• 제목/요약/키워드: Au coating

검색결과 93건 처리시간 0.038초

AFM을 이용한 MEMS/NEMS 공정용 재료의 트라이볼로지 특성에 관한 연구 (A Study on Tribological Characteristics of Materials for MEMS/NEMS Using Chemically Modified AFM tip)

  • 허정철;김광섭;김경웅
    • Tribology and Lubricants
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    • 제24권2호
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    • pp.63-71
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    • 2008
  • Friction and adhesion tests were conducted to investigate tribological characteristics of materials for MEMS/NEMS using atomic force microscope (AFM). AFM Si tips were chemically modified with a self-assembled monolayer (SAM) derived from trichlorosilane like octadecyltrichlorosilane (OTS) and (1H, 1H, 2H, 2H-perfluorooctyl) trichlorosilane (FOTS), and various materials, such as Si, Al, Au, Cu, Ti and PMMA films, were prepared for the tests. SAMs were coated on Si wafer by dipping method prior to AFM tip to determine a proper dipping time. The proper dipping time was determined from the measurements of contact angle, surface energy and thickness of the SAMs. AFM tips were then coated with SAMs by using the same coating condition. Friction and adhesion forces between the AFM Si tip modified with SAM and MEMS/NEMS materials were measured. These forces were compared to those when AFM tip was uncoated. According to the results, after coating OTS and FOTS, the friction and adhesion forces on all materials used in the tests decreased; however, the effect of SAM on the reduction of friction and adhesion forces could be changed according to counterpart materials. OTS was the most effective to reduce the friction and adhesion forces when counterpart material was Cu film. In case of FOTS, friction and adhesion forces decreased the most effectively on Au films.

청연군주묘(淸衍郡主墓) 출토복식(出土服飾) 중 직김(織金), 부김의(附金衣)의 보존처리 (Conservation Treatment of Jikgeum(Weave with Supplementary Golden Wefts) and Bugeum(Gold sticking) Textiles and Costumes Excavated from Tomb of Cheongyeongunju (a Princess))

  • 박승원;이윤경;유혜선
    • 박물관보존과학
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    • 제9권
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    • pp.67-83
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    • 2008
  • 국립중앙박물관이 소장하고 있는 청연군주 출토복식(신수751 의류 일괄) 중 織金 및 金箔이 있는 복식의 보존 처리 과정을 소개하고자 한다. 금사 및 금박의 비파괴분석(X-선형광분석:XRF)을 실시한 다음 표면의 금(Au)이 열화가 진행되면서 분상화된 금층에 아교 2%용액을 도포하여 접착력을 강화하였다. 표면의 먼지와 오염물제거를 위해 진공흡입을 통한 건식세척과 분사식 습식세척을 병행하였고 손상부분을 보수하여 유물의 원형을 회복하였다.

The effect of 3-mercapto-5-nitro-benzimidazole (MNB) and poly (methyl methacrylate) (PMMA) treatment sequence organic thin film transistor

  • Park, Jin-Seong;Suh, Min-Chul;Jeong, Jong-Han;Kim, Su-Young;Mo, Yeon-Gon
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.1174-1177
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    • 2006
  • A bottom contact organic thin film transistor (OTFT) is fabricated with an organic double-layered gate insulator (GI) and pentacene. The PMMA and MNB layers are treated on gate insulator and source/drain (S/D, Au) before depositing pentacene to investigate device properties and pentacene growth. The sequence of surface treatment affects a device performance seriously. The ultra-thin PMMA (below 50A) was deposited on organic gate insulator and S/D metal by spin coating method, which showed no deterioration of on-state current (Ion) although bottom contact structure was exploited. We proposed that the reason of no contact resistance (Rc) increase may be due to a wettability difference in between PMMA / Au and PMMA / organic GI. As a result, the device treated by $PMMA\;{\rightarrow}\;MNB$ showed much better Ion behavior than those fabricated by $MNB\;{\rightarrow}\;PMMA$. We will report the important physical and electrical performance difference associated with surface treatment sequence.

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금 입자 증착된 탄소나노튜브의 커패시턴스 증가 및 박막형 이온 선택성 전극으로서의 특성 평가 (Capacitance Enhancement and Evaluation of Gold-Deposited Carbon Nanotube Film Ion-Selective Electrode)

  • 김도연;손한별;임효령
    • 한국분말재료학회지
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    • 제30권4호
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    • pp.310-317
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    • 2023
  • Small-film-type ion sensors are garnering considerable interest in the fields of wearable healthcare and home-based monitoring systems. The performance of these sensors primarily relies on electrode capacitance, often employing nanocomposite materials composed of nano- and sub-micrometer particles. Traditional techniques for enhancing capacitance involve the creation of nanoparticles on film electrodes, which require cost-intensive and complex chemical synthesis processes, followed by additional coating optimization. In this study, we introduce a simple one-step electrochemical method for fabricating gold nanoparticles on a carbon nanotube (Au NP-CNT) electrode surface through cyclic voltammetry deposition. Furthermore, we assess the improvement in capacitance by distinguishing between the electrical double-layer capacitance and diffusion-controlled capacitance, thereby clarifying the principles underpinning the material design. The Au NP-CNT electrode maintains its stability and sensitivity for up to 50 d, signifying its potential for advanced ion sensing. Additionally, integration with a mobile wireless data system highlights the versatility of the sensor for health applications.

Fabrication of Optically Active Nanostructures for Nanoimprinting

  • Jang, Suk-Jin;Cho, Eun-Byurl;Park, Ji-Yun;Yeo, Jong-Souk
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.393-393
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    • 2012
  • Optically active nanostructures such as subwavelength moth-eye antireflective structures or surface enhanced Raman spectroscopy (SERS) active structures have been demonstrated to provide the effective suppression of unwanted reflections as in subwavelength structure (SWS) or effective enhancement of selective signals as in SERS. While various nanopatterning techniques such as photolithography, electron-beam lithography, wafer level nanoimprinting lithography, and interference lithography can be employed to fabricate these nanostructures, roll-to-roll (R2R) nanoimprinting is gaining interests due to its low cost, continuous, and scalable process. R2R nanoimprinting requires a master to produce a stamp that can be wrapped around a quartz roller for repeated nanoimprinting process. Among many possibilities, two different types of mask can be employed to fabricate optically active nanostructures. One is self-assembled Au nanoparticles on Si substrate by depositing Au film with sputtering followed by annealing process. The other is monolayer silica particles dissolved in ethanol spread on the wafer by spin-coating method. The process is optimized by considering the density of Au and silica nano particles, depth and shape of the patterns. The depth of the pattern can be controlled with dry etch process using reactive ion etching (RIE) with the mixture of SF6 and CHF3. The resultant nanostructures are characterized for their reflectance using UV-Vis-NIR spectrophotometer (Agilent technology, Cary 5000) and for surface morphology using scanning electron microscope (SEM, JEOL JSM-7100F). Once optimized, these optically active nanostructures can be used to replicate with roll-to-roll process or soft lithography for various applications including displays, solar cells, and biosensors.

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금 나노미립자가 함침된 $TiO_2/SiO_2$ 박막의 광학적 성질 (Optical Property of Au-doped $TIO_2/SiO_2$ thin film)

  • 정미원;김지은;이경철
    • 대한화학회지
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    • 제44권1호
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    • pp.60-67
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    • 2000
  • 표면공명흡수는 매질의 유전상수값에 의존한다. 금 나노미립자가 함침된 $TiO_2/SiO_2$ 복합산화물 박막을 $Ti(OPr^i)_4$$Si(OEt)_4$, 그리고 $HAuCl_4{\cdot}7H_2O$를 사용하여 졸-겔 방법으로 제조하였다. $TiO_2/SiO_2$ 박막에 함침된 금 나노미립자의 최대 표면 공명 흡수는 $TiO_2/SiO_2$의 몰비에 따라 540 nm에서 615 nm 까지 선형적으로 변하였다. 이러한 박막에 함침된 금 나노미립자의 크기와 구조를 TEM과 XRD로 측정하였다. 그리고 $TiO_2/SiO_2$ 박막의 유전상수값을 실험 data로부터 이론적으로 계산하였다

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Improved Conductivities of SWCNT Transparent Conducting Films on PET by Spontaneous Reduction

  • 민형섭;김상식;이전국
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2011년도 추계학술발표대회
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    • pp.43.2-43.2
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    • 2011
  • Single-walled carbon nanotubes (SWCNT) are transparent in the visible and show conductivity comparable to copper, and are environmentally stable. SWCNT films have high flexibility, conductivity and transparency approaching that indium tin oxide (ITO), and can be prepared inexpensively without vacuum equipment. Transparent conducting Films (TCF) of SWCNTs has the potential to replace conventional transparent conducting oxides (TCO, e.g. ITO) in a wide variety of optoelectronic devices, energy conversion and photovoltaic industry. However, the sheet resistance of SWCNT films is still higher than ITO films. A decreased in the resistivity of SWCNT-TCFs would be beneficial for such an application. We fabricated SWCNT sheet with $KAuBr_4$ on PET substrate. Arc-discharge SWCNTs were dispersed in deionized water by adding sodum dodecyl sulfate (SDS) as surfactant and sonicated, followed by the centrifugation. The dispersed SWCNT was spray-coated on PET substrate and dried on a hotplate at $100^{\circ}C$. When the spray process was terminated, the TCF was immersed into deionized water to remove the surfactant and then it was dried on hotplate. The TCF film was then treated with AuBr4-, rinsed with deionized water and dried. The surface morphology of TCF was characterized by field emission scanning electron microscopy. The sheet resistance and optical transmission properties of the TCF were measured with a four-point probe method and a UV-visible spectrometry, respectively. $HNO_3$ treated SWCNT films with Au nano-particles have the lowest 61 ${\Omega}$/< sheet resistance in the 80% transmittance. Sheet resistance was decreased due to the increase of the hole concentration at the washed SWCNT surface by p-type doping of $AuBr_4{^-}$.

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Structural Evolution of ZnO:Ga Thin Film on Profiled Substrate Grown by Radio Frequency Sputtering

  • Sun, J.H.;Kim, J.H.;Ahn, B.G.;Park, S.Y.;Jung, E.J.;Lee, J.H.;Kang, H.C.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.72-72
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    • 2011
  • Recently, Zinc oxide (ZnO) nano-structures have been received attractive attention because of their outstanding optical and electrical properties. It might be a promising material considered for applications to photonic and electronic devices such as ultraviolet light emitting diode, thin film transistor, and gas sensors. ZnO nano-structures can be typically synthesized by the VLS growth mode and self-assembly. In the VLS growth mode using various growth techniques, the noble metal catalysts such as Au and Sn were used. However, the growth of ZnO nano-structures on nano-crystalline Au seeds using radio frequency (RF) magnetron sputtering might be explained by the profile coating, i.e. the ZnO nano-structures were a morphological replica of Au seeds. Ga doped ZnO (ZnO:Ga) nano-structures using this concept were synthesized and characterized by XRD, AFM, SEM, and TEM. We found that surface morphology is drastically changed from initial islands to later sun-flower typed nano-structures. We will present the structural evolution of ZnO:Ga nano-structures with increasing the film thickness.

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금 나노입자 형성을 이용한 계층구조 SiO2 코팅층의 제조 및 표면 특성 (Synthesis and Surface Properties of Hierarchical SiO2 Coating Layers by Forming Au Nanoparticles)

  • 김지영;김은경;김상섭
    • 한국재료학회지
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    • 제23권1호
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    • pp.53-58
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    • 2013
  • Superhydrophobic $SiO_2$ layers with a micro-nano hierarchical surface structure were prepared. $SiO_2$ layers deposited via an electrospray method combined with a sol-gel chemical route were rough on the microscale. Au particles were decorated on the surface of the microscale-rough $SiO_2$ layers by use of the photo-reduction process with different intensities ($0.11-1.9mW/cm^2$) and illumination times (60-240 sec) of ultraviolet light. With the aid of nanoscale Au nanoparticles, this consequently resulted in a micro-nano hierarchical surface structure. Subsequent fluorination treatment with a solution containing trichloro(1H,2H,2H,2H-perfluorooctyl)silane fluorinated the hierarchical $SiO_2$ layers. The change in surface roughness factor was in good agreement with that observed for the water contact angle, where the surface roughness factor developed as a measure needed to evaluate the degree of surface roughness. The resulting $SiO_2$ layers revealed excellent repellency toward various liquid droplets with different surface tensions ranging from 46 to 72.3 mN/m. Especially, the micro-nano hierarchical surface created at an illumination intensity of $0.11mW/cm^2$ and illumination time of 60 sec showed the largest water contact angle of $170^{\circ}$. Based on the Cassie-Baxter and Young-Dupre equations, the surface fraction and work of adhesion for the micronano hierarchical $SiO_2$ layers were evaluated. The work of adhesion was estimated to be less than $3{\times}10^{-3}N/m$ for all the liquid droplets. This exceptionally small work of adhesion is likely to be responsible for the strong repellency of the liquids to the micro-nano hierarchical $SiO_2$ layers.

솔-젤 회전 코팅법을 이용한 강유전성 $BaTiO_3$ 박막제조 (Preparation of Ferroelectric $Cr_3C_2$ Thin Film Using Sol-Gel Spin Coating Process)

  • 배호기;고태경
    • 한국세라믹학회지
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    • 제31권7호
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    • pp.795-803
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    • 1994
  • Ferroelectric BaTiO3 thin film was produced using BaTi-ethoxide sol. This sol was prepared from BaTi-ethoxide by a partial hydrolysis with ammonia as a basic catalyst and ethylene glycol as a chelating agent. BaTiO3 thin film was prepared from three continuous spin-coating layers of the sol on bare Si(100) wafer at 2500 rpm followed by pyrolysis at $700^{\circ}C$ for 30 min. After the heat treatment, the film was 0.200$\pm$0.010 ${\mu}{\textrm}{m}$ thick and its grain size was 0.059 ${\mu}{\textrm}{m}$. On the other hand, electrical properties were measured for BaTiO3 thin film separately prepared on Au-deposited silicon wafer. The dielectric constant and loss of the BaTiO3 thin film at room temperature was 150~160 and 0.04 respectively, which was measured at 10 kHz and oscillation level of 0.1 V. In the measurements of the dielectric properties at high temperatures, it was observed that the capacitance of the thin film increases steeply, while the dielectric loss reaches maximum around 1$25^{\circ}C$, which corresponds a phase transition from tetragonal to cubic BaTiO3.

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