A Study on the Pt/Ru double metal electrode for prevention of oxidation of underlying TiN Diffusion barrier in high dielectric memory (TiN의 산화방지를 위한 고유전 박막기억소자용 Pt/Ru 이중금속전극 형성에 관한 연구)
-
- Proceedings of the Materials Research Society of Korea Conference
- /
- 1997.10a
- /
- pp.147-147
- /
- 1997