Low Temperature Polycrystalline Silicon Deposition by Atmospheric Pressure Plasma Enhanced CVD Using Metal Foam Showerhead |
Park, Hyeong-Gyu
(IT Convergence Institute, Hankyong National University)
Song, Chang-Hoon (Department of Materials Science & Engineering, Yonsei University) Oh, Hoon-Jung (Bio-IT Micro FAB Center, Yonsei University) Baik, Seung Jae (IT Convergence Institute, Hankyong National University) |
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