• 제목/요약/키워드: BaTiO3

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Synthesis of High-Aspect-Ratio BaTiO3 Platelets by Topochemical Conversion and Fabrication of Textured Pb(Mg1/3Nb2/3)O3-32.5PbTiO3 Ceramics

  • Zhao, Wei;E, Lei;Ya, Jing;Liu, Zhifeng;Zhou, Heping
    • Bulletin of the Korean Chemical Society
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    • 제33권7호
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    • pp.2305-2308
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    • 2012
  • Perovskite structured barium titanate particles ($BaTiO_3$) platelets were synthesized by molten salt synthesis and topochemical microcrystal conversion. As the precursors of $BaTiO_3$, plate-like $BaBi_4Ti_4O_{15}$ particles were first synthesized by the reaction of $Bi_4Ti_3O_{12}$, $BaCO_3$, and $TiO_2$ at $1080^{\circ}C$ for 3 h in $BaCl_2$-KCl molten salt. After the topochemical reactions, layer-structured $BaBi_4Ti_4O_{15}$ particles transformed to the perovskite $BaTiO_3$ platelets. $BaTiO_3$ particles with thickness of approximately $0.5{\mu}m$ and a length of $10-15{\mu}m$ retained the morphology feature of the $BaBi_4Ti_4O_{15}$ precursor. For <001> $Pb(Mg_{1/3}Nb_{2/3})O_3-32.5PbTiO_3$ (PMNT)-5 wt % PbO piezoelectric ceramics textured with 5 vol % of $BaTiO_3$ templates, the Lotgering factor reached 0.82, and $d_{33}$ was 870 pC/N.

Fabrication and Characterization of (1-x)BiFeO3-xBaTiO3 Ceramics Prepared by a Solid State Reaction Method

  • Chandarak, S.;Unruan, M.;Sareein, T.;Ngamjarurojana, A.;Maensiri, S.;Laoratanakul, P.;Ananta, S.;Yimnirun, R.
    • Journal of Magnetics
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    • 제14권3호
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    • pp.120-123
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    • 2009
  • In this study, BiFe$O_3$-BaTi$O_3$ ceramics have been fabricated by a solid-state reaction method. The effects of BaTi$O_3$ content in the (1-x)BiFe$O_3$-xBaTi$O_3$ (x = 0.1, 0.2, 0.25, 0.3, 0.4, 0.5) system on crystal structure and magnetic, dielectric, and ferroelectric properties were investigated. Perovskite BiFe$O_3$ was stabilized through the formation of a solid solution with BaTi$O_3$. Rhombohedrally distorted structure (1-x)BiFe$O_3$-xBaTi$O_3$ ceramics showed strong ferromagnetism at x = 0.5. Dielectric and ferroelectric properties of the BiFe$O_3$-BaTi$O_3$ system also changed significantly upon addition of BaTi$O_3$. It was found that the maximum dielectric and ferroelectric properties were exhibited in the (1-x)BiFe$O_3$-xBaTi$O_3$ system at x = 0.25. This suggested the morphotropic phase boundary (MPB) with the coexistence of both rhombohedral and cubic phases of the (1-x)BiFe$O_3$-xBaTi$O_3$ system at x = 0.25.

Sr$TiO_3$ 변화량에 따른 (x)Ba$TiO_3$-(1-x)Sr$TiO_3$ 세라믹스의 구조적, 전기적 특성 (Structural and Electrical Properties of (x)Ba$TiO_3$-(1-x)Sr$TiO_3$ Ceramics with Contents Sr$TiO_3$)

  • 장동환;김충배;홍경진;이우기;정우성;김태성
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1998년도 추계학술대회 논문집
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    • pp.45-48
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    • 1998
  • A BaTiO$_3$ was annexed to SrTiO$_3$, (x)BaTiO$_3$-(1-x)SrTiO$_3$ (0.7$\leq$X$\leq$1) ceramics with stable dielectric and electrical properties in high voltage were manufactured. Structural, dielectric and electrical properties were surveyed with the contents of SrTiO$_3$. The open porosity and sintering density were excellent in 0.9BaTiO$_3$-0.1SrTiO$_3$, the grain size of 0.9BaTiO$_3$-0.1SrTiO$_3$ was maximum at 12.40[${\mu}{\textrm}{m}$]. Increasing SrTiO$_3$ mol ratio, the curie temperature was shifted low temperature and the supreme permittivity was increased. In line with increasing of supplied voltage, permitivity was decreased slightly.

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$BaTiO_3/SiO_2$로 구성된 안티퓨즈의 전기적 특성 (An Electrical Properties of Antifuses based on $BaTiO_3/SiO_2$ films)

  • 이영민;이재성;이용현
    • 센서학회지
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    • 제7권5호
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    • pp.364-371
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    • 1998
  • Field programmable gate array (FPGA)의 전압 프로그램 요소(voltage programmable link)로써 사용될 새로운 안티퓨즈를 제조하였다. 제조된 안티퓨즈는 Al/$BaTiO_3/SiO_2$/TiW-실리사이드 구조를 갖는다. 안티퓨즈의 프로그램 전압은 $BaTiO_3$의 증착 두께를 조절함으로써 정확하게 조절할 수 있었다. $BaTiO_3(120{\AA})$/$SiO_2(120{\AA})$의 안티퓨즈에서 TiW-실리사이드 전극에 (-)극성을 인가하여 측정된 프로그램 전압은 14.4 V였으며, on-저항은 $40-50{\Omega}$의 값을 갖는다. 안티퓨즈의 전류-전압 특성은 Frenkel-Poole 전도 기구를 따르고 있으며, 그 특성은 인가 전압의 극성에 따라 차이를 보였다. 이것은 Al/$BaTiO_3$계면과 TiW-silicide/$SiO_2$계면 특성이 다르기 때문이다.

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폴링에 의한 비정질 BaTiO3 박막의 광학적 특성 조사 및 녹색광 발생 (Green Generation and Investigation of Optical Properties of Amorphous BaTiO3 by Poling)

  • 김응수
    • 한국전자통신학회논문지
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    • 제15권1호
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    • pp.39-44
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    • 2020
  • 유리기판위에 스퍼터링법으로 비정질 BaTiO3막을 증착시켰다. 증착된 BaTiO3 막을 코로나 폴링을 하여 광학적 특성을 조사하였다. 가시광영역에서 투과율은 80% 이상으로 좋았으며, 비선형광학 특성은 폴링 조건에 따라 영향을 받으며, 크기는 1.15pm/V였다. 장기특성도 한달이 지나도 60%이상 유지하였다. 또한 BaTiO3 박막으로부터 녹색광 발생을 확인하였다.

$BaTiO_3$ 요업체에서 Cubic-Hexagonal 상전이에 따른 미세조직 변화 (Microstructural Evolution of $BaTiO_3$ Ceramics during the Cubin-Hexagonal Phase Transformation)

  • 이태헌;이정아
    • 한국세라믹학회지
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    • 제33권4호
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    • pp.448-454
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    • 1996
  • BaTiO3 세라믹스의 입방정과 육방정간의 상전이에 따른 미세조직 변화를 관찰하였다. 입방정을 육방정영역에서 열처리하는 경우, 시편 표면부터 육방정상이 생성되었고 반대로 육방정을 입방정역에서 열처리하여 상전이 시킬때는 입방정상이 시편이 중심부에서부터 생성되었다. 또한 이러한 상전이 과정 중에는 빠른 입성장과 더불어 불규칙적인 입계형태를 나타내었다. 그 외 낮은 성형압으로 소결체의 밀도가 낮은 육방정 시편을 제조한 경우에는 상대적으로 입방정으로의 상전이가 억제되었다. 이러한 결과들은 육방정의 표면에너지가 입방정보다 상대적으로 낮기 때문으로 해석되었다.

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Effects of Sputtering Pressure on the Properties of BaTiO3 Films for High Energy Density Capacitors

  • Park, Sangshik
    • 한국재료학회지
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    • 제24권4호
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    • pp.207-213
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    • 2014
  • Flexible $BaTiO_3$ films as dielectric materials for high energy density capacitors were deposited on polyethylene terephthalate (PET) substrates by r.f. magnetron sputtering. The growth behavior, microstructure and electrical properties of the flexible $BaTiO_3$ films were dependent on the sputtering pressure during sputtering. The RMS roughness and crystallite size of the $BaTiO_3$ increased with increasing sputtering pressure. All $BaTiO_3$ films had an amorphous structure, regardless of the sputtering pressures, due to the low PET substrate temperature. The composition of films showed an atomic ratio (Ba:Ti:O) of 0.9:1.1:3. The electrical properties of the $BaTiO_3$ films were affected by the microstructure and roughness. The $BaTiO_3$ films prepared at 100 mTorr exhibited a dielectric constant of ~80 at 1 kHz and a leakage current of $10^{-8}A$ at 400 kV/cm. Also, films showed polarization of $8{\mu}C/cm^2$ at 100 kV/cm and remnant polarization ($P_r$) of $2{\mu}C/cm^2$. This suggests that sputter deposited flexible $BaTiO_3$ films are a promising dielectric that can be used in high energy density capacitors owing to their high dielectric constant, low leakage current and stable preparation by sputtering.

고에너지 볼밀링된 BaCO3와 TiO2 혼합분말의 고상반응에 의한 나노결정 BaTiO3 분말 합성 (Synthesis of Nanocrystalline BaTiO3 Powder by the Combination of High Energy Ball Milling of BaCO3-TiO2 Mixture and Solid-State Reaction)

  • 류성수
    • 한국분말재료학회지
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    • 제19권4호
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    • pp.310-316
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    • 2012
  • Nanocrystalline $BaTiO_3$ powder could be synthesized by solid-state reaction using the mixture which was prepared by a high energy milling process in a bead mill for $BaCO_3$ and nanocrystalline $TiO_2$ powders mixture. Effect of the milling time on the powder characteristic of the synthesized $BaTiO_3$ powder was investigated. Nanocrystalline $BaTiO_3$ with a particle size of 50 nm was obtained at $800^{\circ}C$. High tetragonal $BaTiO_3$ powder with a tetragonality(=c/a) of 1.009 and a specific surface area of $7.6m^2/g$ was acquired after heat-treatment at $950^{\circ}C$ for 2 h. High energy ball milling was effective in decreasing the reaction temperature and increasing the tetragonality.

$BCl_3/Cl_2/Ar$ 고밀도 플라즈마에 의한 $(Ba, Sr)TiO_3$ 박막의 식각 메커니즘 연구 (A Study on the Etching Mechanism of $(Ba, Sr)TiO_3$ thin Film by High Density $BCl_3/Cl_2/Ar$ Plasma)

  • 김승범;김창일
    • 대한전자공학회논문지SD
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    • 제37권11호
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    • pp.18-24
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    • 2000
  • (Ba,Sr)$TiO_3$ 박막은 ULSI-DRAM 즉 1-4 Gbit급 DRAM용 셀(cell) 커패시터의 새로운 유전물질로 각광받고 있다. 본 연구에서는 ICP 장비에서 $BCl_3/Cl_2/Ar$ 플라즈마로 (Ba,Sr)$TiO_3$ 박막을 식각하였다. 이때 RF power/dc bias voltage는 600W/-250V, 반응로의 압력은 10mTorr 이었다. $Cl_2/(Cl_2+Ar)$은 0.2로 고정하였고, $BCl_3$ 가스를 첨가하면서 (Ba,Sr)$TiO_3$ 박막을 식각하였다. $BCl_3$ 가스를 10% 첨가하였을 때, $480{\AA}/min$으로 (Ba,Sr)$TiO_3$ 박막은 가장 높은 식각 속도를 나타내었다. $Cl_2/Ar$가스에 $BCl_3$의 첨가 비에 따른 Cl, BCl 및 B의 라디칼 밀도를 optical emission spectroscopy(OES)에 의해 구하였다. $BCl_3$를 10% 첨가하였을 때 Cl의 라디칼 밀도가 가장 높았다. (Ba,Sr)$TiO_3$ 박막의 표면반응을 규명하기 위하여 XPS 분석을 수행한 결과 이온 bombardment 식각이 Ba-O 결합을 파괴하고 Ba와 Cl의 결합형태인 $BaCl_2$을 제거하기 위하여 필요하다. Sr과 Cl의 결합의 양은 많지 않고, Sr은 주로 물리적인 스퍼터링에 의하여 제거된다. Ti와 Cl은 화학적으로 반응하여 $TiCl_4$ 결합형태로 용이하게 제거된다. 식각후 단면사진을 SEM을 통해 본 결과 식각단면이 약 65~70$^{\circ}$ 정도였다.

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The Dielectric Properties of BaTiO3/SrTiO3 Heterolayered Thick films by Screen Printing Method

  • Nam, Sung-Pill;Lee, Young-Hie;Bae, Seon-Gi;Lee, Sung-Gap
    • Transactions on Electrical and Electronic Materials
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    • 제6권5호
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    • pp.210-213
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    • 2005
  • The $BaTiO_3/SrTiO_3$ heterolayered thick films were fabricated by the screen printing method on alumina substrates. The effect of the sintering temperature on the microstructure and dielectric properties of the $BaTiO_3/SrTiO_3$ thick films has been investigated. The relative dielectric constant and dielectric loss at 1 MHz of the $BaTiO_3/SrTiO_3$ heterolayered thick films with sintering temperature of $1350^{\circ}C$ were about 751 and 1.74, respectively. The remanent polarization $(P_r)$ of the pure $(Ba_{0.5}Sr_{0.5})TiO_3$ and $BaTiO_3/SrTiO_3$ heterolayered films are approximately $5.1\;{\mu}C/cm^2$ and $10\;{\mu}C/cm^2$. This study suggests that the design of the $BaTiO_3/SrTiO_3$ heterolayered thick films capacitor with different phase should be an effective method to enhance the dielectric and ferroelectric performance in devices.