• Title/Summary/Keyword: Atmospheric pressure plasma

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펄스변조의 듀티비 변경에 따른 DBD 대기압 플라즈마 특성 연구 (Study on the Atmospheric Plasma Characteristics of Dielectric Barrier Discharge due to a Variation of the Duty Ratio of Pulse Modulation)

  • 박종인;황상혁;조태훈;윤명수;곽형신;진기남;전부일;최은하;권기청
    • 한국재료학회지
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    • 제25권11호
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    • pp.616-621
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    • 2015
  • Atmospheric pressure plasma is used in the biological and medical fields. Miniaturization and safety are important in the application of apply atmospheric plasma to bio devices. In this study, we made a small, pocket-sized inverter for the discharge of atmospheric plasma. We used pulse power to control the neutral gas temperature at which the, when plasma was discharged. We used direct current of 5 V of bias(voltage). The output voltage is about 1 to 2 kilo volts the frequency is about 80 kilo hertz. We analyzsed the characteristics of the atmospheric plasma using OES(Optical emission spectroscopy) and the Current-Voltage characteristic of pulse power. By calculating of the current voltage characteristics, we were able to determine that, when the duty ratio increased, the power that actually effects the plasma discharge also increased. To apply atmospheric plasma to human organisms, the temperature is the most important factor, we were able to control the temperature by modulating the pulse power duty ratio. This means we can use atmospheric plasma on the human body or in other areas of the medical field.

대기압 플라즈마와 응용 (Atmospheric Plasma and Its Applications)

  • 엄환섭
    • 한국진공학회지
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    • 제15권2호
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    • pp.117-138
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    • 2006
  • 지표면에서 플라즈마는 전기방전에 의하여 만들어낸다. 그래서 대부분의 플라즈마 발생은 1백만분의 1기압보다 더 낮은 기압에서 발생하고 있었다. 그러나 많은 플라즈마 응용은 고기압에서 발생한 플라즈마를 요구하고 있다. 진공펌프와 같은 고가의 장비를 피하기 위하여 과학자들은 1기압이나 그이상의 압력에서 플라즈마를 발생하는 연구를 하기 시작했다. 많은 량의 제료 공정, 환경보호와 개선, 그리고 고효율 에너지 창출과 이용 등의 분야에 플라즈마를 사용할 때에는 오직 더 많은 량의 플라즈마를 더욱 값싸게 만들 때에만 가능한 것이다. 우리는 따라서 고기압에서 플라즈마를 만들어내는 새로운 방법을 개발하고 이러한 플라즈마가 21세기 산업에 적용될 수 있는 새로운 기반을 구축하는 연구를 수행하고 있다. 이러한 기술은 미래의 재료 공정이나, 환경 그리고 에너지 분야에 지대한 영향을 미칠 것으로 생각한다.

Palm-Size-Integrated Microwave Power Module at 1.35-GHz for an Atmospheric Pressure Plasma for biomedical applications

  • Myung, C.W.;Kwon, H.C.;Kim, H.Y.;Won, I.H.;Kang, S.K.;Lee, J.K.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.498-498
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    • 2013
  • Atmospheric Pressure Plasmas have pioneered a new field of plasma for biomedical application bridging plasma physics and biology. Biological and medical applications of plasmas have attracted considerable attention due to promising applications in medicine such as electro-surgery, dentistry, skin care and sterilization of heat-sensitive medical instruments [1]. Traditional approaches using electronic devices have limits in heating, high voltage shock, and high current shock for patients. It is a great demand for plasma medical industrial acceptance that the plasma generation device should be compact, inexpensive, and safe for patients. Microwave-excited micro-plasma has the highest feasibility compared with other types of plasma sources since it has the advantages of low power, low voltage, safety from high-voltage shock, electromagnetic compatibility, and long lifetime due to the low energy of striking ions [2]. Recent experiment [2] shows three-log reduction within 180-s treatment of S. mutans with a low-power palm-size microwave power module for biomedical application. Experiments using microwave plasma are discussed. This low-power palm-size microwave power module board includes a power amplifier (PA) chip, a phase locked loop (PLL) chip, and an impedance matching network. As it has been a success, more compact-size module is needed for the portability of microwave devices and for the various medical applications of microwave plasma source. For the plasma generator, a 1.35-GHz coaxial transmission line resonator (CTLR) [3] is used. The way of reducing the size and enhancing the performances of the module is examined.

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유량에 따른 대기압 유전체 전위장벽방전(DBD) 플라즈마 젯 발생에 관한 연구 (A Study of Atmospheric-pressure Dielectric Barrier Discharge (DBD) Volume Plasma Jet Generation According to the Flow Rate)

  • 정병호
    • 산업융합연구
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    • 제21권7호
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    • pp.83-92
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    • 2023
  • 유전체 전위장벽방전방식에 의한 플라즈마 젯의 블렛 형상은 인가되는 유량과 전기장의 크기에 따라 달라지고 이러한 변화는 DBD 플라즈마 젯의 밀도차이에 의한 스펙트럼 분포의 차이로 나타난다. 발생된 플라즈마 젯의 스펙트럼의 분석을 통한 활성종의 발생과 강도의 차이는 장치를 활용하는데 있어서 중요한 요소이다. 본 논문에서는 Ar가스를 이용한 대기압 볼륨 DBD방식의 플라즈마 젯 발생장치를 제안된 설계방법에 따라 구성하였다. 플라즈마 젯의 발생을 위한 유량의 의존도를 규명하기 위한 Ar가스의 유동해석을 시뮬레이션을 통해 확인하였고 프로토타입 시스템에서는 MFC를 통한 유량제어를 통해 최적의 플라즈마 젯 불렛형상을 발생시키고 발생된 플라즈마 젯의 특성을 분석하기 위해 스펙트로미터를 이용한 플라즈마 젯의 특성을 분석하였다. 제안된 시스템의 설계방법을 통한 장치에서 최적의 플라즈마 젯 형상 확립방법과 EOS 상에서 활성종에 대한 결과를 확인하였다.

대기압 플라즈마 처리를 통한 PP 섬유의 친수화 (Hydrophilization of PP Fiber through Atmospheric Pressure Plasma Processing)

  • 조항성
    • 한국염색가공학회지
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    • 제33권3호
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    • pp.113-119
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    • 2021
  • Polypropylene fiber has the advantages of light weight, heat retention and antibacterial properties, but it is difficult to expand its market because it cannot be dyed or imparted functionality due to its hydrophobic properties. Atmospheric pressure plasma processing can modify the surface of the fiber and create polar functional groups on the surface of the fiber. In this study, an experiment was conducted on the hydrophilization of the ultra-hydrophobicity of polypropylene through plasma processing and surface changes before and after plasma processing. The ultra-hydrophobicity of polypropylene is the cause of impossible for dyeing and imparting functionality. Untreated polypropylene became hydrophilic, and it was confirmed that the ratio of oxygen and carbon(O/C) increased about 11 times from untreated polypropylene 0.017 to plasma-treated polypropylene 0.190.

$TiO_2$ 반도체 용사피막의 광전극 특성에 미치는 용사조건의 영향 (Effects of Plasma Spray Conditions on Photoelectric Properties of Plasma Sprayed $TiO_2$ Semiconductor)

  • 박정식;박경채
    • Journal of Welding and Joining
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    • 제12권1호
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    • pp.94-101
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    • 1994
  • In this study, plasma spraying has been used to produce $TiO_2$ polycrystalline coatings from $TiO_2$ powders. The physical and chemical properties of plasma sprayed $TiO_2$ coatings depend greatly on plasma spraying conditions. The electrical resistivity, oxygen concentration, photocurrent and crystal structure of plasma sprayed $TiO_2$ coating has been studied. The results are as follows: 1. The oxygen loss and electrical conductivity of $TiO_2$ plasma sprayed coatings increased by low pressure and high amount of auxiliary gas, hydrogen in plasma spraying. 2. Oxygen loss increase electrical conductivity, and decrease photocurrent of $TiO_2$ plasma sprayed coatings. 3. Photocurrent of $TiO_2$ plasma sprayed coatings manufactured in atmospheric pressure is higher than that of low pressure.

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Interactions of Low-Temperature Atmospheric-Pressure Plasmas with Cells, Tissues, and Biomaterials for Orthopaedic Applications

  • Hamaguchi, Satoshi
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.20-20
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    • 2011
  • It has been known that, under certain conditions, application of low-temperature atmospheric-pressure plasmas can enhance proliferation of cells. In this study, conditions for optimal cell proliferation were examined for various cells relevant for orthopaedic applications. Plasmas used in our experiments were generated by dielectric barrier discharge (DBD) with a helium flow (of approximately 3 litter/min) into ambient air at atmospheric pressure by a 10 kV~20 kHz power supply. Such plasmas were directly applied to a medium, in which cells of interest were cultured. The cells examined in this study were human synoviocytes, rat mesenchymal stem cells derived from bone marrow or adipose tissue, a mouse osteoblastic cell line (MC3T3-E1), a mouse embryonic mesenchymal cell line (C3H-10T1/2), human osteosarcoma cells (HOS), a mouse myoblast cell line (C2C12), and rat Schwann cells. Since cell proliferation can be enhanced even if the cells are not directly exposed to plasmas but cultured in a medium that is pre-treated by plasma application, it is surmised that long-life free radicals generated in the medium by plasma application stimulate cell proliferation if their densities are appropriate. The level of free radical generation in the medium was examined by dROMs tests and correlation between cell proliferation and oxidative stress was observed. Other applications of plasma medicine in orthopaedics, such as plasma modification of artificial bones and wound healing effects by direct plasma application for mouse models, will be also discussed. The work has been done in collaboration with Prof. H. Yoshikawa and his group members at the School of Medicine, Osaka University.

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Characteristics of Bovine Teeth Whitening in Accordance with Gas Environments of Atmospheric Pressure Nonthermal Plasma Jet

  • Sim, Geon Bo;Kim, Yong Hee;Kwon, Jae Sung;Park, Daehoon;Hong, Seok Jun;Kim, Young Seok;Lee, Jae Lyun;Lee, Gwang Jin;Lim, Hwan Uk;Kim, Kyung Nam;Jung, Gye Dong;Choi, Eun Ha
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.250.2-250.2
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    • 2014
  • Currently, teeth whitening method which is applicable to dental surgery is that physician expertises give medical treatment to teeth directly dealed with a high concentration of hydrogen peroxide and carbamide peroxide. If hydrogen peroxide concentration is too high for treatment of maximized teeth whitening effect [1], it is harmful to the human body [2]. To the maximum effective and no harmful teeth whitening effect in a short period of time at home, we have observed the whitening effect using carbamide peroxide (15%) and a low-temperature atmospheric pressure plasma jet which is regulated by the Food and Drug Administration. The gas supplied conditions of the non-thermal atmospheric pressure plasma jet was with the humidified (0.6%) gas in nitrogen or air at gas flow rate of 1000 sccm. Also, the measurement of chemical species from the jet was carried out using the optical emission spectroscopy (OES), the evidence of increased reactive oxygen species compared to non-humidified plasma jet. We have found that the whitening effect of the plasma is very excellent through this experiment, when bovine teeth are treated in carbamide peroxide (15%) and water vapor (0.2 to 1%). The brightness of whitening teeth was increased up to 2 times longer in the CIE chromaticity coordinates. The colorimetric spectrometer (CM-3500d) can measure color degree of whitening effect.

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준 대기압 플라즈마를 이용한 잉크젯 프린팅용 폴리이미드 표면 개질 (Polyimide Surface Modifying using Near-Atmospheric Pressure Plasma for Inkjet Printing)

  • 문무겸;염근영
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2014년도 추계학술대회 논문집
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    • pp.16-16
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    • 2014
  • 본 논문에서는 polymer 기판 위에 direct inkjet patterning을 효율적으로 수행하기 위하여 기판 표면의 chemical bonding과 morphology를 in-line system 적용이 가능한 near atmospheric pressure plasma (N-APP)를 이용 하여 기판을 modifying 시켰다. modified substrate 위에 inkjet printing을 이용하여 metal interconnection을 하였다. 그 결과 기존 기판에서의 line width 보다 얇은 선폭을 획득 하였고 adhesion이 향상 되었다.

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다공성 금속 샤워헤드가 적용된 상압플라즈마 화학기상증착법을 이용한 저온 다결정 실리콘 증착 공정 (Low Temperature Polycrystalline Silicon Deposition by Atmospheric Pressure Plasma Enhanced CVD Using Metal Foam Showerhead)

  • 박형규;송창훈;오훈정;백승재
    • 한국전기전자재료학회논문지
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    • 제33권5호
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    • pp.344-349
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    • 2020
  • Modern thin film deposition processes require high deposition rates, low costs, and high-quality films. Atmospheric pressure plasma-enhanced chemical vapor deposition (AP-PECVD) meets these requirements. AP-PECVD causes little damage on thin film deposition surfaces compared to conventional PECVD. Moreover, a higher deposition rate is expected due to the surface heating effect of atomic hydrogens in AP-PECVD. In this study, polycrystalline silicon thin film was deposited at a low temperature of 100℃ and then AP-PECVD experiments were performed with various plasma powers and hydrogen gas flow rates. A deposition rate of 15.2 nm/s was obtained at the VHF power of 400 W. In addition, a metal foam showerhead was employed for uniform gas supply, which provided a significant improvement in the thickness uniformity.