• 한국소음진동공학회논문집
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• 제12권3호
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• pp.187-194
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• 2002

A seven-port impedance and admittance matrices of multilayered piezoelectric beam are derived for the analysis of piezoelectric AFM ( atomic force microscope) cantilever that is partially covered by the piezoelectric layer. The variational principle is used for deriving the extensional and flexural motional equations and the conjugate parameters. Overall impedance matrix of AFM cantilever can be obtained by combining two impedance matrices of the covered and the non-covered. she resonance and antiresonance frequencies and the effective electromechanical coupling factors are calculated using the derived matrices. The results and the three dimensional finite element solutions are compared with the experimental results in other publication.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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• pp.522-525
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• 2004

ITO thin films $({\sim}150\;nm)$ are deposited on glass substrates by different deposition condition. The sheet resistance of ITO thin films measured by using a four probe station. The microstructure of these films is determined using a X-ray diffractometer (XRD) and a scanning electron microscope (SEM) and a atomic force microscope (AFM). The sheet resistance of ITO thin films compared $s_{11}$ values by using a near field scanning microwave microscope.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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• pp.1042-1045
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• 2004

ITO thin films ($\sim150nm$) are deposited on glass substrates by different deposition condition. The sheet resistance of ITO thin films measured by using a four probe station. The microstructure of these films is determined using a X-ray diffractometer (XRD) and a scanning electron microscope (SEM) and a atomic force microscope (AEM). The sheet resistance of ITO thin films compared $s_11$ values by using a near field scanning microwave microscope.

• 한국정밀공학회지
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• 제19권3호
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• pp.13-18
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• 2002

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.413-418
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• 2005

This paper proposes a measurement method for the surface of micro-parts by using AFM(Atomic Force Microscope). To this end, two techniques are presented to extend the capacity of AFM. First, the measurement range is extended by using an image matching method based on correlation coefficients. To account for the inaccuracy of the coarse stage implemented in AFM's, the image matching technique is applied to two neighboring images intentionally overlapped with each other. Second, a method to measure the shape of relatively large specimen is presented by using the inherent trigger mechanism due to the atomic force. The proposed method is proved effective through a series of experiments.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 추계학술대회논문집
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• pp.879-882
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• 2005

This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(Finite element method) program. The maximum travel range of the planar scanner is above than 140 $\mu$m. The 3 axis positioning capability was verified by the mode analysis using the FEM program. Moreover, we presented the actual AFM(Atomic Force Microscope) imaging results with up to 2Hz imaging scan rate. Experimental results show that the properties of the proposed planar scanner is well enough to be used in SPM applications like AFM.

• Bulletin of the Korean Chemical Society
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• 제28권1호
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• pp.81-84
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• 2007

Ab initio periodic Hartree-Fock calculations with the full potential and minimum basis set are applied to interpretation of scanning tunneling microscope (STM) and atomic force microscope (AFM) images on 1TVTe2. Our results show that the simulated STM image shows asymmetry while the simulated AFM image shows the circular electron densities at the bright spots without asymmetry of electron density to agree with the experimental AFM image. The bright spots of both the STM and AFM images of VTe2 are associated with the surface Te atoms, while the patterns of bright spots of STM and AFM images are different.

• 한국방재학회:학술대회논문집
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• 한국방재학회 2010년도 정기 학술발표대회
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• pp.102.1-102.1
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• 2010

대체수자원 중 막여과 기술에 대한 관심이 지속적으로 높아지고 있다. 하지만, 이러한 막여과 기술에는 fouling이 발생시 효율저감, flux저감, 소모에너지 증대 등 문제점이 발생한다. 이러한 fouling저감을 위해 막 표면특성분석을 통한 기초연구가 필요하다고 보고 이 연구를 진행하였다. AFM을 이용하여 CML입자와 막의 상호작용을 통해 초기 막오염 경향을 예측할 수 있다.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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• pp.560-562
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• 2009

In this paper, we proposed a simple method of decreasing the off current generated by degradation for improve the electrical characteristics such as mobility and on/off current ratio by making the line patterns on the pentacene surface between the electrodes using atomic force microscope (AFM) lithography.

• 한국정밀공학회지
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• 제15권9호
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• pp.167-174
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• 1998

In this work the surface damage of head and disk of a hard disk drive was analysed using an Atomic Force Microscope. The initial damage of the disk occurred by generation of extremely small wear particles. Also it was shown that wear particles tend to pile up near the front side of the slider. The surface damage mechanism of drag test and contact-start-stop test was found to be quite similar.