Sung-Eun;Lee, Jung-Hee
    • Journal of Sensor Science and Technology
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    • v.13 no.3
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    • pp.195-198
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    • 2004
  • For a diffusion barrier against copper, tantalum nitride films have been deposited on $SiO_{2}$ by atomic layer deposition (ALD), using PEMAT(Pentakis(ethylmethylamino)tantalum) and $NH_{3}$ as precursors, Ar as purging gas. The deposition rate of TaN at substrate temperature $250^{\circ}C$ was about $0.67{\AA}$ per one cycle. The stability of TaN films as a Cu diffsion barrier was tested by thermal annealing for 30 minutes in $N_{2}$ ambient and characterized through XRD, sheet resistance, and C-V measurement(Cu($1000{\AA}$)/TaN($50{\AA}$)/$SiO_{2}$($2000{\AA}$)/Si capacitor fabricated), which prove the TaN film maintains the barrier properties Cu below $400^{\circ}C$.

Study of the Carrier Injection Barrier by Tuning Graphene Electrode Work Function for Organic Light Emitting Diodes OLED (일함수 변화를 통한 그래핀 전극의 배리어 튜닝하기)

  • Kim, Ji-Hun;Maeng, Min-Jae;Hong, Jong-Am;Hwang, Ju-Hyeon;Choe, Hong-Gyu;Mun, Je-Hyeon;Lee, Jeong-Ik;Jeong, Dae-Yul;Choe, Seong-Yul;Park, Yong-Seop
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.111.2-111.2
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    • 2015
  • Typical electrodes (metal or indium tin oxide (ITO)), which were used in conventional organic light emitting devices (OLEDs) structure, have transparency and conductivity, but, it is not suitable as the electrode of the flexible OLEDs (f-OLEDs) due to its brittle property. Although Graphene is the most well-known alternative material for conventional electrode because of present electrode properties as well as flexibility, its carrier injection barrier is comparatively high to use as electrode. In this work, we performed plasma treatment on the graphene surface and alkali metal doping in the organic materials to study for its possibility as anode and cathode, respectively. By using Ultraviolet Photoemission Spectroscopy (UPS), we investigated the interfaces of modified graphene. The plasma treatment is generated by various gas types such as O2 and Ar, to increase the work function of the graphene film. Also, for co-deposition of organic film to do alkali metal doping, we used three different organic materials which are BMPYPB (1,3-Bis(3,5-di-pyrid-3-yl-phenyl)benzene), TMPYPB (1,3,5-Tri[(3-pyridyl)-phen-3-yl]benzene), and 3TPYMB (Tris(2,4,6-trimethyl-3-(pyridin-3-yl)phenyl)borane)). They are well known for ETL materials in OLEDs. From these results, we found that graphene work function can be tuned to overcome the weakness of graphene induced carrier injection barrier, when the interface was treated with plasma (alkali metal) through the value of hole (electron) injection barrier is reduced about 1 eV.

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Effects of Annealing Condition on Properties of ITO Thin Films Deposited on Soda Lime Glass having Barrier Layers (Barrier층을 갖는 Soda lime glass 기판위에 증착된 ITO박막의 Annealing 조건에 따른 영향)

  • Lee, Jung-Min;Choi, Byung-Hyun;Ji, Mi-Jung;Park, Jung-Ho;Ju, Byeong-Kwon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.66-66
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    • 2008
  • Most of the properties of ITO films depend on their substrate nature, deposition techniques and ITO film composition. For the display panel application, it is normally deposited on the glass substrate which has high strain point (>575 degree) and must be deposited at a temperature higher than $250^{\circ}C$ and then annealed at a temperature higher than $300^{\circ}C$ in order to high optical transmittance in the visible region, low reactivity and chemical duration. But the high strain point glass (HSPG) used as FPDs is blocking popularization of large sizes FPDs because it is more expensive than a soda lime glass (SLG). If the SLG could be used as substrate for FPDs, then diffusion of Na ion from the substrate occurs into the ITO films during annealing or heat treatment on manufacturing process and it affects the properties. Therefore proper care should be followed to minimize Na ion diffusion. In this study, we investigate the electrical, optical and structural properties of ITO films deposited on the SLG and the Asahi glass(PD200) substrate by rf magnetron sputtering using a ceramic target ($In_2O_3:SnO_2$, 90:10wt.%). These films were annealed in $N_2$ and air atmosphere at $400^{\circ}C$ for 20min, 1hr, and 2hrs. ITO films deposited on the SLG show a high electrical resistivity and structural defect as compared with those deposited on the PD200 due to the Na ion from the SLG on diffuse to the ITO film by annealing. However these properties can be improved by introducing a barrier layer of $SiO_2$ or $Al_2O_3$ between ITO film and the SLG substrate. The characteristics of films were examined by the 4-point probe, FE-SEM, UV-VIS spectrometer, and X-ray diffraction. SIMS analysis confirmed that barrier layer inhibited Na ion diffusion from the SLG.

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Fabrication and performance evaluation of ultraviolet photodetector based on organic /inorganic heterojunction

  • Abdel-Khalek, H.;El-Samahi, M.I.;Salam, Mohamed Abd-El;El-Mahalawy, Ahmed M.
    • Current Applied Physics
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    • v.18 no.12
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    • pp.1496-1506
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    • 2018
  • Organic/inorganic ultraviolet photodetector was fabricated using thermal evaporation technique. Organic/inorganic heterojunction based on thermally evaporated copper (II) acetylacetonate thin film of thickness 200 nm deposited on an n-type silicon substrate is introduced. I-V characteristics of the fabricated heterojunction were investigated under UV illumination of intensity $65mW/cm^2$. The diode parameters such as ideality factor, n, barrier height, ${\Phi}_B$, and reverse saturation current, $I_s$, were determined using thermionic emission theory. The series resistance of the fabricated diode was determined using modified Nord's method. The estimated values of series resistance and barrier height of the diode were about $0.33K{\Omega}$ and 0.72 eV, respectively. The fabricated photodetector exhibited a responsivity and specific detectivity about 9 mA/W and $4.6{\times}10^9$ Jones, respectively. The response behavior of the fabricated photodetector was analyzed through ON-OFF switching behavior. The estimated values of rise and fall time of the present architecture under UV illumination were about 199 ms and 154 ms, respectively. Finally, enhancing the photoresponsivity of the fabricated photodetector, post-deposition plasma treatment process was employed. A remarkable modification of the device performance was noticed as a result of plasma treatment. These modifications are representative in a decrease of series resistance and an increase of photoresponsivity and specific detectivity. The process of plasma treatment achieved an increment of external quantum efficiency from 5.53% to 8.34% at -3.5 V under UV illumination.