• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.1305-1308
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• 2003

A new technique is presented to construct a predictive model of plasma etch process. This was accomplished by combining a backpropagation neural network (BPNN) and a genetic algorithm (GA). The predictive model constructed in this way is referred to as a GA-BPNN. The GA played a role of controlling training factors simultaneously. The training factors to be optimized are the hidden neuron, training tolerance, initial weight magnitude, and two gradients of bipolar sigmoid and linear functions. Each etch response was optimized separately. The proposed scheme was evaluated with a set of experimental plasma etch data. The etch process was characterized by a $2^3$ full factorial experiment. The etch responses modeled are aluminum (A1) etch rate, silica profile angle, A1 selectivity, and dc bias. Additional test data were prepared to evaluate model appropriateness. The GA-BPNN was compared to a conventional BPNN. Compared to the BPNN, the GA-BPNN demonstrated an improvement of more than 20% for all etch responses. The improvement was significant in the case of A1 etch rate.

• 한국지능시스템학회:학술대회논문집
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• 한국퍼지및지능시스템학회 2003년도 ISIS 2003
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• pp.599-602
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• 2003

A new technique is presented to construct predictive models of plasma etch processes. This was accomplished by combining a backpropagation neural network (BPNN) and a random generator (RC). The RG played a critical role to control neuron gradients in the hidden layer, The predictive model constructed in this way is referred to as a randomized BPNN (RG-BPNN). The proposed scheme was evaluated with a set of experimental plasma etch process data. The etch process was characterized by a 2$^3$ full factorial experiment. The etch responses modeled are 4, including aluminum (Al) etch rate, profile angle, Al selectivity, and do bias. Additional test data were prepared to evaluate model appropriateness. The performance of RC-BPNN was evaluated as a function of the number of hidden neurons and the range of gradient. for given range and hidden neurons, 100 sets of random neuron gradients were generated and among them one best set was selected for evaluation. Compared to the conventional BPNN, the proposed RC-BPNN demonstrated about 50％ improvements in all comparisons. This illustrates that the RG-BPNN of multi-valued gradients is an effective way to considerably improve the predictive ability of current BPNN of single-valued gradient.

• 대한전기학회논문지:시스템및제어부문D
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• 제52권5호
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• pp.290-294
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• 2003

Using a backpropagation neural network (BPNN), a high power semiconductor device was empirically modeled. The device modeled is a n-LDMOSFET and its electrical characteristics were measured with a HP4156A and a Tektronix curve tracer 370A. The drain-source current $(I_{DS})$ was measured over the drain-source voltage $(V_{DS})$ ranging between 1 V to 200 V at each gate-source voltage $(V_{GS}).$ For each $V_{GS},$ the BPNN was trained with 100 training data, and the trained model was tested with another 100 test data not pertaining to the training data. The prediction accuracy of each $V_{GS}$ model was optimized as a function of training factors, including training tolerance, number of hidden neurons, initial weight distribution, and two gradients of activation functions. Predictions from optimized models were highly consistent with actual measurements.

• Structural Engineering and Mechanics
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• 제89권3호
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• pp.309-321
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• 2024

In this paper, the effect of semi-rigid connections on the stability bearing capacity of cross-bracings in steel tubular transmission towers is investigated. Herein, a prediction method based on the hybrid model which is a combination of particle swarm optimization (PSO) and backpropagation neural network (BPNN) is proposed to accurately predict the stability bearing capacity of cross-bracings with semi-rigid connections and to efficiently conduct its probabilistic assessment. Firstly, the establishment of the finite element (FE) model of cross-bracings with semi-rigid connections is developed on the basis of the development of the mechanical model. Then, a dataset of 7425 samples generated by the FE model is used to train and test the PSO-BPNN model, and the accuracy of the proposed method is evaluated. Finally, the probabilistic assessment for the stability bearing capacity of cross-bracings with semi-rigid connections is conducted based on the proposed method and the Monte Carlo simulation, in which the geometric and material properties including the outer diameter and thickness of cross-sections and the yield strength of steel are considered as random variables. The results indicate that the proposed method based on the PSO-BPNN model has high accuracy in predicting the stability bearing capacity of cross-bracings with semi-rigid connections. Meanwhile, the semi-rigid connections could enhance the stability bearing capacity of cross-bracings and the reliability of cross-bracings would significantly increase after considering semi-rigid connections.

• 제어로봇시스템학회논문지
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• 제13권4호
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• pp.315-319
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• 2007

A technique to model plasma processes was presented. This was accomplished by combining the backpropagation neural network (BPNN) and genetic algorithm (GA). Particularly, the GA was used to optimize five training factor effects by balancing the training and test errors. The technique was evaluated with the plasma etch data, characterized by a face-centered Box Wilson experiment. The etch outputs modeled include Al etch rate, AI selectivity, DC bias, and silica profile angle. Scanning electron microscope was used to quantify the etch outputs. For comparison, the etch outputs were modeled in a conventional fashion. GABPNN models demonstrated a considerable improvement of more than 25% for all etch outputs only but he DC bias. About 40% improvements were even achieved for the profile angle and AI etch rate. The improvements demonstrate that the presented technique is effective to improving BPNN prediction performance.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2002년도 ICCAS
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• pp.46.2-46
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• 2002

Plasma processing plays a crucial role in fabricating integrated circuits (ICs). Manufacturing ICs in a cost effective way, it is increasingly demanded a computer model that predicts plasma properties to unknown process inputs. Physical models are limited in the prediction accuracy since they are subject to many assumptions. Expensive computation time is another hindrance that prevents their widespread used in manufacturing site. To circumvent these difficulties inherent in physical models, neural networks have been used to learn nonlinear plasma data [1]. Among many types of networks, a backpropagation neural network (BPNN) is the most widely used architecture. Many training variables are...

• 한국농공학회논문집
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• 제60권6호
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• pp.43-54
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• 2018

The accurate estimation of reference crop evapotranspiration ($ET_o$) is essential in irrigation water management to assess the time-dependent status of crop water use and irrigation scheduling. The importance of $ET_o$ has resulted in many direct and indirect methods to approximate its value and include pan evaporation, meteorological-based estimations, lysimetry, soil moisture depletion, and soil water balance equations. Artificial neural networks (ANNs) have been intensively implemented for process-based hydrologic modeling due to their superior performance using nonlinear modeling, pattern recognition, and classification. This study adapted two well-known ANN algorithms, Backpropagation neural network (BPNN) and Generalized regression neural network (GRNN), to evaluate their capability to accurately predict $ET_o$ using daily meteorological data. All data were obtained from two automated weather stations (Chupungryeong and Jangsu) located in the Yeongdong-gun (2002-2017) and Jangsu-gun (1988-2017), respectively. Daily $ET_o$ was calculated using the Penman-Monteith equation as the benchmark method. These calculated values of $ET_o$ and corresponding meteorological data were separated into training, validation and test datasets. The performance of each ANN algorithm was evaluated against $ET_o$ calculated from the benchmark method and multiple linear regression (MLR) model. The overall results showed that the BPNN algorithm performed best followed by the MLR and GRNN in a statistical sense and this could contribute to provide valuable information to farmers, water managers and policy makers for effective agricultural water governance.

• 한국농공학회논문집
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• 제61권6호
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• pp.111-121
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• 2019

작물 증발산량은 수자원 계획 및 관리, 물수지 분석, 작물 관개 계획 및 생산량 추정 등에 널리 활용되고 있으며, 특히 FAO에서 공인한 Penman-Monteith식 (FAO 56-PM)은 잠재 증발산량 산정을 위한 표준방법으로 많이 사용되고 있다. Penman-Monteith식을 이용한 잠재증발산량 산정은 최소온도, 평균온도, 최대온도, 상대습도, 풍속과 일사량인 6가지 항목에 대한 시계열 자료가 필요한데, 결측 또는 미계측된 경우에는 사용이 어려운 단점을 가지고 있다. 따라서, 본 연구에서는 역전파 신경망(BPNN) 모델을 이용해서 6개 미만의 기상항목으로도 잠재증발산량이 추정가능한지를 확인하였다. 여섯 가지 기상항목을 각각 1~6개의 조합으로 입력자료를 구성하고, BPNN 모델을 이용해서 학습, 검증 및 테스트를 한 결과, 입력 자료가 많아질수록 좋은 결과가 산출되었으며, 일사량, 최대온도와 상대습도만으로도 결정계수($R^2$)가 0.94정도로 비교적 높은 예측결과를 얻을 수 있었다. 또한 산정 오차를 줄이고, 항목간의 상관관계를 높이기 위해서는 역전파 신경망 구조의 적절한 선택이 중요한 것으로 확인되었다. 역전파 신경망 모델을 사용하면 요구되는 기상 항목과 데이터의 양에 대한 제약 없이 예측이 가능할 수 있기 때문에 기준 증발산량 산정에 유용하게 활용될 수 있을 것이며 향후 작물 재배를 위한 적정 관개계획 수립에도 유용하게 사용될 것이라 사료된다.