• Journal of the Semiconductor & Display Technology
• /
• v.18 no.1
• /
• pp.5-9
• /
• 2019

Optical emission spectroscopy is used to identify chemical species and monitor the changes of process results during the plasma process. However, plasma process monitoring or fault detection by using emission signal variation monitoring is vulnerable to background signal fluctuations. IR heaters are used in semiconductor manufacturing chambers where high temperature uniformity and fast response are required. During the process, the IR lamp output fluctuates to maintain a stable process temperature. This IR signal fluctuation reacts as a background signal fluctuation to the spectrometer. In this research, we evaluate the effect of infrared background signal fluctuation on plasma process monitoring and improve the plasma process monitoring accuracy by using simple infrared background signal subtraction method. The effect of infrared background signal fluctuation on plasma process monitoring was evaluated on $SiO_2$ PECVD process. Comparing the $SiO_2$ film thickness and the measured emission line intensity from the by-product molecules, the effect of infrared background signal on plasma process monitoring and the necessity of background signal subtraction method were confirmed.

• Journal of the Semiconductor & Display Technology
• /
• v.14 no.3
• /
• pp.37-43
• /
• 2015

In this paper, a new background subtraction algorithm for video based fence monitoring surveillance systems is proposed. We adopt the sampling based background subtraction technique and focus on the two main issues: handling highly dynamic environment and handling the flickering nature of pulse based IR (infrared) lamp. Natural scenes from fence monitoring system are usually composed of several dynamic entities such as swaying trees, moving water, waves and rain. To deal with such dynamic backgrounds, we utilize the confidence factor for each background value of the input image. For the flickering IR lamp, the original sampling based technique is extended to handle double background models. Experimental results revealed that our method works well in real fence monitoring surveillance systems.

• Korean Journal of Remote Sensing
• /
• v.24 no.3
• /
• pp.235-243
• /
• 2008

Object tracking is a common vision task to detect and trace objects between consecutive frames. It is also important for a variety of applications such as surveillance, video based traffic monitoring system, and so on. An efficient moving vehicle clustering and tracking algorithm suitable for traffic monitoring system is proposed in this paper. First, automatic background extraction method is used to get a reliable background as a reference. The moving blob(object) is then separated from the background by mean shift method. Second, the scale invariant feature based method extracts the salient features from the clustered foreground blob. It is robust to change the illumination, scale, and affine shape. The simulation results on various road situations demonstrate good performance achieved by proposed method.

• Spatial Information Research
• /
• v.21 no.3
• /
• pp.11-19
• /
• 2013

Compared with traditional video monitoring systems that provide a video-recording function as a main service, an intelligent video monitoring system is capable of extracting/tracking objects and detecting events such as car accidents, traffic congestion, pedestrian detection, and so on. Thus, the object tracking is an essential function for various intelligent video monitoring and surveillance systems. In this paper, we propose a background and local histogram-based object tracking approach for intelligent video monitoring systems. For robust object tracking in a live situation, the result of optical flow and local histogram verification are combined with the result of background subtraction. In the proposed approach, local histogram verification allows the system to track target objects more reliably when the local histogram of LK position is not similar to the previous histogram. Experimental results are provided to show the proposed tracking algorithm is robust in object occlusion and scale change situation.

• Journal of the Korea Society of Computer and Information
• /
• v.26 no.2
• /
• pp.45-52
• /
• 2021

In this paper, we propose a method of generating theme, background amd signal music usage monitoring information based on a blockchain, in which the music usage informations are recorded by the monitoring tool using feature-based filtering of monitoring organizations. Theme, background and signal music are music inserted into the broadcasting contents of broadcaster. Since they are recognized as created contents just like normal music, there are lyricists and composers who have the right for those music and all copyright holders of them have to receive the corresponding copyright fees, once the music was used in the broadcast. However, there are problems with inaccurate monitoring results for music usage, due to the omission of usage details and non-transparent settlement method. In order to solve these problems, If the information generation method proposed in this paper, accurate music usage history can be created, the details are stored in the blockchain without changes or omissions, and transparent settlement and distribution are possible by smart contract, avoiding the current non-transparent settlement method.

• Proceedings of the IEEK Conference
• /
• 2003.11a
• /
• pp.413-416
• /
• 2003

This paper proposes an adaptive background image generation method based on the frame difference for traffic monitoring. The performance of the conventional method is limited when there are more vehicles due to traffic Jam. To improve on this, we use frame differencing to separate vehicles from background in frame differencing, we adopt selective approach by using part of the image not considered as vehicle fer extraction of background. The proposed method generates background more efficiently than conventional methods even in the presence of heavy traffic.

• Journal of Environmental Impact Assessment
• /
• v.20 no.1
• /
• pp.49-59
• /
• 2011

The results of comparing $PM_{10}$ concentration between 'Namsan' and 'Yongsan-gu' air quality monitoring stations show similar values with averaged concentration in the whole Seoul. The correlation factors in both sites were 0.865, 0.828 in 2005, 2006, respectively. For 'Bukhansan' and 'Gangbuk-gu' air quality monitoring stations, different from the results mentioned above, they showed clear differences as altitude changes. PM10 concentration in 'Bukhansan' monitoring stations was 10 ${\mu}g/m^3$ lower than 'Gangbuk-gu' monitoring station which is located near the ground. Also, averaged PM10 concentration in 'Bukhansan' and 'Gangbuk-gu' monitoring stations was lower than that in the whole Seoul. When comparing $NO_2$ concentration between 'Namsan' and 'Yongsan-gu' monitoring stations, $NO_2$ concentration in 'Namsan' monitoring station was lower than 'Yongsan-gu' monitoring station. For $NO_2$ concentration in 'Bukhansan', 'Gangbuk-gu' and 'the whole Seoul', there were the same pattern in 'Gangbuk-gu' and the 'the whole Seoul' and low values in 'Bukhansan' monitoring station. The correlation factors of $NO_2$ concentration in 'Bukhansan' and 'Gangbukgu' was 0.525, 0.549 in 2005, 2006, respectively, which stands for low correlationship.

• Journal of Korean Society for Atmospheric Environment
• /
• v.18 no.E1
• /
• pp.21-28
• /
• 2002

Air quality issues in Korea rapidly changed at the beginning of the 1990s from primary to secondary pollutants starting in Seoul, the capital of Korea. The present frame of national air pollution monitoring networks was established between the end of the 1980s and the beginning of the 1990s. Background monitoring was initiated in the middle of the 1990s in response to increasing public concern about the long-range transport of air pollutants. Apart from the national monitoring, both routine and intensive measurements of fine particles have been made for research purposes since the middle of the 1990s at several background sites. However, air pollution monitoring in urban areas for other purposes was relatively scarce as national monitoring has been concentrated in these areas. Although ozone pollution has become a significant issue in major metropolitan areas every summer, only a little information on ozone precursors is available. During the past few years, the number of national monitoring stations has greatly increased. The government has a plan to gradually expand monitoring items as well as stations. It is anticipated that highly detailed information on both photochemical reactants and products will be available within the next several years. More emphasis will be placed on toxic substances based on risk assessment in monitoring for both research and policy making.

• Nuclear Engineering and Technology
• /
• v.55 no.3
• /
• pp.1052-1060
• /
• 2023

The airborne radiation monitoring has been used in geophysics for more than forty years and now it also has its important role in emergency monitoring. The aircraft background and the cosmic gamma-rays contribute to the measured gamma spectrum on the aircraft board. This adverse effect should be eliminated before the data processing. The paper describes two semiparametric methods to estimate the full spectrum aircraft background and cosmic gamma-ray contribution from spectra measured at altitudes where terrestrial contribution is negligible. The methods only assume to know possible peak positions in spectra and their full width at half maximum, that can be easily obtained e.g. from terrestrial measurement. The methods were applied to real experimental data acquired on Mi-17 and Bell 412 helicopter boards. The IRIS airborne gamma-ray spectrometer, with 4×4 L NaI(Tl) crystals, produced by Pico Envirotec Inc., Canada, was used on helicopters' boards. To obtain valid estimate of the aircraft background and the cosmic contribution, the measurements over sea and large water areas were carried out. However, the satisfactory results over inland were also achieved comparing with those acquired over large water areas.

• Environmental Engineering Research
• /
• v.15 no.2
• /
• pp.85-91
• /
• 2010

Romania aims to adopt and implement the European Union's legislation, also including that for the field of water management. Like other countries, groundwater in Romania is locally polluted from point sources, such as leaking landfills, as well as from diffuse pollution sources, include fertilizers, pesticides and leakages from sewers, in urbanized areas. Diffuse pollution can also occur indirectly, by over-exploitation of groundwater wells, resulting in salt water intrusion, as well as from mining and exploitation of mineral aggregates. Romania has quite an intensive monitoring scheme to measure groundwater quality in phreatic and confined aquifers. The purpose of the work resumed in this paper was to derive natural background levels (NBL) for groundwater in order to distinguish the natural elevated concentrations of some substances (natural phenomena) from point and diffuse pollution (anthropogenic phenomena). Based on these NBLs, threshold values (TV) for groundwater will be set according to the requirements of the European Water Framework Directive and the related Groundwater Directive. This paper describes the results of a study for the derivation of NBL and TV in a pilot Groundwater Body. Also, the process and draft results for extrapolating this work for all Romanian groundwater bodies is explained, as well as points for future consideration with respect to monitoring and management.