• 한국세라믹학회지
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• 제31권7호
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• pp.795-803
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• 1994

Ferroelectric BaTiO3 thin film was produced using BaTi-ethoxide sol. This sol was prepared from BaTi-ethoxide by a partial hydrolysis with ammonia as a basic catalyst and ethylene glycol as a chelating agent. BaTiO3 thin film was prepared from three continuous spin-coating layers of the sol on bare Si(100) wafer at 2500 rpm followed by pyrolysis at $700^{\circ}C$ for 30 min. After the heat treatment, the film was 0.200$\pm$0.010 ${\mu}{\textrm}{m}$ thick and its grain size was 0.059 ${\mu}{\textrm}{m}$. On the other hand, electrical properties were measured for BaTiO3 thin film separately prepared on Au-deposited silicon wafer. The dielectric constant and loss of the BaTiO3 thin film at room temperature was 150~160 and 0.04 respectively, which was measured at 10 kHz and oscillation level of 0.1 V. In the measurements of the dielectric properties at high temperatures, it was observed that the capacitance of the thin film increases steeply, while the dielectric loss reaches maximum around 1$25^{\circ}C$, which corresponds a phase transition from tetragonal to cubic BaTiO3.

• 한국조명전기설비학회:학술대회논문집
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• 한국조명전기설비학회 1998년도 학술발표회논문집
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• pp.112-115
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• 1998

We investigate the qualities of organic materials by which can manufacture organic thin films for solar cells and make thin films for insulation layers of an insulated cable. We give pressure stimulation into organic thin films and detect the induced displacement current. In processing of a device manufacture, We can see the process is good from the change of a surface pressure for organic thin films and transfer ratio of area per molecule. The structure of manufactured device is Au/organic thin films(polyimide)/Au and I-V characteristic of the device is measured from 0[V] to +5[V]. The maximum value of measured current is increased as the number of accumulated layers are decreased. The resistance for the number of accumulated layers, the energy density for an input voltage show desired results, and the insulation of a thin film is better as the interval between electrodes is larger.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.729-732
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• 2006

The effect of stress match between silicon nitride ($SiN_2$) and hydrogenated amorphous silicon (a-Si:H) layers on the electrical characteristics of thin-film transistors (TFTs) has been investigated. The result shows that modifying the deposition conditions of a Si:H and $SiN_2$ thin films can reduce the stress mismatch at a-Si:H/SiNx interface. Moreover, for best a-Si:H TFT characteristics, the internal stress of gate $SiN_2$ layer with slightly nitrogen-rich should be matched with that of a-Si:H channel layer. The ON current, field-effect mobility, and stability of TFTs can be enhanced by controlling the stress match between a-Si:H and gate insulator. The improvement of these characteristics appears to be due to both the decrease of the interface state density between the a-Si:H and SiNx layer, and the good dielectric quality of the bottom nitride layer.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.224-225
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• 2009

Aluminium nitride thin film was deposited on Au electrode and Si substrate by radio frequency sputtering system. X-ray diffraction (XRD) was utilized to identify the AlN phase, and Atomic Force Microscope (AFM) was used to obtain the images of surface morphology and roughness value of AlN thin film. The result of XRD and AFM measurement showed that the AlN thin film has strong c-axs orientation and smooth surface. In order to investigate piezoelectric response and polarization properties along to the direction of electric field, PFM (Piezoresponse Force Microscope) system was used, and the images of piezoelectric response due to switching of polarization was observed by PFM.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.820-823
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• 2002

MEMS structures Generally have been fabricated using surface-machining, but the interface failure between silicon substrate and evaporated thin film frequently takes place due to difference of linear coefficient of thermal expansion. Therefore this paper studied the effect of the residual stress caused by variable external loads. This study did not analyzed accurate quantity of the residual stress but trend for the effect of residual stress. Several specimens were fabricated using other material(Al, Au and Cu) and thermal load was applied. The residual stress was measured by nano-indentation using AFM. The results showed the existence of the residual stress due to thermal load. The indentation area of the thermal loaded thin film reduced about 3.5% comparing with the virgin thin film caused by residual stress. The finite element analysis results are similar to indentation test.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.89-89
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• 2011

a-GIZO(비정질 Ga-In-Zn-O)박막은 유연하며 광학적으로 투명하고 높은 전자의 이동도를 갖는 반도체적 특성을 갖기 때문에 차세대 display분야에서 TFT(Thin-Film-Transistor)의 high speed active-matrix layer로써 각광을 받고 있다. 이 물질의 표면은 환경 및 표면처리에 매우 민감하며 [1,2], 이 표면에 metal이 증착되는 경우에도, 선행 연구에 의하면, 다양한 chemical state가 나타남을 알 수 있었다. 이것은 metal의 증착에 따라 metal과 a-GIZO 사이의 contact 저항이 달라짐을 의미한다. 우리는 a-GIZO 박막 위에 Au를 단계적으로 증착시키면서, Au coverage 증가에 따른 core-level과 valence에서의 x-ray photoelectron spectra의 변화를 살펴봄으로써 a-GIZO박막과 Au의 계면에서 일어나는 chemical state의 변화를 알 수 있었다. 특히, Au deposition의 전 처리과정으로써 Ne ion sputtering을 두 단계로 다르게 하여 a-GIZO의 표면환경에 따른 Au 증착의 영향을 살펴보았다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 제37회 하계학술대회 논문집 B
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• pp.711-712
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• 2006

For the application of superconducting fault current limiters(SFCLs) to the protection system, quench recovery characteristics of Au/YBCO thin film were investigated. The Au/YBCO thin film was designed as a SFCL element with a bi-spiral pattern. The SFCL element limited the fault current successfully. For the analysis of the recovery to superconducting state, we measured resistance variation of the SFCL element after the quench. In addition, in order to investigate the dependence of quench characteristics of SFCL on the $LN_2$ cooling condition, we measured the recovery time under a pressure of 1, 2 and 3 atm. As the results, the recovery time increased in proportion to the duration of the fault currents. In the sub-cooled condition, while the quench development was exactly the same, the recovery time was shortened as the pressure increased.

• 센서학회지
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• 제33권3호
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• pp.139-146
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• 2024

Surface-enhanced Raman scattering (SERS) enables the detection of various types of π-conjugated biological and chemical molecules owing to its exceptional sensitivity in obtaining unique spectra, offering nondestructive classification capabilities for target analytes. Herein, we demonstrate an innovative strategy that provides significant machine learning (ML)-enabled predictive SERS platforms through surface-engineered graphene via complementary hybridization with Au nanoparticles (NPs). The hybridized Au NPs/graphene SERS platforms showed exceptional sensitivity (10^-7 M) due to the collaborative strong correlation between the localized electromagnetic effect and the enhanced chemical bonding reactivity. The chemical and physical properties of the demonstrated SERS platform were systematically investigated using microscopy and spectroscopic analysis. Furthermore, an innovative strategy employing ML is proposed to predict various analytes based on a featured Raman spectral database. Using a customized data-preprocessing algorithm, the feature data for ML were extracted from the Raman peak characteristic information, such as intensity, position, and width, from the SERS spectrum data. Additionally, sophisticated evaluations of various types of ML classification models were conducted using k-fold cross-validation (k = 5), showing 99% prediction accuracy.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.190-194
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• 2002

In this study, the etching of Au thin films have been performed in an inductively coupled CF4/Cl2/Ar plasma. The etch properties were measured as the CF4 adds from 0 % to 30 % to the Cl2/(Cl2 + Ar) gas mixing ratio of 0.2. Other parameters were fixed at a rf power of 700 W, a dc bias voltage of 150 V, a chamber pressure of 15 mTorr, and a substrate temperature of $30^{\circ}C$. The highest etch rate of the Au thin film was 370 nm/min at a 10 % additive CF4 into Cl2/(Cl2 + Ar) gas mixing ratio of 0.2. The surface reaction of the etched Au thin films was investigated using x-ray photoelectron spectroscopy (XPS) analysis. From x-ray photoelectron spectroscopy (XPS) analysis, the intensities of Au peaks are changed. There is a chemical reaction between Cl and Au. Au-Cl is hard to remove on the surface because of its high melting point and the etching products can be sputtered by Ar ion bombardment. We obtained the cleaned and steep profile.

• 한국전기전자재료학회논문지
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• 제20권1호
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• pp.41-46
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• 2007

Surface potential properties at the interface of pentacene thin films on gold (Au) and aluminum (Al) surfaces were investigated by using a near-field scanning microwave microprobe (NSMM). The surface potential formed across the pentacene film was observed by measuring the microwave reflection coefficient $S_{11}$ and compared with the result of a Kelvin-probe method. The obtained reflection coefficient ${\Delta}S_{11}$ of the pentacene thin films on Al was decreased as the pentacene film thickness increased due to the increased accumulation of negative space charges, while for Au ${\Delta}S_{11}$ was essentially constant.