• 제목/요약/키워드: BSCCO thin film

검색결과 46건 처리시간 0.036초

IBS법에 의한 BSCCO 박막의 에피택셜 성장 (Epitaxial Growth of BSCCO Films by IBS Method)

  • 양승호;박용필
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2002년도 춘계종합학술대회
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    • pp.627-630
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    • 2002
  • Bi$_2$Sr$_2$CuOx(Bi-2201) thin films were fabricated by atomic layer-by-layer deposition using an ion bean sputtering method. 10 wt% and 90 wt% ozone mired with oxygen were used with ultraviolet light irradiation to assist oxidation. XRD and RHEED investigations revealed that a buffer layer is formed at the early stage of deposition (less than 10 unit cell), and then c-axis oriented Bi-2201 grows on top of it.

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Characteristics of Bi-superconducting Thin Films Prepared by Co- and Layer-by-Layer Deposition

  • Yang, Sung-Ho;Park, Yong-Pil
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 제2회 학술대회 논문집 일렉트렛트 및 응용기술전문연구회
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    • pp.40-44
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    • 2000
  • $Bi_2Sr_2Ca_nCu_{n+1}O_y$($n{\geq}0$; BSCCO)thin film is fabricated via two different processes using an ion beam sputtering method i.e. co-deposition and layer-by-layer deposition. A single phase of Bi2212 can be fabricated via the co-deposition process. While it cannot be obtained by the layer-by-layer process. Ultra-low growth rate in our ion beam sputtering system brings out the difference in Bi element adsorption between the two processes and results in only 30% adsorption against total incident Bi amount by layer-by-layer deposition, in contrast to enough Bi adsorption by co-deposition.

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Comparison between Bi-superconducting Thin Films Fabricated by Co-Deposition and Layer-by-Layer Deposition

  • Yang, Sung-Ho;Park, Yong-Pil
    • 한국전기전자재료학회논문지
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    • 제13권9호
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    • pp.796-800
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    • 2000
  • Bi$_2$Sr$_2$Ca$_{n}$Cu$_{n+1}$ O$_{y}$(n$\geq$0; BSCCO) thin film is fabricated via two different processes using an ion beam sputtering method i.e. co-deposition and layer-by-layer deposition. A single phase of Bi2212 can be fabricated via the co-deposition process. While it cannot be obtained by the layer-by-layer process. Ultra-low growth rate in our ion beam sputtering system brings out the difference in Bi element adsorption between the two processes and results in only 30% adsorption against total incident Bi amount by layer-by-layer deposition, in contrast to enough Bi adsorption by co-deposition.on.n.

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MOD 방법을 이용한 Bi2Sr2CaCu2O8+d 박막제작 (Bi2Sr2CaCu2O8+d Thin Films Grown on (100) MgO Substrate by Metallorganic Decomposition Method)

  • 김선미;박미화;이기진;차덕준
    • 한국전기전자재료학회논문지
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    • 제16권11호
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    • pp.1035-1040
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    • 2003
  • High $T_{c}$ superconducting B $i_2$S $r_2$CaC $u_2$ $O_{8+d}$ (BSCCO2212) films were prepared by a metallorganic decomposition (MOD) method. The metal organic solution of BSCCO2212 was spin-coated on MgO (100) substrates at 3000 rpm for 1 min. To achieve a high critical current density, we controlled heat-treatment conditions and atmosphere. The films were annealed at temperature 75$0^{\circ}C$ ∼ 80$0^{\circ}C$ in $O_2$ or air. We obtained c-axis orientated BSCCO thin films on MgO substrates. The annealed sample at 77$0^{\circ}C$ with $O_2$ showed the critical temperature about 77 K and critical current denstity of 1.19 ${\times}$ 10$^{5}$ A/$\textrm{cm}^2$ about 13 K.

동시 스퍼터법으로 제작한 Bi 초전도 박막의 성장 모델 (Growth Model of Bi-Superconducting Thin Film Fabricated by Co-sputtering Method)

  • Chun, Min-Woo;Park, Yong-Pil
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2002년도 추계종합학술대회
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    • pp.796-799
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    • 2002
  • BSCCO thin films are fabricated via a co-deposition process at an ultra-low growth rate using ion beam sputtering. The sticking coefficient of Bi element exhibits a characteristic temperature dependence. This temperature dependence of the sticking coefficient was explained consistently on the basis of the evaporation and sublimation processes of Bi$_2$O$_3$.

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스퍼터링 법에 의한 BSCCO 단결정 성장의 부착 계수 향상 (Enhanced sticking coefficient in the BSCCO single crystal grown by the sputtering method)

  • 천민우;양승호;박용필
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.585-586
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    • 2005
  • BSCCO thin films were fabricated by an ion beam sputtering method with an ultra-low growth rate, and sticking coefficients of the respective elements are evaluated. The sticking coefficient of Bi element in BSCCO film formation was observed to show a unique temperature dependence; it was almost a constant value of 0.49 below about $730^{\circ}C$ and decreased linearly over about $730^{\circ}C$. In contrast, Sr and Ca, displayed no such remarkable temperature dependence. This behavior of the sticking coefficient was explained consistently on the basis of the evaporation and sublimation processes of Bi2O3. It is considered that the liquid phase of the bismuth oxide plays an important role in the Bi 2212 phase formation in the co-deposition process.

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순차 증착에 의한 BSCCO 박막의 에피택셜 성장 (Epitaxial Growth of BSCCO Films by Leyer-by-Layer Deposition)

  • 안준호;박용필;김정호
    • 한국전기전자재료학회논문지
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    • 제14권10호
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    • pp.855-860
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    • 2001
  • Bi$_2$Sr$_2$CuO$_{x}$(Bi-2201) thin film were fabricated by atomic layer-by -layer deposition using an ion beam sputtering method. 10 wt% and 90 wt% ozone mixed oxygen were used with ultraviolet light irradiation to assist oxidation. XRD and RHEED investigations revealed that a buffer layer is formed at the early stage of deposition (less than 10 unit cell), and then c-axis oriented Bi-2201 grows on top of it.t.

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Characteristics of Sticking Coefficient in BSCCO Thin Film

  • 조춘남;안준호;오재한;최운식;박용필
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 제2회 학술대회 논문집 일렉트렛트 및 응용기술전문연구회
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    • pp.59-63
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    • 2000
  • BSCCO thin films are fabricated via a co-deposition process by an ion beam sputtering with an ultra-low growth rate, and sticking coefficients of the respective elements are evaluated. The sticking coefficient of Bi element exhibits a characteristic temperature dependence : almost a constant value of 0.49 below $730^{\circ}C$ and decreases linearly with temperature over $730^{\circ}C$ This temperature dependence can be elucidated from the evaporation and sublimation rates of bismuth oxide, $Bi_2O_3$, from the film surface. It is considered that the liquid phase of the bismuth oxide plays an important role in the Bi(2212) phase formation in the co-deposition process.

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단상막 형성을 위해 기판온도와 산화 가스압에 따른 Bi-2223 초전도 박막의 생성 영역에 관한 연구 (A Study on Produced Region of Bi-2223 Superconducting Thin Films versus substrate temperature and oxide gas pressures for formation of single-phase Film)

  • 양승호;박용필
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2007년도 춘계종합학술대회
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    • pp.536-539
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    • 2007
  • BSCCO 박막은 다양한 기판온도와 산화 가스압에 변화에서 증발법에 의해 제작되었다. 박막조성을 Bi2212 또는 Bi2223으로 설정했음에도 불구하고, 어느 경우나 Bi2201, Bi2212 및 Bi2223상이 생성되었다. 이들 안정상의 생성 영역은 기판 온도-산화 가스압의 Arrhenius 플롯에서 우측 하단 방향으로 경사진 직선으로 표시되며 매우 좁은 영역에 분포되어 있다. 생성막의 XRD 피크는 기판 온도에 따라 연속적으로 변화했다. 이는 Bi2201, Bi2212, Bi2223의 각상이 결정 구조 내에 혼합되어 있는 혼합 결정계의 존재를 나타내고 있으며, 각 상의 단상막은 매우 좁은 온도, 가스압 범위에서만 생성되었다.

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순차 스퍼터 법에 의한 BSCCO 박막의 특성 (Characteristics of BSCCO Thin Film by Layer-by-layer Deposition)

  • 이희갑;박용필;김귀열;오금곤;최운식;조춘남
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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    • pp.281-283
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    • 2001
  • $Bi_{2}Sr_{2}CuO_{x}$(Bi-2201) thin films were fabricated by atomic layer-by-layer deposition using an ion bearn sputtering method. 10 wt% and 90 wt% ozone mixed with oxygen were used with ultraviolet light irradiation to assist oxidation. At early stages of the atomic layer by layer deposition. two dimensional epitaxial growth which covers the substrate surface would be suppressed by the stress and strain caused by the lattice misfit. then three dimensional growth takes place. Since Cu element is the most difficult to oxidize. only Sr and Bi react with each other predominantly. and forms a buffer layer on the substrate in an amorphous-like structure. which is changed to $SrBi_{2}O_{4}$ by in-situ anneal.

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