• Bulletin of the Korean Chemical Society
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• v.18 no.7
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• pp.737-740
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• 1997

The influence of cyclic treatments with H2O2/DIW (1 : 10) and HF/DIW (1 : 100) on the roughness of silicon surface in the wet chemical processing was investigated by atomic force microscopy (AFM). During the step of the SC-1 cleaning, there is a large increase in roughness on the silicon surface which will result in the poor gate oxide breakdown properties. The roughness of the silicon wafer after the SC-1 cleaning step was reduced by cyclic treatments of hydrogen peroxide solution and hydrofluoric acid solution instead of HF-only cleaning. AFM images after each step clearly illustrated that the average roughness of silicon surface after three times treatments with H2O2 and HF solutions was reduced by 10 times compared with that after the SC-1 cleaning step.

• Journal of the Korean Society for Heat Treatment
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• v.34 no.2
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• pp.75-80
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• 2021

The crystal grains of polycrystalline diamond vary depending on deposition conditions and growth thickness. The diamond thin film deposited by the CVD method has a very rough growth surface. On average, the surface roughness of a diamond thin film deposited by CVD is in the range of 1-100 um. However, the high surface roughness of diamond is unsuitable for application in industrial applications, so the surface roughness must be lowered. As the surface roughness decreases, the scattering of incident light is reduced, the heat conduction is improved, the mechanical surface friction coefficient can be lowered, and the transmittance can also be improved. In addition, diamond-coated cutting tools have the advantage of enabling ultra-precise machining. In this study, the surface roughness of diamond was improved by thermal diffusion reaction between diamond carbon atoms and ferrous metals at high temperature for diamond thin films deposited by MPCVD.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.64 no.9
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• pp.1323-1329
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• 2015

The WO₃/Ag/WO₃ transparent thin films are fabricated by the RF magnetron sputtering. This has a transmittance of front and rear about 90% in the visible light range and surface resistance of 6.41Ω/□. In this paper, we analyzed the surface characteristics caused by the working pressure and O₂ plasma surface treatment to apply a transparent electrode that was prepared to the laminated structure with other materials. The working pressure was changed in the WO₃ film to 10mTorr, 7mTorr, and 5mTorr, it showed a lower than roughness of conventional ITO. In addition, by 55.5774 J/m² at 5mTorr, it shows the hydrophobic property with lower process pressure. O₂ plasma surface treatment was changed at the condisions of the RF power to 150W, 100W, and 50W and the process time to 240s, 180s, 120s, and 60s. The surface roughness are the maximum roughness(Rmax) 6.437nm and the average roughness(Rq) 0.827nm at RF power 150W, and the maximum roughness (Rmax) 6.880nm and the average roughness (Rq) 0.839nm at process time 240sec. It showed a lower value than the surface treatment. also about working pressure and process time is increased, it showed the hydrophobic.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2004.11a
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• pp.331-338
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• 2004

We present a three-dimensional average flow model considering elastic deformation of pad asperities for chemical mechanical planarization. To consider the contact deformation of pad asperities in the calculation of the flow factor, three-dimensional contact analysis of a semi-infinite solid based on the use of influence functions is conducted from computer generated three dimensional roughness data. The average Reynolds equation and the boundary condition of both force and momentum balance are used to investigate the effect of pad roughness and external pressure conditions on film thickness and wafer position angle.

• The Journal of Korean Academy of Prosthodontics
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• v.34 no.2
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• pp.246-265
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• 1996

After adjusting glazed surface of laminate veneer porcelain by reduction in the clinical procedure, an additional polishing procedure is required to smoothen the roughened surface by reduction, as it is difficult to glaze it again in the furnace. In this study, four kinds of laminate veneer porcelain were ground with diamond points as done in the clinical procedure. The adjusted porcelain surface was polished with Durawhite stone, Ceramiste points, Exa cerapol, Porcelain polishing wheel, Diamond polishing paste. The degree of surface roughness was evaluated with SEM and profilometer at each step, The self glazed surface and the glazed surface with glazing powder were compared with the polished surface and surface roughness of four kinds of laminate veneer porcelain according to the polishing method and step were obserbed. The following results were obtained : 1. There was no difference in the average surface roughness Ra value and the surface roughness obserbed under SEM according to the polishing methods and steps used, among the four kinds of laminate veneer porcelain including Colorlogic, Exelco, Vintage, and Vitadur alpha product. 2. Due to porosities, the surface in the course of polishing by polishing instruments was rougher than the glazed surface, evaluated with a SEM. 3. Insta-Glaze diamond polishing paste has no statistical difference with self glazed group 1, although it has a lower value in average surface roughness Ra value. 4. Group 2 which was glazed with galzing powder was lowest in view of SEM, but it revealed higher surface roughness Ra value than group 1, the glazed surface and group 8, polished by diamond polishing paste, due to surface waveness. 5. Proper surface smoothness could not be in the surface roughness analysis of SEM and profilometer by Shofu laminate polishing kit composed of Diamond point, Durawhite stone and Ceramiste points. Based on the results of this study, the following conclusions can be drawn. We obtain low surface roughness than glazed surface by polishing instruments, but not perfect results clinically. In order to obtain a perfect clinical result or a surface smoothness comparable to glazed porcelain there is a need for further improvement of porcelain materials, condensa-tion techniques, polishing instruments and polishing methods. Furthermore card should be taken not to breakdown the glazed surface during the clinical and laboratory procedure.

• The Journal of Engineering Geology
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• v.14 no.2
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• pp.147-168
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• 2004

Purpose of this study is to quantitatively characterize the fracture roughness which was measured with a confocal laser scanning microscope. The roughness discrete data measured by confocal laser microscope were analyzed by spectral analysis and fast Fourier transform (FFT).The roughness data by used noise reduction filter were applied for fractal analysis to describe roughness features quantitatively. Artificial fractures created by Brazilian test on granites were used to measure fracture roughness under the confocal laser scanning microscope. Measurements were performed along three scan lines on each fracture surface. 36 scan lines were determined on 12 specimens in total. Features of roughness showed that coarse and medium grained granites tend to more rough features than those of fine grained granites. Continuous analog data of roughness is possible to described as discrete data of measure roughness with a fixed interval under the confocal laser microscope. Results of FFT with the measured data showed the highest values on the second harmonics. Distribution of average amplitude of second harmonics was observed 0.9853 in coarse grained granite, 1.0792 in medium grained granite and 0.6794 in fine grained granite. This indicates that the larger roughness has the higher energy of harmonics as the result of fractal analysis in low frequency zone.

• Journal of the Korean Society for Heat Treatment
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• v.19 no.3
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• pp.141-148
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• 2006

An experimental study is presented for water droplet impingement on a steel surface in the process of heat treatment. The objective of the present work is to examine characteristic of evaporation cooling due to surface roughness and droplet diameter under conductive heat input condition. The surface temperatures varied from $80{\sim}155^{\circ}C$, surface roughness was from $R_a=0.12{\mu}m$ to $R_a=1.14{\mu}m$ and droplet diameter was from 2.4 mm to 3.0 mm. The results show that the total evaporation time is shorter for the larger surface roughness and the smaller droplet size, the time average heat flux has maximum value for the larger surface roughness and the smaller droplet size. The total evaporation time has not influence on the nuclear boiling region.

• Applied Science and Convergence Technology
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• v.25 no.6
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• pp.120-123
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• 2016

The rotor of a turbomolecular drag pump is generally made of an aluminum alloy. Its surface finish is affected by various processes that the rotor itself undergoes during the manufacturing phase. The impact of different surface finishes on the pumping performances of a turbomolecular pump has been mainly investigated by Sawada et al [1]. The present work aims to broaden the previous bibliographic study to the drag stages of a turbomolecular pump by testing the impact of different surface finishes on the compression ratio of the pump. Experimental tests have been made focusing on two processes: the corundum sandblasting and the glass microspheres shot-peening. Both the processes flatten and/or physically remove EDM melted spheres; in particular, blasted surfaces obtained by glass shot-peening are generally smoother than surfaces obtained by corundum sandblasting. In order to characterize the surface texture left by such processes, preliminary surface roughness measurements have been made on the drag rotor disks of several pumps. The experimental tests conducted on both sandblasted and shot-peened rotors confirms previous results obtained on the turbo stages by Sawada et al. [1], showing that the average roughness of the surface has an impact on the compression ratio of the pump; in particular, an increment in the surface roughness causes a corresponding increment in the compression ratio of the pump and vice versa. For the tested pumps, the higher surface roughness gives a factor of increment of about 2 on the measured hydrogen maximum compression ratio of the pump.

• Design & Manufacturing
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• v.17 no.2
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• pp.15-21
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• 2023

In this study, a diamond turning machine and a laser-assisted machining module were utilized for the complex combined cutting of aspheric shapes and fine patterns on the surface of high-hardness brittle material, silicon. The analysis of material's form accuracy and corrective machining was conducted based on key factors such as laser output, rotational speed, feed rate, and cutting depth to achieve form accuracy below 1 ㎛ and surface roughness below 0.1 ㎛. The cutting condition and corrective machining methods were investigated to achieve the desired form accuracy and surface roughness. The rotational speed of the spindle and the linear feed rate of the diamond turning machine were varied in five stages for the cutting condition test. Surface roughness and form accuracy were measured using both a contact surface profilometer and a non-contact surface profilometer. The experimental results revealed a tendency of improved surface roughness with increased rotational speed of the workpiece, and the best surface roughness and form accuracy were observed at a feed rate of 5 mm/min. Furthermore, based on the cutting condition experiments, corrective machining was performed. The experimental results demonstrated an improvement in form accuracy from 0.94 ㎛ to 0.31 ㎛ and a significant reduction in the average value of the surface roughness curve from 0.234 ㎛ to 0.061 ㎛. This research serves as a foundation for future studies focusing on the machinability in relation to laser output parameters.

• Transactions of Materials Processing
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• v.26 no.2
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• pp.108-114
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• 2017

Titanium based implants are known to improve their osseointegration by controlling surface roughness from nanometers to micrometers. Implants continuously and/or repeatedly receive irregular loads in the human body, and require a deeper understanding of the tensile and fatigue properties that can determine the fracture characteristics of the materials. In this study, the plastic deformation behavior which depends on the surface geometry of the materials during tensile tests was analyzed using the finite element method. As a result, the tensile properties were greatly decreased with increasing the sharpness of the surface. On the other hand, the average roughness had no significant effect on tensile properties. This investigation shed a light on developing titanium implants with improved osseointegration by surface treatments.